46 results about "Micromirror device" patented technology

According to the micro-mirror array based on the electric control deformable micro-nano structure provided by the invention, the micro-mirror array with remarkable size advantage and cost benefit can be manufactured by innovatively fusing the electric control deformable suspended nano structure and the mirror surface design of the supporting column body; the suspended nano-structure can generate surface shape deformation through potential regulation and control so as to drive the mirror surface array to generate displacement, so that optical phase regulation and control or optical display are carried out through the mirror surface array, and the key technical bottlenecks of complex manufacturing process, low duty ratio, insufficient dynamic performance and the like of existing market products are effectively solved; performance limitation of a traditional micro-mirror device is broken through, and meanwhile localization breakthrough of a core device is achieved.

The invention provides a micro-mirror chip, a micro-mirror device and an optical device, and belongs to the technical field of micro electro mechanical systems. The micro-mirror chip comprises a substrate, a micro-mirror array, an electrode, a light window and a fixing ring. The micromirror array is located on the first surface of the substrate, the electrode is located on the second surface of the substrate, and the first surface and the second surface are opposite in position in the thickness direction of the substrate; the fixing ring is fixed on the first surface of the substrate, the micro-mirror array is located in an in-ring space of the fixing ring, and the light window is fixed on the fixing ring and covers the micro-mirror array. In the packaging of the micro-mirror chip, the micro-mirror array is sealed in the sealed space formed by the substrate, the fixing ring and the light window, so that small particles do not fall into the environment where the micro-mirror array is located in the subsequent packaging process, the qualified rate of the packaged micro-mirror device can be improved, and the yield of the packaged micro-mirror device can be improved. Therefore, the yield of the packaged micro-mirror device is improved.

The invention aims to provide a perovskite laminated solar cell detection device and a detection method, which are suitable for performance characterization and quality control of a perovskite laminated solar cell. The invention aims to solve the problem that the series resistance distribution of the perovskite laminated solar cell cannot be rapidly and accurately detected under the condition of no metallization or no electrical contact in the prior art. Through photoluminescence and electroluminescent imaging technologies, in combination with a non-uniform illumination mode generated by digital micromirror equipment, accurate identification of a high series resistance region of the perovskite solar cell is realized, so that reliable data support is provided for process optimization and defect detection, and the detection efficiency and safety are remarkably improved.

A micromirror device includes a first support portion that is connected to the mirror portion on a first axis located in a plane including the reflecting surface of the mirror portion in a stationary state, and that swingably supports the mirror portion around the first axis. The first support portion is composed of a main shaft stretched along the first axis and a plurality of sub-shafts symmetrically disposed on both sides of the main shaft across the first axis and stretched along the first axis, the first support portion has a folded structure having three or more folded portions formed by connecting the plurality of sub-shafts, and in a case where inner curvature radii of the folded portions are denoted by R1, R2, R3, . . . , in order from the closest to the first axis, a relationship of 0.73≤Rk+1 / Rk≤0.9 (k=1, 2, . . . ) is satisfied.

The invention relates to a method for producing at least one first (205) and second micromirror device (206). Here, a silicon wafer (100), in particular plate-shaped, having a front side (110) and a back side (120) is provided. Then, a silicon oxide layer (130) is applied to at least the front side (110) of the silicon wafer (100, 101). Subsequently, the silicon oxide layer (130) is removed such that at least one first separation region (131) and at least one second separation region (132) of the silicon oxide layer (130) are produced, wherein the first (131) and second separation region (132) of the silicon oxide layer (130) are arranged spatially separated from one another along a separation plane (140). Then, a silicon layer (150) is applied to the front side (110) of the silicon wafer (101) and the silicon oxide layer (130). Subsequently, an etching mask (180) is applied (70) to the back side (120) of the silicon wafer (100), wherein the etching mask (180) has a first opening (190) along the separation plane (140) of the first (131) and second separation region (132) of the silicon oxide layer (130). Subsequently, the silicon layer (150, 350) and the silicon wafer (100, 101) are removed (80) by means of an etching method in accordance with the etching mask (180) on the back side (120) of the silicon wafer (100, 101) and in accordance with the silicon oxide layer (130) of the silicon wafer (100), in particular the first (131) and second separation region (132) of the silicon oxide layer (130), such that at least one first (205) and second micromirror device (206) are produced.

