209 results about "Micromirror device" patented technology

The invention is a seamless projection lithography system that eliminates the need for masks through the use of a programmable Spatial Light Modulator (SLM) with high parallel processing power. Illuminating the SLM with a radiation source (1), which while preferably a pulsed laser may be a shuttered lamp or multiple lasers with alternating synchronization, provides a patterning image of many pixels via a projection system (4) onto a substrate (5). The preferred SLM is a Deformable Micromirror Device (3) for reflective pixel selection using a synchronized pulse laser. An alternative SLM is a Liquid Crystal Light Valve (LCLV) (45) for pass-through pixel selection. Electronic programming enables pixel selection control for error correction of faulty pixel elements. Pixel selection control also provides for negative and positive imaging and for complementary overlapping polygon development for seamless uniform dosage. The invention provides seamless scanning by complementary overlapping scans to equalize radiation dosage, to expose a pattern on a large area substrate (5). The invention is suitable for rapid prototyping, flexible manufacturing, and even mask making.

A 1 dimensional or 2 dimensional array of micromirror devices comprises a device substrate with a 1st surface and a 2nd surface, control circuitry disposed on said 1st surface and a plurality of micromirrors disposed on said 2nd surface. Each micromirror comprises a reflective surface that is substantially optically flat, with neither recesses nor protrusions. Such a 1 dimensional or 2 dimensional array of micromirror devices may be used as a spatial light modulator (SLM). Methods of fabricating arrays of micromirror devices are also disclosed. Such methods generally involve providing a device substrate with a 1st surface and a 2nd surface, fabricating control circuitry on the 1st surface, and fabricating micromirrors on the 2nd surface, such that the reflective surfaces of the micromirrors are substantially optically flat, with neither recesses nor protrusions.

The invention has two main embodiments, a first called column switching and blanking and a second embodiment called doubling. The first embodiment is a projector for displaying a stereoscopic image with projector using one or more digital micromirror devices positioned into a plurality of columns and rows. The projector itself includes a light source, an optical system, a video processing system and a data system for driving the micromirror devices. The data subsystem provides separate data to a plurality of column pairs of the micromirrors. The projector includes a stereoscopic control circuit having a first state of the control circuit for inputting a first eye view of the stereoscopic image and causing the micromirrors of a first column of each column pair to be in various on and off states during said first eye view of said stereoscopic image and for causing all of said micromirrors of a second column of each column pair to be in an off state during said first eye view of said stereoscopic image. A second state of the control circuit is used for inputting a second eye view of the stereoscopic image and causes the micromirrors of the second column of each column pair to be in various on and off states during the second eye view of the stereoscopic image and for causing all of the micromirrors of the first column of each column pair to be in an off state during the second eye view of said stereoscopic image. The second embodiment is a projector for displaying a stereoscopic image with the projector using one or more digital micromirror devices positioned into a plurality of columns and rows. The projector includes a light source, an optical system, a video processing system and a data system for driving said micromirror devices. The data subsystem provides separate data to a plurality of column pairs of the micromirrors. The projector includes a stereoscopic control circuit having a first state for inputting a first eye view of the stereoscopic image and causing each micromirror of each column pair to be in various but identical on and off states during said first eye view of said stereoscopic image. A second state of the control circuit for inputs a second eye view of the stereoscopic image and causes each micromirror of each column pair to be in various but identical on and off states during the second eye view of the stereoscopic image.

An FPGA is readily connectable to a high-speed fiber optic link by snap fitting an external fiber optic cable into an accommodating duplex fiber optic connector of a low-profile packaged FPGA integrated circuit. The low-profile packaged FPGA integrated circuit includes a die-bonded assembly disposed within a co-fired multilayer ceramic integrated circuit package. The die-bonded assembly includes the optoelectronic die, the bottom surface of which is die-bonded and electrically interconnected by micropads to the upper surface of the core of an FPGA integrated circuit die. A first optical fiber communicates light from the connector, through the package, and to a photodetector on the optoelectronic die. A second optical fiber communicates light from a laser diode on the optoelectronic die, through the package, and to the connector. In some embodiments, a micromirror device is disposed within the package to redirect light between the optoelectronic die and the optical fibers.

In a 3D free space micromirror device, a mirror plate is joined with actuators through flexible springs where the other ends of the actuators have fixed support on the substrate. Single crystal silicon and aluminum are used as bi-morph materials with silicon dioxide providing electrical isolation between the two. Thickness variation in the microstructure is achieved by two-step p-n junction formed in a p-type substrate. Thick and thin n-silicon layer formation and DRIE cut mechanisms are employed in such a way that all the thick and thin silicon components of the structure are released simultaneously avoiding overetch which can be detrimental to the thin flexural springs. Working prototypes of the device have been found suitable for any optical switching array architecture where deflections up to 10 degrees are required.

A MEMS fabrication process eliminates through-wafer etching, minimizes the thickness of silicon device layers and the required etch times, provides exceptionally precise layer to layer alignment, does not require a wet etch to release the moveable device structure, employs a supporting substrate having no device features on one side, and utilizes low-temperature metal-metal bonding which is relatively insensitive to environmental particulates. This process provided almost 100% yield of scanning micromirror devices exhibiting scanning over a 12° optical range and a mechanical angle of ^±3° at a high resonant frequency of 2.5 kHz with an operating voltage of only 20 VDC.

