20 results about "Micromirror device" patented technology

The invention relates to a method for producing at least one first (205) and second micromirror device (206). Here, a silicon wafer (100), in particular plate-shaped, having a front side (110) and a back side (120) is provided. Then, a silicon oxide layer (130) is applied to at least the front side (110) of the silicon wafer (100, 101). Subsequently, the silicon oxide layer (130) is removed such that at least one first separation region (131) and at least one second separation region (132) of the silicon oxide layer (130) are produced, wherein the first (131) and second separation region (132) of the silicon oxide layer (130) are arranged spatially separated from one another along a separation plane (140). Then, a silicon layer (150) is applied to the front side (110) of the silicon wafer (101) and the silicon oxide layer (130). Subsequently, an etching mask (180) is applied (70) to the back side (120) of the silicon wafer (100), wherein the etching mask (180) has a first opening (190) along the separation plane (140) of the first (131) and second separation region (132) of the silicon oxide layer (130). Subsequently, the silicon layer (150, 350) and the silicon wafer (100, 101) are removed (80) by means of an etching method in accordance with the etching mask (180) on the back side (120) of the silicon wafer (100, 101) and in accordance with the silicon oxide layer (130) of the silicon wafer (100), in particular the first (131) and second separation region (132) of the silicon oxide layer (130), such that at least one first (205) and second micromirror device (206) are produced.

A method for producing a first and second micromirror device. A silicon oxide layer is applied to at least the front side of a silicon wafer. The silicon oxide layer is removed so that a first and second separation region of the silicon oxide layer are generated, which are arranged spatially separated from each other along a separation plane. A silicon layer is applied to the front side of the silicon wafer and to the silicon oxide layer. An etching mask is applied to the rear side of the silicon wafer, the etching mask having a first opening along the separation plane of the first and second separation region. The silicon layer and the silicon wafer are removed, according to the etching mask on the rear side of the silicon wafer and according to the silicon oxide layer of the first and second separation region.

A photogrammetric camera for the two-dimensional measurement of objects has a lens, an image sensor and a pupil filter configured as a micromirror, each of which is transferable into a first and second tilted position. An illumination system produces light. A micromirror in the first tilt position reflects light produced by the illumination system such that the light cannot reach the object while light reflected at the object is guided to the image sensor. Conversely, a micromirror in the second tilt position reflects light such that the light can reach the object while light reflected at the object is supplied to the image sensor. To implement a recording of an image with coaxial dark or coaxial reflected light illumination, the micromirror device is controlled such that the light produced by the illumination system is incident on the surface at different angles within an angular range of at least arcsin(NA).

A micromechanical device (1a), in particular a micromirror device, is proposed, which has at least a first micromechanical component (2a) and a second micromechanical component (3a). The first component (2a) and the second component (3a) are connected to one another directly or indirectly. The first micromechanical component (2a) has a first sub-body (4a) and at least one second sub-body (5a). The first sub-body (4a) extends in a first plane (20a) and the second sub-body (5a) extends in a second plane (21a), which is different from the first plane (20a). The first plane (20a) and the second plane (21a) extend parallel to one another and the first plane (20a) extends above the second plane (21a). Here, the second sub-body (5a) is arranged in a transition region to the second micromechanical component (3a). A second extension (26a) of the second sub-body (5a) in a longitudinal direction is greater than a first extension (25a) of the first sub-body (4a) in the longitudinal direction.

A micromirror chip (200), a micromirror device, and an optical device, relating to the technical field of optical communications. The micromirror chip (200) comprises a substrate (1), a micromirror (2), a rotating platform (3), a cantilever beam (4), a support post (5), and a counterweight (6); the rotating platform (3) is connected to the substrate (1) by means of the cantilever beam (4), the micromirror (2) is fixed above the rotating platform (3) by means of the support post (5), and the counterweight (6) is fixed below the rotating platform (3); the substrate (1) has a surface at a position opposite the counterweight (6) in an arrangement direction of the counterweight (6), the rotating platform (3), and the support post (5), and there is a gap between mutually-facing surfaces of the substrate (1) and the counterweight (6) in the arrangement direction. The structure improves micromirror (2) rotational accuracy, and also allows for good hermeticity in substrates (1) of MEMS micromirror chips (200).