A method for producing a first and second micromirror device. A silicon oxide layer is applied to at least the front side of a silicon wafer. The silicon oxide layer is removed so that a first and second separation region of the silicon oxide layer are generated, which are arranged spatially separated from each other along a separation plane. A silicon layer is applied to the front side of the silicon wafer and to the silicon oxide layer. An etching mask is applied to the rear side of the silicon wafer, the etching mask having a first opening along the separation plane of the first and second separation region. The silicon layer and the silicon wafer are removed, according to the etching mask on the rear side of the silicon wafer and according to the silicon oxide layer of the first and second separation region.

A photogrammetric camera for the two-dimensional measurement of objects has a lens, an image sensor and a pupil filter configured as a micromirror, each of which is transferable into a first and second tilted position. An illumination system produces light. A micromirror in the first tilt position reflects light produced by the illumination system such that the light cannot reach the object while light reflected at the object is guided to the image sensor. Conversely, a micromirror in the second tilt position reflects light such that the light can reach the object while light reflected at the object is supplied to the image sensor. To implement a recording of an image with coaxial dark or coaxial reflected light illumination, the micromirror device is controlled such that the light produced by the illumination system is incident on the surface at different angles within an angular range of at least arcsin(NA).

The present disclosure belongs to the technical field of micro-electro-mechanical systems, and provides a micromirror chip, a micromirror device and an optical device. The micromirror chip comprises a substrate, a micromirror array, electrodes, an optical window and a fixed ring; the micromirror array is located on a first surface of the substrate, and the electrodes are located on a second surface of the substrate, the first surface being positioned opposite to the second surface in the thickness direction of the substrate; the fixed ring is fixed to the first surface of the substrate, the micromirror array being located in an in-ring space of the fixed ring; the optical window is fixed to the fixed ring and covers the micromirror array. When the micromirror chip is packaged, the micromirror array is first sealed within a sealed space formed by the substrate, the fixed ring and the optical window, so that during subsequent packaging processes, no tiny particle will fall into an environment where the micromirror array is located, which can improve the pass rate of packaged micromirror devices, thus improving the yield of the packaged micromirror devices.

A micromechanical device (1a), in particular a micromirror device, is proposed, which has at least a first micromechanical component (2a) and a second micromechanical component (3a). The first component (2a) and the second component (3a) are connected to one another directly or indirectly. The first micromechanical component (2a) has a first sub-body (4a) and at least one second sub-body (5a). The first sub-body (4a) extends in a first plane (20a) and the second sub-body (5a) extends in a second plane (21a), which is different from the first plane (20a). The first plane (20a) and the second plane (21a) extend parallel to one another and the first plane (20a) extends above the second plane (21a). Here, the second sub-body (5a) is arranged in a transition region to the second micromechanical component (3a). A second extension (26a) of the second sub-body (5a) in a longitudinal direction is greater than a first extension (25a) of the first sub-body (4a) in the longitudinal direction.

A micromirror chip (200), a micromirror device, and an optical device, relating to the technical field of optical communications. The micromirror chip (200) comprises a substrate (1), a micromirror (2), a rotating platform (3), a cantilever beam (4), a support post (5), and a counterweight (6); the rotating platform (3) is connected to the substrate (1) by means of the cantilever beam (4), the micromirror (2) is fixed above the rotating platform (3) by means of the support post (5), and the counterweight (6) is fixed below the rotating platform (3); the substrate (1) has a surface at a position opposite the counterweight (6) in an arrangement direction of the counterweight (6), the rotating platform (3), and the support post (5), and there is a gap between mutually-facing surfaces of the substrate (1) and the counterweight (6) in the arrangement direction. The structure improves micromirror (2) rotational accuracy, and also allows for good hermeticity in substrates (1) of MEMS micromirror chips (200).

The micromirror device includes a mirror part, a first actuator that reciprocally rotates the mirror part about the first axis, and a second actuator that reciprocally rotates the mirror part about the second axis. A resonance frequency Ain a lowest-order resonance mode as a resonance mode in which the mirror part and the first actuator are rotated about the first axis in opposite phases to each other, a resonance frequency B in a lowest-order resonance mode as a resonance mode in which the mirror part and the first actuator oscillate in opposite phases in a direction orthogonal to both of the first axis and the second axis, a frequency difference F=A−B, a resonance frequency C less than F and closest to the F, and a resonance frequency D greater than F and closest to F satisfy F−C≥20 Hz and F−D≤−150 Hz.

