93 results about "Digital micromirror device" patented technology

The invention discloses a semiconductor etching end point detection method and a multi-channel detection system, and the detection method comprises the following steps: outputting detection light; expanding the detection light into a continuous spectrum band; imaging the continuous spectral band to a modulation surface of a digital micromirror device, and establishing a pixel group corresponding to each narrow-band wavelength of the continuous spectral band; performing spatial sampling on the continuous spectrum band, and distributing and writing a unique radio frequency modulation frequency f for each pixel group; respectively executing vibration type switch modulation on each pixel group at a radio frequency modulation frequency f so as to convert wavelength information of a continuous spectrum band into a time domain frequency optical signal; converting the time domain frequency optical signal into a time domain electric signal; performing frequency domain analysis on the time domain electric signal, and demodulating gas absorption light intensity corresponding to each modulation frequency; and judging the etching end point of the semiconductor according to the change trend of the gas absorption light intensity. According to the invention, parallel detection of a plurality of spectrum channels can be realized through a single detector so as to judge an etching end point.

The invention relates to a structured light illumination confocal super-resolution measurement system and method, and relates to the technical field of optical measurement. The system comprises a digital micromirror device (DMD), a sample platform, an electric displacement platform, a microscopic imaging assembly, a complementary metal oxide semiconductor (CMOS) imaging assembly and computer equipment, and the DMD is used for adjusting the point light source array and the structured light field. According to the DMD-based confocal super-resolution measurement method, a structured light field and a signal-noise separation technology are combined, and high-precision and high-resolution three-dimensional surface reconstruction can be realized. By using the flexibility of the DMD and the advantages of the super-resolution technology, the spatial resolution and speed of confocal imaging are effectively improved, so that the measurement process is more accurate. In addition, low-rank decomposition and self-supervised deep learning methods are fused, the image reconstruction process is optimized, noise interference is suppressed, and the overall performance of the system is further improved.

Lamp (10) with: a light source (100) designed to emit a first light; and a beam splitter (200) exposed to the first light beam and configured to transmit part of the first light beam to form a transmitted light beam and to reflect another part of the first light to form a reflected light beam, wherein the luminaire (10) produces an output beam pattern that includes the transmitted light beam and the reflected light beam, and a reflector (300) configured to further reflect the first light beam reflected by the beam splitter (200) to form a second reflected light beam, wherein the output beam pattern includes the second reflected light beam, characterized by a digital micromirror device (DMD, 400) configured to further reflect the second reflected light beam to form a third reflected light beam, wherein the output beam pattern includes the third reflected light beam, and a common circuit board (PCB, 800) on which the light source (100) and the digital micromirror device (400) are mounted.

The present invention presents improved systems and methods for performing multi-photon lithography. A line-scanning temporally focused two-photon lithography (LS-TFTPL) technique is capable of patterning three-dimensional structures with high throughput. An example LS-TFTPL system may include a pulsed laser, first optical components for expanding light pulses into an elongated or line cross section, a digital micromirror device for modulating the light pulses with a linear pattern and dispersing spectral components of the modulated light pulses, and second optical components for focusing the dispersed spectral components of the modulated light pulse at a line in or on a target material. The focused spectral components may alter the target material within selected voxels along the line, where the selected voxels spatially correspond to the linear pattern.

The application discloses a kind of diffractive light neural network computing systems and methods for realizing pure optical nonlinearity, belong to photonic computing and artificial intelligence hardware technical field.Its system includes coherent light source, linear light computing unit, nonlinear light activation unit and optical detection unit arranged in order along optical path, wherein linear light computing unit is programmable phase modulation using spatial light modulator, nonlinear light activation unit is programmable binary amplitude modulation using digital micromirror device, and both are directly coupled to form pure optical computing path without photoelectric conversion on optical path.Its method trains neural network through customized loss function, drives nonlinear activation function output to binary convergence, and maps the parameters obtained by training into phase map and binary mask respectively and loads to hardware.The application realizes true all-optical nonlinear computation, with the advantages of high energy efficiency, extremely low delay, compact structure and strong parallel processing capability.