The present disclosure relates to multi-channel optical transmitter modules, lidar systems, and methods that involve micromirror devices. An example optical transmitter module includes at least one light-emitter device and a plurality of micromirror devices optically-coupled to the at least one light-emitter device. The at least one light-emitter device is configured to emit respective light beams toward an environment via the micromirror devices. The micromirror devices are configured to deflect the light beams. The optical transmitter module also includes a controller having at least one processor and a memory. The controller is configured to carry out operations. The operations include receiving information indicative of a retroreflector object in the environment. The operations include, based on the received information, causing at least one micromirror device of the plurality of micromirror devices to deflect at least one light beam so the at least one light beam does not interact with the retroreflector object.

A micromirror device includes: a mirror portion; a first support portion that supports the mirror portion so as to be able to oscillate around a first axis; a movable frame that is connected to the first support portion; a second support portion that supports the mirror portion, the first support portion, and the movable frame so as to be able to oscillate around a second axis; a pair of first actuators that are connected to the second support portion and are opposed across the second axis; a second actuator that is disposed so as to surround the first actuators; a first connection portion that connects the first actuators and the second actuator; a fixed frame that is disposed so as to surround the second actuator; and a second connection portion that connects the second actuator and the fixed frame. The second actuator causes a torque around the first axis to act on the mirror portion. The first actuators cause a torque around the second axis to act on the movable frame.

The invention relates to an optical module (10) for a microscope device (100), in particular for observing fluorescent substances to be observed, comprising a filter assembly (35, 35a), which can be rotated about a longitudinal axis (12) and which has a plurality of filters (29a, 30, 30a, 31, 31a, 32, 32a) for light, in particular light of different wavelengths, and an element (28), in particular a disc-shaped element for placing an illumination source (24, 26) and / or image-capturing devices (20, 22), said element (28) being rotatable relative to the filter assembly (35, 35a) about the longitudinal axis (12).

1. The name of the design product: mobile slit lamp microscope equipment. 2. The use of the design product: mobile slit lamp microscope equipment body for remote area primary eye disease examination. 3. The design points of the design product: the combination of shape and pattern. 4. The picture or photo that best indicates the design points: perspective view.

An optical scanning device of the present disclosure includes: a micromirror device including a mirror that has a reflecting surface for reflecting light and is swingable around at least one axis, an actuator that allows the mirror to swing, and a piezoelectric element that generates and outputs electromotive force by the swinging of the mirror; a control device configured to control an operation of the actuator; and an abnormality detection device configured to detect an abnormal operation of the mirror based on a temporal fluctuation amount in an output signal from the piezoelectric element.

A micromirror device includes: a mirror portion; a first support portion that swingably supports the mirror portion around a first axis; a movable frame that is connected to the first support portion; a second support portion that swingably supports the mirror portion, the first support portion, and the movable frame around a second axis; a pair of first actuators that are connected to the second support portion and face each other across the second axis; a second actuator that surrounds the first actuator; a first connecting portion that connects the first actuator and the second actuator; a fixed frame that surrounds the second actuator; and a second connecting portion that connects the second actuator and the fixed frame. The second actuator applies rotational torque around the first axis to the mirror portion. The first actuator applies rotational torque around the second axis to the movable frame.

A MEMS micromirror device is formed in a package comprising a housing and a cover transparent to optical radiation. The package forms a cavity that houses a tiltable platform having a reflective surface. A metastructure is formed on the cover and / or the reflective surface and comprises a plurality of diffractive optical elements.

A nonlinear microscopy device includes a rotational optical assembly configured to rotate about an imaginary rotational axis and a radial optical assembly that is translatable radially relative to the imaginary rotational axis. The rotational optical assembly includes beam delivery optics to transmit a laser beam to the radial optical assembly, and the radial optical assembly includes an objective lens to focus the laser beam to a focus point, which may be on a sample. While the rotational optical assembly is rotated, the radial optical assembly is moved radially relative to the rotational axis. Secondary light generated by the sample is collected by the objective lens and directed to a detector. The signal received by the detector is converted into a two-dimensional image of the sample. Other embodiments are described and claimed.

