Dual-wavelength simultaneous phase-shift interferometry method based on monochromatic CCD (couple charged device)

A phase-shifting interferometry and measurement method technology, which is applied in the field of optical interferometry and digital holographic measurement, can solve problems such as measurement result errors, and achieve the effects of high precision, improved resolution, and simple measurement methods

Active Publication Date: 2014-03-12
SOUTH CHINA NORMAL UNIVERSITY
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This method needs to take two pictures, and the piezoelectric ceramic (PZT) micro-displacement device is used for phase shifting in two ti

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  • Dual-wavelength simultaneous phase-shift interferometry method based on monochromatic CCD (couple charged device)
  • Dual-wavelength simultaneous phase-shift interferometry method based on monochromatic CCD (couple charged device)
  • Dual-wavelength simultaneous phase-shift interferometry method based on monochromatic CCD (couple charged device)

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[0040] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but the protection scope of the present invention should not be limited thereby.

[0041] In order to make it easier for the optical path to meet the monochromatic CCD sampling conditions, the first embodiment adopts a dual-wavelength phase-shift coaxial Mach-Zehnder interferometric optical path system. figure 1 It can be seen that the optical path system includes three parts: a phase shift system composed of a light source, a piezoelectric ceramic micro-displacer (PZT) and a computer (PC), a monochrome CCD and a data acquisition card, and an image acquisition system composed of a PC. The light source part is composed of a He-Ne laser with a wavelength of 633nm and a semiconductor-pumped solid-state laser with a wavelength of 532nm. The monochromatic CCD (charge coupled device) in the image acquisition part is the MTV-1802CB black and white low-light high...

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Abstract

The invention discloses a dual-wavelength simultaneous phase-shift interferometry method based on a monochromatic CCD. By the phase shift method, the monochromatic CCD is used for simultaneously acquiring dual-wavelength mixed phase-shift interferograms, two single-wavelength wrapped phases are respectively extracted from the acquired dual-wavelength mixed phase-shift interferograms, one of the single-wavelength wrapped phases is then subtracted from the other single-wavelength wrapped phase to work out a synthetic wavelength phase, so that synthetic wavelength phase information is obtained, and the phase information under synthetic wavelength is continuous phase distribution, which reflects the true three-dimensional shape of the surface of a measured object. The dual-wavelength simultaneous phase-shift interferometry method only needs to perform phase shift for the mixed interferograms for just one time, rather than phase shift for two wavelengths respectively, and the dual-wavelength simultaneous phase-shift interferometry method can be applied to measure the three-dimensional shapes of steps, grooves and the like with suddenly changed microstructure surfaces; the measurement method is simple, the measurement range is wide, the precision is high, and measurement is real-time, efficient and rapid.

Description

technical field [0001] The invention relates to the fields of optical interferometry and digital holographic measurement, in particular to a dual-wavelength simultaneous phase-shift interferometry method of a monochrome CCD. Background technique [0002] Digital holographic interferometry is a new type of holographic imaging measurement method that has attracted much attention in the field of precision measurement. With the continuous development and wide application of micro-structural devices such as micro-optical components, semiconductor devices, and micro-opto-electromechanical systems, these fields urgently need a high-precision, high-resolution, non-destructive, real-time and fast measurement method for surface structures (such as : Area contour, defect hole, protrusion, crack, surface error, etc.) for measurement. The three-dimensional surface topography detection method based on digital holographic interferometry is an important means to obtain the surface morpholo...

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Application Information

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IPC IPC(8): G01B11/24
Inventor 吕晓旭张望平费蕾寰赵晖钟丽云
Owner SOUTH CHINA NORMAL UNIVERSITY
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