This invention relates to an optical Ising calculation method and system based on dual digital micromirror devices (DMDs). First, the combinatorial optimization problem is mapped to an Ising model. Multiple mask vectors are constructed, and each mask vector is decomposed into multiple binary bit planes. A spin configuration matrix is ​​constructed and loaded into DMD-A. For each mask vector, its binary bit planes are sequentially loaded into DMD-B. The light intensity modulated by the two DMDs is collected and processed. The optical inner product is obtained by combining the bit-weighted components, and then the energy contribution value of the mask vector is calculated. The total Hamiltonian is obtained by summing all contributions. The energy difference is calculated by randomly flipping the spins and repeating the above steps. The probability of accepting the current flip is calculated based on the energy difference. This process is iterated until the maximum number of iterations is reached to obtain the final solution. The system is used to implement the above method. Compared with the prior art, this invention can achieve a high-speed, stable, and coherently independent optical Ising solution method.

Variable-angle ellipsometry is performed using a high speed polarization state modulator, a photodetector, and a digital micromirror device or spinning disk to encode the angle of incidence of light with a high sampling rate in a time domain or frequency domain. A variable-angle ellipsometer uses a high speed, axially stationary polarization state modulator, such as a photoelastic modulator, and a high speed detector, such as a photodiode, for high speed data acquisition. To acquire data at a plurality of incident angles, a lens is used to generate a large incident angle distribution along an optical axis that is at an oblique angle of incidence and discrete or combinations of incident angles of light are selected in a sequence in the time domain or modulated over a plurality of incident angles in the frequency domain.

The application discloses a kind of three-dimensional topography measuring device and method based on digital micromirror device's dual camera, and it belongs to the field of stereo vision imaging.The three-dimensional topography measuring device based on digital micromirror device's dual camera includes parallel light source, first digital micromirror device, projection system, objective, second digital micromirror device, first relay lens, second relay lens, first CCD camera and second CCD camera.The three-dimensional topography measuring method based on digital micromirror device's dual camera includes image acquisition and phase calculation, through time sequence difference and dual camera difference, the topography measurement of measured target is realized, and common-mode noise is eliminated, and measurement precision is improved.

Exemplary systems, method and compute-accessible medium can be provided, e.g., for a visual stimulation or an optogenetic activation during a scan of at an object. For example, it is possible to utilize a controller which can be configured to receive signal information regarding the scan, and to precisely control a light engine. The exemplary control of the light engine can be used to activate and deactivate a light source or a plurality of light sources (e.g., one or more at least one light emitting diodes). using the signal information. For example, a digital micromirror device can be utilized through which the light engine is precisely controlled for a full field projection, or patterned projection, wherein the light engine can comprise up to eight high power light sources.

The invention discloses a rapid and efficient laser fuze signal high repetition frequency and high speed modulation system based on a DMD, and belongs to the field of laser fuze signal modulation. The modulation system is composed of a coupling optical system, a DMD modulation optical system and an emission optical system. The emission optical system is used for receiving the pulse laser beam output by the DMD modulation optical system, shaping the pulse laser beam and then projecting the pulse laser beam to a target area at a preset angle so as to illuminate a fuse; the divergence angle of the emergent laser beam is adjusted through the focusing mechanism, so that the illumination area is changed; the DMD modulation optical system is used for receiving the coupling optical laser beams output by the coupling optical system and outputting the coupling optical laser beams after spatial intensity modulation on the DMD micromirror array; in an echo receiving mode, laser echoes returned by a target are imaged on the surface of the DMD micromirror array; and the coupling optical system is used for coupling the laser beam output by the optical fiber laser source to a free space and adjusting the size and the divergence angle of the laser beam. The device is used for laser fuze signal modulation.