The invention provides a micro-mirror chip, a micro-mirror device and optical equipment, and belongs to the technical field of optical communication. The micro-mirror chip comprises a substrate, a micro-mirror, a rotating table, a cantilever beam, a supporting column and a balance block. The rotating table is connected with the substrate through the cantilever beam, the micromirror is fixed above the rotating table through the supporting column, and the balance block is fixed below the rotating table; the substrate is provided with a surface at a position opposite to the balance block in the arrangement direction of the balance block, the rotating table and the supporting column, and a gap is formed between the opposite surfaces of the substrate and the balance block in the arrangement direction. By adopting the MEMS micromirror chip and the manufacturing method thereof, the rotation accuracy of the micromirror can be improved, and the substrate of the MEMS micromirror chip can have good air tightness.

A micromechanical device, in particular a micromirror device. The device has at least one first micromechanical component and one second micromechanical component. The first component and the second component are directly or indirectly joined to one another. The first micromechanical component has a first sub-body and at least one second sub-body. The first sub-body extends in a first plane and the second sub-body in a second plane different from the first plane. The first plane and the second plane extend parallel to one another and the first plane extends above the second plane. The second sub-body is arranged in a transitional region to the second micromechanical component. A second extent of the second sub-body in the longitudinal direction is greater than a first extent of the first sub-body in the longitudinal direction.

The invention relates to a method for manufacturing MEMS devices, in particular MEMS micromirror devices (14, 78), from a substrate wafer (36). The substrate wafer comprises silicon material and MEMS structures (78, 80) separated by silicon oxide (24). According to process step a), a first coating part (32) of a MEMS device, in particular a MEMS micromirror device (14, 78), is provided on a top surface of the substrate wafer (36). Subsequently, according to process step b), a handling wafer (30) provided with a second coating part (34) of the MEMS device, in particular a MEMS micromirror device (14, 78), is applied over a surface area to the previously provided first coating part (32). A connection, in particular a bond connection (50), is then formed between the coating parts (32, 34) as a full-surface connection to form a composite (86).Subsequently, micromirror elements (78) and / or electrode arrangements (80) are formed in the substrate wafer (36), isolated from the silicon material of the substrate wafer (36). Furthermore, the invention relates to the use of the method for the fabrication of MEMS devices, in particular MEMS micromirror elements (14, 78), from substrate wafers (36) containing silicon material.

This micromirror device is provided with a device section and a base section that supports the device section, and is characterized in that the device section has: a mirror section that reflects incident light; and an actuator that imparts a rotational torque that swings the mirror section about at least one axis, the base section being made of silicon or glass and bonded to the device section without using an adhesive, and having a cavity having a depth in the thickness direction of the base section in at least a region facing the mirror section, when the surface facing the device part is a first surface and the side opposite to the first surface is a second surface, the planar dimension of the cavity on the first surface side is larger than the planar dimension on the second surface side when the base part is viewed in plan.

The utility model relates to the technical field of microscope equipment, and discloses a trinocular microscope camera interface structure, which comprises a slot arranged at the top of a microscope; the springs are symmetrically and fixedly connected to the inner side wall of the cavity; the limiting blocks are symmetrically and fixedly connected to the opposite ends of the spring, and inclined planes are arranged on the limiting blocks; the pull rods are symmetrically and fixedly connected to the top of the limiting block, and the top of the microscope is provided with through grooves for the pull rods to move; the fixing blocks are symmetrically and fixedly connected to the outer side wall of the connector; and the limiting grooves are symmetrically formed in the fixing block. The connector is directly inserted into the inserting groove, the limiting block is pushed into the cavity when the bottom end of the connector makes contact with the inclined face of the limiting block, the spring is extruded, when the limiting groove in the fixing block moves downwards to be located on the same horizontal line with the limiting block, the spring generating elastic force after deformation pops the limiting block into the limiting groove, and limiting of the fixing block and the connector is completed. Therefore, the camera can be inserted and installed conveniently and quickly.