Nonspherical absolute measuring system based on multiwave front lens compensator

An absolute measurement and compensator technology, which is applied to aspheric absolute measurement systems and measurement fields, and can solve the problems of complex measurement process and data processing of aspheric absolute measurement methods, influence of lithography structure error detection results, and failure to meet common optical path conditions. , to improve the detection accuracy of the system, ensure the calibration accuracy, and achieve the effect of a large scope of application

Inactive Publication Date: 2010-11-03
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

The main disadvantage of the three-position method is that the "cat's eye" is used to measure the position, and the test wavefront will reverse the optical path at this position, which will not meet the common optical path condition; in addition, the cat's eye position is not sensitive to adjustment errors, and its adjustment errors will lead to errors in the data processing process. Incorrect coordinate matching, resulting in inaccurate calculation results
The main disadvantage of this method ...

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  • Nonspherical absolute measuring system based on multiwave front lens compensator
  • Nonspherical absolute measuring system based on multiwave front lens compensator
  • Nonspherical absolute measuring system based on multiwave front lens compensator

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Embodiment Construction

[0020] figure 1 is an absolute measurement system for aspheric surfaces based on multi-wavefront lens compensators for convex aspheric surface detection, figure 2 It is a schematic diagram for detecting a concave aspheric surface, and the absolute measurement system for detecting a concave aspheric surface and a convex aspheric surface of the present invention has the same structure except the multi-wavefront lens compensator. like figure 1 and 2 As shown, the aspheric absolute measurement system based on the multi-wavefront lens compensator includes a phase-shift interferometer 1, a standard lens 2, a multi-wavefront lens compensator 5 composed of multiple optical elements or element groups 3, 4, and an electrical The control adjustment device 6 and the electronic control adjustment device driver 7, the measured aspheric optical element 8, the six-dimensional adjustment frame 9, the electronic control translation stage 10 and the electric control platform driver 11, and th...

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Abstract

The invention relates to a nonspherical absolute measuring system based on a multiwave front lens compensator, which comprises a phase shifting interferometer, a standard lens, a multiwave front lens compensator, an electric control adjusting device and a driver thereof, a measured nonspherical optical element, a six-dimensional adjusting frame, an electric control translation platform and a drive thereof as well as a computer control and date processing system, wherein the multiwave front lens compensator comprises a plurality of optical elements or element groups. The invention realizes error separation by a plurality of interferometry for improving the surface shape detecting precision of the nonspherical optical element and has certain flexible measuring range and larger application value.

Description

technical field [0001] The invention relates to an aspheric surface absolute measurement system and a measurement method, which belong to the technical field of advanced optical manufacturing and detection. technical background [0002] The manufacture of high-precision optical components requires corresponding detection technology, and high-precision surface shape detection technology still faces great challenges. Digital phase-shift interferometer is the mainstream equipment for surface shape detection at present. The basic principle of interferometry is that the test wavefront carrying the surface error information of the optical element under test interferes with the reference wavefront, and then the interferogram is processed to calculate the phase value reflecting the measurement error information. As an ideal measurement "ruler" for relative measurement, the surface shape detection accuracy of the interferometer is mainly affected by the accuracy of the reference wav...

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Application Information

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IPC IPC(8): G01B11/24
Inventor 侯溪伍凡万勇建吴永前吴高峰杨鹏
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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