A micromirror device is disclosed, along with a method of making such a micromirror device that comprises a mirror plate, a hinge and an extension plate. The extension plate is formed on the mirror plate and between the mirror plate and the electrode associated with the mirror plate for rotating the mirror plate. The extension plate can be metallic or dielectric. Also disclosed is a method of making such a micromirror device. In particular, the extension plate is formed after the formation of the mirror plate. Moreover, also disclosed is a projection system that comprises a spatial light modulator having an array of such micromirrors, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.

A method for making a micromirror device comprises is disclosed herein.

A spatial light modulator is disclosed, along with a method for making such a modulator that comprises an array of micromirror devices. The center-to-center distance and the gap between adjacent micromirror devices are determined corresponding to the light source being used so as to optimize optical efficiency and performance quality. The micromirror device comprises a hinge support formed on a substrate and a hinge that is held by the hinge support. A mirror plate is connected to the hinge via a contact, and the distance between the mirror plate and the hinge is determined according to desired maximum rotation angle of the mirror plate, the optimum gap and pitch between the adjacent micromirrors. In a method of fabricating such spatial light modulator, one sacrificial layer is deposited on a substrate followed by forming the mirror plates, and another sacrificial layer is deposited on the mirror plates followed by forming the hinge supports. The two sacrificial layers are removed via the small gap between adjacent mirror devices with spontaneous vapor phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

Micromirror devices, especially for use in digital projection are disclosed. Other applications are contemplated as well. The devices employ a superstructure that includes a mirror supported over a hinge set above a substructure. Various improvements to the superstructure over known micromirror devices are provided. The features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein, possibly offering cost savings, lower power consumption, and higher resolution.

A chromatic dispersion compensation device selectively delays a respective portion of spectral sections of each respective optical channel of an optical WDM input signal to compensate each optical channel for dispersion compensation, and includes a spatial light modulator having a micromirror device with a two-dimensional array of micromirrors. The micromirrors tilt or flip between first and second positions in a “digital” fashion in response to a control signal provided by a controller in accordance with a switching algorithm and an input command. A collimator, diffraction gratings, and Fourier lens collectively collimate, disperse and focus the optical input channels onto the array of micromirrors. Each optical channel is focused onto micromirrors of the micromirror device, which effectively pixelates the optical channels. To compensate an optical channel for chromatic dispersion, a portion of the spectral sections of each channel is delayed a desired time period by tilting an array of mirrors (i.e., spectral array) disposed in each spectral section at different spatial positions on the micromirror device.

A micromirror device with at least one intermediate state is disclosed in this invention with the reflecting mirror placed at an angular position between a fully on angle and fully off angle. The micromirror device includes a reflecting element supported on a hinge for oscillating and positioning at least three angular positions. The micromirror device further has a control circuit for receiving a series of control words of different number of bits as a time modulation signal to control the reflecting element for controlling a gray scale of display wherein the control circuit further receiving an oscillation signal for superimposing on the time modulation signal for oscillating the reflecting element for further controlling the gray scale of display. The series of control words further includes a sequence of control words of a least number of bits to a maximum number of bits of a least number of bits to a maximum number of bits with a time gap between each of the control words. The oscillating signal may be inserted optionally into a gap between the control words, into every control word, into a control word of the MSB, or into a control word of the LSB, In a preferred embodiment, the oscillating signal is applied to dispose the reflecting element at an intermediate state with a zero degree relative to an incident light.

The present invention discloses a mirror device that includes a mirror element which further comprising an elastic hinge and a mirror and which modulates incident light emitted from a light source, a device substrate on which a drive circuit for driving the mirror element is placed, a package substrate which is made of transparent glass or a silicon material and on which the device substrate is placed, a metallic thermal transfer path connected to the device substrate, and a cover glass connected to the package substrate so that the device substrate is covered.

An exposure device for exposing a projection of an electronically stored artwork pattern onto a substrate, in particular a printing plate 1, with image processing electronics (2) that can store the image data, with a light modulator (7) that can be electronically controlled by the image processing electronics (2), in particular an LCD display (7) or a micro-mirror device, with an illuminating device (8, 9) for illuminating the light modulator (7), and with a projection lens (11) for projecting the light modulator (7) onto the substrate (1), is improved according to the invention in that the image processing electronics (2) include a compensation device (4, 5) to compensate for optical defects and/or tolerances in the beam path of the exposure device.

An electromechanical micromirror device comprises a device substrate with a 1st surface and a 2nd surface, control circuitry disposed on said 1st surface, and a micromirror disposed on said 2nd surface. Arrays of such micromirror devices are also described and may be used as a spatial light modulators (SLMs). The arrays may be 1 dimensional (linear) or 2 dimensional. Methods of fabricating micromirror devices and arrays of such devices are also disclosed. Such methods generally involve providing a device substrate with a 1st surface and a 2nd surface, fabricating control circuitry on the 1st surface, and fabricating micromirror(s) on the 2nd surface.

A method for packaging micromirror array devices is disclosed herein. The method enhances illumination on micromirror array devices by applying a selected optical material between a package lid and glass substrate of the micromirror array device, the selected optical material having a refraction index that matches the refraction indices of the package lid and the glass substrate.