The present disclosure relates to multi-channel optical transmitter modules, lidar systems, and methods that involve micromirror devices. An example optical transmitter module includes at least one light-emitter device and a plurality of micromirror devices optically-coupled to the at least one light-emitter device. The at least one light-emitter device is configured to emit respective light beams toward an environment via the micromirror devices. The micromirror devices are configured to deflect the light beams. The optical transmitter module also includes a controller having at least one processor and a memory. The controller is configured to carry out operations. The operations include receiving information indicative of a retroreflector object in the environment. The operations include, based on the received information, causing at least one micromirror device of the plurality of micromirror devices to deflect at least one light beam so the at least one light beam does not interact with the retroreflector object.

A micromirror device includes: a mirror portion; a first support portion that supports the mirror portion so as to be able to oscillate around a first axis; a movable frame that is connected to the first support portion; a second support portion that supports the mirror portion, the first support portion, and the movable frame so as to be able to oscillate around a second axis; a pair of first actuators that are connected to the second support portion and are opposed across the second axis; a second actuator that is disposed so as to surround the first actuators; a first connection portion that connects the first actuators and the second actuator; a fixed frame that is disposed so as to surround the second actuator; and a second connection portion that connects the second actuator and the fixed frame. The second actuator causes a torque around the first axis to act on the mirror portion. The first actuators cause a torque around the second axis to act on the movable frame.

The present invention relates to different focal planes. The present invention relates to a method for exposing a photosensitive layer having an optical system, wherein in each case at least one light beam is generated by at least one light source and pixels of an exposure pattern are illuminated by at least one micromirror device, the at least one micromirror device having a plurality of micromirrors each having a mirror intensity distribution, characterized in that the mirror intensity distributions of adjacent micromirrors overlap to obtain a pattern intensity distribution of the exposure pattern, resulting in the sum of the mirror intensity distributions of the illuminated pixels of the exposure pattern. Furthermore, the present invention relates to an apparatus for exposing a photosensitive layer using an optical system having at least one light source and at least one micromirror device having a plurality of micromirrors, wherein the optical system is designed such that the mirror intensity distributions of adjacent micromirrors overlap to form a pattern intensity distribution of the exposure pattern, resulting in the sum of the mirror intensity distributions of the illuminated pixels of the exposure pattern.

The invention relates to an optical module (10) for a microscope device (100), in particular for observing fluorescent substances to be observed, comprising a filter assembly (35, 35a), which can be rotated about a longitudinal axis (12) and which has a plurality of filters (29a, 30, 30a, 31, 31a, 32, 32a) for light, in particular light of different wavelengths, and an element (28), in particular a disc-shaped element for placing an illumination source (24, 26) and / or image-capturing devices (20, 22), said element (28) being rotatable relative to the filter assembly (35, 35a) about the longitudinal axis (12).

1. The name of the design product: mobile slit lamp microscope equipment. 2. The use of the design product: mobile slit lamp microscope equipment body for remote area primary eye disease examination. 3. The design points of the design product: the combination of shape and pattern. 4. The picture or photo that best indicates the design points: perspective view.

The present application relates to: an imaging device for telecentric imaging of a plurality of light beams into a target area; and an associated micromirror device. The imaging device comprises a beam tilt correction element and a beam control device which is designed to image N >= 2 substantially non-overlapping light beams onto the beam tilt correction element and to control a position of one or more of the N light beams on the beam tilt correction element. The imaging device also comprises a beam imaging device which is designed to image the light beams corrected by the beam tilt correction element onto the target area, wherein the beam tilt correction element is designed to correct a tilt of each of the N light beams such that the N light beams are imaged onto substantially non-overlapping positions in the target area. The beam tilt correction element may be implemented, for example, using a micromirror device.