The invention provides a single-pixel imaging-free moving target positioning method, which comprises the following steps: S1, constructing a Gaussian mixture background model to detect a moving target and a background; s2, irradiating the digital micromirror device through a light source, and projecting the initial template pattern to the surface of a target scene; receiving the light beam reflected by the target to a single-pixel detector; s3, constructing a Kalman filtering prediction model, and predicting the position area of the target in the next frame; s4, dynamically matching the template in the prediction area, calculating SSIM values, positioning a position corresponding to the maximum SSIM value, and marking a target in a rectangular frame, namely a positioning result; and S5, updating the region corresponding to the maximum SSIM value into a new template, iteratively updating the Kalman filtering state, and realizing continuous tracking until the maximum frame number is reached. The method does not need a complex optical system and imaging equipment, reduces the system complexity, does not generate an image, and is suitable for a scene needing privacy protection.

The invention relates to a nonlinear calibration method and system based on a heuristic optimization algorithm DMD (Digital Micromirror Device), and the method comprises the following steps: for a to-be-optimized DMD light modulation system, taking the micromirror overturning time obtained according to a required display image as a to-be-optimized parameter in advance, loading the to-be-optimized parameter to the DMD, taking a light intensity actual value output by the DMD light modulation system as feedback, and carrying out nonlinear calibration on the to-be-optimized DMD light modulation system; optimizing and calibrating the turning time of the micromirror through a heuristic optimization algorithm; and the DMD light modulation system adopts the optimal micromirror overturning time to carry out gray imaging. Compared with the prior art, the method has the advantages that the turning time of the micromirror is optimized through a heuristic optimization algorithm, and nonlinear high-precision calibration of the DMD gray scale is realized; in simulation and experiments, the method shows the advantages of global optimization and uniform regulation and control, and the linearity of the DMD is improved by 42.2% after calibration.

The application provides a full-automatic optometry topographic chart instrument, comprising an imaging system and a control processing system, the imaging system comprises an imaging assembly, an illumination device and a shooting device, the light exit side of the illumination device is provided with a projection objective, the light exit side of the projection objective is provided with a digital micromirror device or a transmission type calibration plate with a projection pattern, and the projection pattern is used for assisting qualitative and quantitative analysis of the refractive degree of the human eye; the control processing system comprises a data processing module for receiving fundus images and calculating a generated topographic chart and an output display module for displaying the topographic chart. The application also provides an optometry method using the full-automatic optometry topographic chart instrument. The full-automatic optometry topographic chart instrument and the optometry method provided by the application have simple equipment structure, low cost, complete detection parameters, and can obtain the ametropia condition of the human eye through the change of the projection pattern characteristics, and then obtain the optometry topographic chart through image processing.

The application belongs to the technical field of quantum imaging of computational imaging, and specifically discloses a correlation imaging reconstruction algorithm based on a deep convolutional hybrid neural network, which uses a Hadamard matrix gray scale coding sequence to replace a Gaussian matrix speckle sequence of original correlation imaging, and adjusts a digital micromirror device with a fixed sequence of speckle sequences in data acquisition and processing of correlation imaging. Under the same sampling rate, the algorithm can reconstruct a high-quality target object image, and has higher PSNR and SSIM values. Deep learning realizes end-to-end image recovery of an image in the algorithm implementation of correlation imaging, and reduces the steps of image calculation.

Embodiments of the present disclosure relate to mount apparatuses for digital micromirror devices of digital lithography systems and methods of mounting the digital micromirror devices. The mount apparatuses described herein retain spatial light modulators, such as DMDs. The mount apparatus enables the flattening of the DMD by providing a force such that the pair of contact pads contact the DMD. The DMD is positioned in a mounting frame of the mount apparatus. Contact pads of the mounting frame are operable to apply pressure to the DMD.

