Device and method for detecting contours of large-caliber aspheric surface components

An aspheric, large-diameter technology, applied in measurement devices, optical devices, instruments, etc., can solve the problems of insufficient use of spatial reference motion error compensability, limited surface measurement accuracy, and limited response speed. Small deformation, short motion amplitude, and the effect of reducing Abbe error

Active Publication Date: 2017-02-22
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method is suitable for surface shape detection of aspheric components with any caliber. Its disadvantage is that it adopts single-point scanning and has low efficiency. Due to the measurement principle on which the probe is based, its response speed is limited, the measurement time is long, and changes in environmental conditions will introduce Measurement error, surface shape measu...

Method used

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  • Device and method for detecting contours of large-caliber aspheric surface components
  • Device and method for detecting contours of large-caliber aspheric surface components
  • Device and method for detecting contours of large-caliber aspheric surface components

Examples

Experimental program
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Effect test

Embodiment 1

[0041] like figure 1 and figure 2 As shown, the detection method for the contour processing of large-diameter aspheric elements, the detection steps are as follows:

[0042] The measured aspheric surface 10 is placed on the precision air-floating rotary table 3, and the sensor measurement system 5 is fixed on the horizontal measuring arm 9 connected to the bushing 8 of the precision linear air-floating guide rail 2, and can be used as a joint with the bushing 8. In the measurement process, it is necessary to ensure that the sensing and measuring system 5 is perpendicular to the motion direction of the precision linear air-bearing guide rail 2, and the sensing and measuring system 5 performs a one-dimensional scanning linear motion along the generatrix direction 15 of the measured aspheric surface 10, and at the same time Using the guide rail linear motion error laser monitoring system 4 to monitor, separate and compensate the linear motion error of the precision linear air-f...

Embodiment 2

[0047] combine figure 1 and image 3 As shown, the large-diameter aspheric surface processing and testing device is mainly composed of base 1, precision linear air-floating guide rail 2, precision air-floating rotary table 3, guide rail linear motion error laser monitoring system 4, air-floating table adjustment system 11, measurement transmission Sensing system 5, control system 7, computer 12, etc., precision linear air-floating guide rail 2, guide rail linear motion error laser monitoring system 4 are all fixed on the base 1, and distributed around the precision air-floating rotary table 3. Among them, the sensing and measuring system 5 is fixed on the transverse measuring arm 9 connected with the shaft sleeve 8 of the precision linear air bearing guide rail 2, and can perform a one-dimensional linear scanning movement along the axial direction of the precision linear air bearing guide rail 2 along with the sleeve 8 ; The radial sensing system 14 is fixed on the vertical m...

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Abstract

The invention belongs to the technical field of optical precision tests, and relates to a device and a method for precisely detecting large-caliber aspheric surfaces. The device and the method can be used for detecting the contours of large aspheric surface components in precision optical systems in a high-precision manner. The device is of an open type contour instrument structure with rotary-linear datum common base planes on the basis of linear/rotary datum technologies and the like, so that the contours of the large-caliber aspheric surface components can be detected on the basis of precision flotation rotary centers in the high-precision manner. The device and the method have the advantages that common base plane designs for rotary-linear datum systems, turning designs for measurement frames and designs for open type non-gantry structures are adopted, Abbe errors of instruments can be reduced, the movement precision of a precision linear flotation guide rail can be realized to the greatest extent, and parameters of the contour of a mother line of each to-be-detected aspheric surface can be directly measured by a sensing measuring system which synchronously moves with the precision linear flotation guide rail; the contours of multiple mother lines of the to-be-detected aspheric surfaces can be measured by the aid of precision flotation rotary technologies, and the contours of the large-caliber aspheric surfaces can be quickly detected in the high-precision manner by means of fitting.

Description

technical field [0001] The invention belongs to the technical field of optical precision testing, and relates to a large-diameter precision aspheric surface detection device and method, which can be used for high-precision detection of the surface profile of a large-scale high-precision aspheric surface element in a precision optical system. [0002] technical background [0003] Large-scale high-precision aspheric optical components play an extremely important role in precision optical systems such as aerospace cameras and astronomical telescopes. In aspheric surface processing, in order to meet the design requirements of aspheric surface shape and roughness, it generally adopts manufacturing processes such as processing-inspection-reprocessing-reinspection. To a certain extent, the key to obtaining high-precision aspheric components It lies in whether reliable and effective detection technology can be provided to guide the processing, especially in the milling and polishing...

Claims

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Application Information

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IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 邱丽荣赵维谦马飞
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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