An optical scanning device of the present disclosure includes: a micromirror device including a mirror that has a reflecting surface for reflecting light and is swingable around at least one axis, an actuator that allows the mirror to swing, and a piezoelectric element that generates and outputs electromotive force by the swinging of the mirror; a control device configured to control an operation of the actuator; and an abnormality detection device configured to detect an abnormal operation of the mirror based on a temporal fluctuation amount in an output signal from the piezoelectric element.

The invention discloses an MEMS micro-mirror device, a micro-mirror matrix and a preparation method, relates to the technical field of micro-electromechanical systems (MEMS), and can improve the yield of micro-mirror products. The invention particularly relates to an MEMS micro-mirror device, a micro-mirror matrix and a preparation method. The MEMS micro-mirror device comprises at least two stacked micro-mirror units, each micro-mirror unit comprises a first substrate, and fixed comb teeth are formed on the first substrate; the second substrate is arranged on one side of the first substrate; a torsion beam and movable comb teeth are formed on the second substrate, teeth of the fixed comb teeth and teeth of the movable comb teeth are arranged in a staggered mode, the mirror surface structure is connected with the torsion beam and connected with the movable comb teeth, and displacement of the movable comb teeth is used for driving the mirror surface structure to rotate in the axial direction of the torsion beam; wherein orthographic projections of the mirror surface structures of the stacked micro-mirror units on the first substrate are overlapped, and the mirror surface structure of the micro-mirror unit close to the light emitting side of the MEMS micro-mirror device is provided with a first hollow structure.

A micromirror device includes: a mirror portion; a first support portion that swingably supports the mirror portion around a first axis; a movable frame that is connected to the first support portion; a second support portion that swingably supports the mirror portion, the first support portion, and the movable frame around a second axis; a pair of first actuators that are connected to the second support portion and face each other across the second axis; a second actuator that surrounds the first actuator; a first connecting portion that connects the first actuator and the second actuator; a fixed frame that surrounds the second actuator; and a second connecting portion that connects the second actuator and the fixed frame. The second actuator applies rotational torque around the first axis to the mirror portion. The first actuator applies rotational torque around the second axis to the movable frame.

The micromirror device includes a mirror portion, a support portion, a movable frame, a second support portion, a driving part, a fixed frame, and a connecting portion. The first support portion is line-symmetrical about the first axis. The second support portion is line-symmetrical about the second axis and includes a second swing shaft disposed on the second axis and a second coupling part. One end of the second swing shaft is connected to the movable frame and the other end is connected to the second coupling part, and the second coupling part extends in a direction from an outer end portion of the second swing shaft on the second axis toward the mirror portion and is connected to the driving part in a region adjacent to the movable frame. The connecting portion is line-symmetrical about the second axis and supports the driving part to be swingable around it.

The micromirror device includes: a mirror portion; a first support portion that swingably supports the mirror portion around a first axis; a pair of movable frames that face each other across the first axis; a second support portion that swingably supports a movable portion around a second axis; a driving portion that surrounds the movable portion and has a gap with the second support portion on the second axis; a coupling portion that couples the second support portion and the driving portion; and a fixed frame, in which, in a state where the mirror portion rotates around the first axis and an absolute value of a rotation angle is larger than 0 degrees, assuming that, in a plane orthogonal to the first axis and including the second axis, a distance between an intersection between the second axis and a straight line located on a surface of the second support portion and including each end point of the second support portion and an end part of the second support portion on a mirror portion side in a stationary state is denoted by A, and a total length of the second support portion in a direction of the second axis is denoted by L, a relationship of ⅔<A / L is satisfied.

A MEMS micromirror device is formed in a package comprising a housing and a cover transparent to optical radiation. The package forms a cavity that houses a tiltable platform having a reflective surface. A metastructure is formed on the cover and / or the reflective surface and comprises a plurality of diffractive optical elements.

A nonlinear microscopy device includes a rotational optical assembly configured to rotate about an imaginary rotational axis and a radial optical assembly that is translatable radially relative to the imaginary rotational axis. The rotational optical assembly includes beam delivery optics to transmit a laser beam to the radial optical assembly, and the radial optical assembly includes an objective lens to focus the laser beam to a focus point, which may be on a sample. While the rotational optical assembly is rotated, the radial optical assembly is moved radially relative to the rotational axis. Secondary light generated by the sample is collected by the objective lens and directed to a detector. The signal received by the detector is converted into a two-dimensional image of the sample. Other embodiments are described and claimed.