This invention discloses a DMD-based cross-type optical path beam splitter, comprising an ultraviolet imaging lens, a dichroic mirror, a digital micromirror device (DMD), an ultraviolet filter, an ultraviolet detector, a visible light camera, and a light collector, as well as an optical path shield. The DMD is electrically connected to a DMD controller. This invention also discloses an ultraviolet imaging block detection method, including constructing an imaging device based on the aforementioned beam splitter; the beam splitter splits the incident mixed light; an FPGA control module performs multi-layer segmentation iterative scanning to locate the ultraviolet light region generated by corona discharge and generate an ultraviolet image; the FPGA control module simultaneously acquires visible light video signals; the FPGA control module fuses the visible light video signals and ultraviolet image signals and displays them, completing the corona discharge location positioning. This invention solves the problems of delayed corona discharge detection and early warning, high detection equipment cost, and slow imaging speed in existing technologies.

The invention discloses a space omics chip probe release method and system based on image guidance, and relates to the technical field of space transcriptomics, and the method comprises the steps: obtaining an original image of a tissue slice through the shooting of a camera; wherein the tissue slice is attached to the surface of the probe coding chip; adding a probe incubation reagent into the tissue slice; preprocessing the original image, and positioning to obtain a tissue area in the original image; taking the tissue area as a tissue mask, and converting the tissue mask from camera coordinates to digital micromirror device coordinates; generating a control signal of the digital micromirror device according to the coordinates of the digital micromirror device; and in response to the control signal, projecting light generated by the light source to the tissue area by using the digital micromirror device so as to release the corresponding probe in the tissue area range in the probe coding chip. According to the method, the probe coding chip is irradiated according to the customized irradiation pattern, so that only the probe in the tissue area range is released, and accurate illumination control on the tissue area is realized.

This invention discloses a high-precision line stripe scanning projection device and method, belonging to the field of projection display. The high-precision line stripe scanning projection device includes a single-wavelength light source, a collimating lens, a reflector, a digital micromirror device, a projection lens, and a housing. The digital micromirror device can control the size, position coordinates, number of slits, and slit spacing of the reflective slits. In scanning mode, the reflective slits can be translated in a time-sequential step-by-step manner to achieve scanning of the projected stripes on the projection target. The high-precision line stripe scanning projection method provided by this invention can determine the projection stripe spacing and stripe brightness by controlling the peak width and slit spacing, and determine the projection stripe linewidth by controlling the number of slits, thus improving the accuracy and quality of the line stripes.

The present application relates to the field of confocal modulation of a mosaic telescope, and specifically provides a large-aperture mosaic telescope partition multi-stage confocal method, comprising: performing finite element analysis on a mosaic mirror to obtain a deformation coupling relationship of mosaic sub-mirrors, dividing the mosaic sub-mirrors of the mosaic mirror into multiple structural functional areas, independently confocally adjusting the mosaic sub-mirrors in each structural functional area by using a digital micromirror device, detecting wavefront information of each structural functional area after independent confocal adjustment by using a wavefront sensor, and adjusting all the mosaic sub-mirrors in the structural functional area as a whole according to the wavefront information of each structural functional area, so that the area focal points of all the structural functional areas are collectively converged at a final system focal point of the mosaic mirror. The present application realizes initial misadjustment detection and high-precision confocal correction in a large dynamic range, and reduces confocal adjustment cost and complexity.

The invention discloses a vehicle dynamic lighting effect system and a using method thereof, and relates to the technical field of vehicle lamp projection control, and the system comprises a CSC, a front lamp color DLP, a lateral color DLP, a color Mini LED tail lamp and a word mark tail lamp; the front lamp color DLP comprises a left front color DLP driver, a right front color DLP driver and a DMD (Digital Micromirror Device) module; the left front color DLP driver and the right front color DLP driver are respectively connected with the CSC; the lateral color DLP comprises a left color DLP, a right color DLP and a color DLP side lamp controller, and the color DLP side lamp controller is connected with the CSC; the color Mini LED tail lamp comprises a Mini LED controller, a color light source and a color light source, wherein the Mini LED controller is connected with a CSC; and the word mark tail lamp is connected with the CSC through the vehicle body domain controller. According to the vehicle dynamic lighting effect system and the using method thereof, dynamic image projection of the vehicle lamp can be achieved.

