Laser interference principle-based precise main shaft rotation precision detecting device and method

Abstract

The invention discloses a laser interference principle-based precise main shaft rotation precision detecting and analyzing method. A precise main shaft rotation precision detecting light path comprises a box body which is used for mounting required instruments, a laser transmitter which is mounted in the box body, four optical convex lenses, a half transparent and half reflecting mirror, a reference ball and a CCD camera; part laser beams emit out from a circular hole in a square box and are projected on a target ball; the target ball is mounted on a precise main shaft through an extending rod. A laser interference pattern which is acquired by the CCD camera is analyzed through an analysis principle to acquire the rotating speed and a three-directional displacement error of the precise main shaft. The laser interference principle-based precise main shaft rotation precision detecting and analyzing method is conveniently used for engineering detection; error separation is not required; the rotating speed, and the axial and radial displacement errors of the precise main shaft can be detected simultaneously; moreover, the detection precision reaches nano scale.

Description

【Technical field】 [0001] The invention belongs to the field of precision spindle rotation accuracy testing and analysis, and relates to a precision spindle rotation accuracy detection device and method based on the principle of laser interference. 【Background technique】 [0002] Precision spindle is an important component of high-end CNC machine tools, and its precision performance has an important impact on the machining capabilities of machine tools. Since the manufacturing error of the characteristic surface used for detection is very close to the rotation accuracy of the precision spindle, it is usually necessary to use certain means to separate the errors and obtain more realistic results of the rotation accuracy. For radial runout, multiple sensors are usually used for detection at different angles, and then mathematical methods are used to process the obtained signals to achieve error separation. The main methods are orthogonal method, three-point method and so on. ...

AI Technical Summary

Problems solved by technology

[0007] 4) The radial runout is detected by multiple sensors, and the extension lines of the sensors should be intersected at one point, and in order to separate the errors, the sensor angle requirements are relatively high, and the installation of the sensors is very difficult;

[0008] 5) The rotation speed of the spindle needs to be detected separately, which is not conducive to synchronous analysis

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