The invention provides a micro-mirror chip, a micro-mirror device and optical equipment, and belongs to the technical field of optical communication. The micro-mirror chip comprises a substrate, a micro-mirror, a rotating table, a cantilever beam, a supporting column and a balance block. The rotating table is connected with the substrate through the cantilever beam, the micromirror is fixed above the rotating table through the supporting column, and the balance block is fixed below the rotating table; the substrate is provided with a surface at a position opposite to the balance block in the arrangement direction of the balance block, the rotating table and the supporting column, and a gap is formed between the opposite surfaces of the substrate and the balance block in the arrangement direction. By adopting the MEMS micromirror chip and the manufacturing method thereof, the rotation accuracy of the micromirror can be improved, and the substrate of the MEMS micromirror chip can have good air tightness.

This optical scanning device is provided with: a micromirror device (2) having a mirror section (20) provided with a reflecting surface (20A) that reflects incident light, a first actuator that swings the mirror section (20) about a first axis (a1) parallel to the reflecting surface (20A) when the mirror section (20) is stationary, and a second actuator that swings the mirror section (20) about a second axis (a2) parallel to the reflecting surface (20A) and orthogonal to the first axis (a1); a light source (50) that emits a light beam (Lb); a first light detection element (51) and a second light detection element (52) that detect the position of the light beam (Lb) reflected by the mirror unit (20) in the one-dimensional direction; and a processor that calculates, on the basis of detection signals output from the first light detection element (51) and the second light detection element (52), the amplitude of the mirror section around the first axis (a1), the amplitude of the mirror section around the second axis (a2), and the phase difference between the oscillation of the mirror section (20) around the first axis (a1) and the oscillation of the mirror section around the second axis (a2).

A micromechanical device, in particular a micromirror device. The device has at least one first micromechanical component and one second micromechanical component. The first component and the second component are directly or indirectly joined to one another. The first micromechanical component has a first sub-body and at least one second sub-body. The first sub-body extends in a first plane and the second sub-body in a second plane different from the first plane. The first plane and the second plane extend parallel to one another and the first plane extends above the second plane. The second sub-body is arranged in a transitional region to the second micromechanical component. A second extent of the second sub-body in the longitudinal direction is greater than a first extent of the first sub-body in the longitudinal direction.

The utility model relates to the technical field of microscope equipment, in particular to a microscope convenient for changing the position of a lens, which comprises a base, the surface of the base is fixedly connected with a lens column, the surface of the lens column is fixedly connected with a lens arm, the surface of the lens arm is movably connected with a lens barrel, and the surface of the lens arm is movably connected with a reflective mirror. The surface of the mirror arm is connected with a rotating rod through a rotating shaft. Through the connection of the gear and the rack, under the action of the rotating rod and the rotating ring on the surface of the rotating rod, the gear is synchronously driven to rotate when the rotating rod rotates, so that the up-down position of the rack is changed, the up-down position of the reflective mirror is adjusted, and the angle and brightness of light are conveniently adjusted according to different observation samples; and through the connection of the reflective mirror and the rack, under the action of the universal ball and the hemispherical cover, the angle of the reflective mirror can be rotated, so that the angle of the light source can be conveniently and more accurately adjusted.

The invention relates to a method for manufacturing MEMS devices, in particular MEMS micromirror devices (14, 78), from a substrate wafer (36). The substrate wafer comprises silicon material and MEMS structures (78, 80) separated by silicon oxide (24). According to process step a), a first coating part (32) of a MEMS device, in particular a MEMS micromirror device (14, 78), is provided on a top surface of the substrate wafer (36). Subsequently, according to process step b), a handling wafer (30) provided with a second coating part (34) of the MEMS device, in particular a MEMS micromirror device (14, 78), is applied over a surface area to the previously provided first coating part (32). A connection, in particular a bond connection (50), is then formed between the coating parts (32, 34) as a full-surface connection to form a composite (86).Subsequently, micromirror elements (78) and / or electrode arrangements (80) are formed in the substrate wafer (36), isolated from the silicon material of the substrate wafer (36). Furthermore, the invention relates to the use of the method for the fabrication of MEMS devices, in particular MEMS micromirror elements (14, 78), from substrate wafers (36) containing silicon material.