This invention discloses a 3D printer and its control method, relating to the field of 3D printing technology. The 3D printer includes a 3D printing module, an ultraviolet light source, and a digital micromirror device. It also includes a cooling supply component, a detection component, and a main control board. The cooling supply component includes a first end and a second end, with the first end connected to the digital micromirror device. The detection component includes a dew point detector and a temperature detector, with the temperature detector connected to the first end. Based on the dew point temperature and the temperature of the first end, the main control board adjusts the cooling supply of the cooling supply component, thereby regulating the temperature of the first end to be higher than the dew point temperature. This reduces the probability of condensation on the digital micromirror device, enabling the printer to maintain high printing accuracy during long-term operation.

The application provides a high-speed three-dimensional reconstruction system and method based on two-stage cooperative coding, which comprises a parallel light source module, a liquid crystal spatial light modulator, a 4f relay system, a digital micromirror device, a projection lens, a sparse light field sampling module and an edge computing device; parallel light beams output by the parallel light source module are transmitted to the digital micromirror device for high-speed binary processing through the 4f relay system after phase modulation, so that a structured light field modulated in phase and amplitude is formed; the projection lens projects the modulated light field to a measured surface of a workpiece, and the reflected light field of the workpiece is captured by the sparse sampling module and then compressed; the edge computing device dynamically adjusts parameters of the liquid crystal spatial light modulator, the digital micromirror device and the sparse light field sampling module according to real-time feedback, so as to optimize the adaptability of the structured light field to the surface characteristics; finally, the surface topography is accurately reconstructed through a three-dimensional reconstruction network, and the core problem that speed, precision and data volume cannot be simultaneously achieved is solved.

The invention discloses an efficient three-dimensional measurement method based on Sammer multi-view imaging, which realizes rapid three-dimensional reconstruction through a linear calculation process, that is, distortion correction is converted into pixel coordinate remapping by using pre-calibrated camera and projector parameters. In one-way fringe projection measurement, determining a projection point of light on a DMD (Digital Micromirror Device) plane according to a light direction corresponding to the distorted camera pixel; then sub-pixel-level interpolation operation is performed on the projection point, distortion in pixel coordinates of the projector is accurately compensated, fringe pattern reloading or iterative optimization is not needed, and therefore the flexibility of calibration and measurement is remarkably improved.

The application discloses a kind of multi-component gas concentration detection methods based on composite signal, it is related to gas concentration detection technical field, comprising: using digital micromirror device according to preset wavelength sequence modulation incident to the light beam of gas chamber;The gas chamber is provided with mutually interfering absorption spectrum detection light path and photoacoustic spectrum detection light path, and real-time synchronous acquisition first signal generated by the absorption spectrum detection light path, and second signal generated by the photoacoustic spectrum detection light path;The first signal is processed to obtain first concentration value C1, and the second signal is processed to obtain second concentration value C2;Based on the first concentration value C1 and the second concentration value C2, according to preset rule determines target gas concentration value.The above scheme can take into account the synchronous detection of multi-component gas, the compactness of detection structure and the high sensitivity detection of low concentration gas.

The invention discloses a photovoltaic air conditioner power distribution control system, which specifically comprises the following steps of: 1, initializing a system; 2, calibrating the system; 3, preprocessing the image; step 4, projection display; 5, performing feedback and dynamic adjustment; the first step of system initialization comprises hardware starting: after the system is powered on, a light source module (such as an RGB LED light source) starts preheating, and it is ensured that the output light intensity is stable; the DMD control module is initialized, resetting and self-checking of a digital micromirror device are completed, and it is confirmed that micromirror switching response is normal; and an optical expansion module (including a free-form surface lens, a reflector array and the like) enters a to-be-operated state. According to the photovoltaic air conditioner power distribution control system, the requirement for large-size object measurement or large-space display can be met, environment light interference can be resisted by adopting the anti-interference coding patterns, the problems of shielding and surface reflection can be solved, and the anti-crosstalk capacity in a multi-projector scene can be improved.

According to the exposure equipment and the exposure process, when exposure needs to be carried out, an X-axis moving module, a Y-axis moving module and an exposure module can be linked together to carry out coordinate confirmation and positioning on a base material, and a control module can send a digital signal corresponding to a required circuit pattern to a digital micromirror device; and the digital micromirror device controls an internal micromirror to turn over quickly according to the digital signal, forms a dynamic light field pattern corresponding to the digital signal under the irradiation of the ultraviolet light source, and projects the dynamic light field pattern to the surface of the base material through the projection lens. The exposure equipment does not need to depend on a physical mask, can fundamentally solve the problems that in a traditional exposure process, the manufacturing cost of the mask is high, and graph switching is slow, can meet the rapid production requirements of small-batch and multi-variety orders, can process large-area graphs in single exposure, and compared with a small laser scanning mode, the exposure equipment has the advantages that the production cost is low, and the production efficiency is high. And the exposure efficiency and precision can be greatly improved.

A projection apparatus with high resolution includes a digital micromirror device and a galvanometer mirror. The digital micromirror device includes a plurality of digital micromirrors set in orthogonal arrangement. The galvanometer mirror includes a drive circuit board and a translucent lens. The translucent lens aligns with the digital micromirror device with a diagonal direction of the translucent lens perpendicular or parallel to an arrangement direction of the plurality of digital micromirrors. The drive circuit board can vibrate the translucent lens so that a light beam projected by the projection apparatus is moved in the diagonal direction.

The invention relates to the technical field of confocal modulation of spliced telescopes, and particularly provides a large-aperture spliced telescope partition multistage confocal method, which comprises the following steps: carrying out finite element analysis on a spliced mirror surface to obtain a deformation coupling relationship of spliced sub-mirrors, and dividing the spliced sub-mirrors of the spliced mirror surface into a plurality of structural functional areas, a digital micro-mirror device is used for carrying out independent confocal adjustment on spliced sub-mirrors in each structural functional area, then a wavefront sensor is used for detecting wavefront information of each structural functional area subjected to independent confocal adjustment, and all spliced sub-mirrors in the structural functional area are integrally adjusted according to the wavefront information of each structural functional area. And converging the regional focuses of all the structural functional regions together to a final system focus of the spliced mirror surface. According to the invention, large-dynamic-range initial imbalance detection and high-precision confocal correction are realized, and confocal adjustment cost and complexity are reduced.

The invention discloses a preparation method of a microlens array. The preparation method comprises the following steps: providing a plain film substrate; forming a photoresist layer on the plain film substrate; determining a target parameter of the micro-lens array according to the light emitting parameter of the chip to be matched, and further determining a preset exposure pattern of the micro-lens array; controlling the exposure dose of each point on the photoresist layer through a digital micromirror device according to a preset exposure pattern corresponding to the microlens array, and exposing the photoresist layer; developing the exposed photoresist layer to obtain a plurality of first photoresist structures; and taking the first photoresist structure as a mask, and etching the first photoresist structure and the plain film substrate by using an etching process to form the micro-lens array. According to the invention, when the light emitting parameter of the chip to be matched is changed, the microlens array matched with the chip to be matched can be obtained only by changing the preset exposure pattern used by the digital micromirror device, so that the subsequent coupling loss is remarkably reduced.

A kind of compression confocal imaging device and method based on digital micro-mirror device, the device includes confocal microscopic imaging module and single-pixel imaging compression detection module, the confocal microscopic imaging module and the single-pixel imaging compression detection module have the digital micro-mirror device and the sample detection light path between the digital micro-mirror device and sample, wherein, when confocal image acquisition is carried out to sample, the digital micro-mirror device becomes the confocal pinhole of the confocal microscopic imaging module, when single-pixel sampling is carried out to sample, the digital micro-mirror device becomes the confocal pinhole and single-pixel sampling light coding element of the single-pixel imaging compression detection module.Using the device and method of the application, confocal microscopic imaging can be realized under the condition of high speed low light toxicity sampling, the activity of biological sample can be fully guaranteed, and high spatiotemporal resolution imaging effect is provided.