Two-dimensional laser optical path gear measurement device
A gear measurement and optical path technology, applied in measurement devices, optical devices, instruments, etc., can solve the problems of measurement chain length, shaft system error influence, and high measurement accuracy, and achieve the effect of reducing Abbe error
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[0015] see figure 1 and figure 2 , The specific embodiment of the present invention is: a two-dimensional laser optical path gear measurement device, including three parts: the main motion axis system, the optical path tracking adjustment axis system and the laser interferometry system.
[0016] The main motion shaft system is mainly composed of base 1, air bearing turntable 2, top column 3, upper top 4, X 1 Axis moving slide 18, Y 1 Axis moving slide plate 17, and Z 1 Axis moving slides consist of 16, where Z 1 The shaft guide is fixed at the X 1 Axis moving on slide 18, Y 1 The axis guide is fixed on the Z 1 Axis movement on slide 16, X 1 , Y 1 and Z 1 The three axes are perpendicular to each other, Z 1 The shaft and the top column 3 are parallel to each other, and the upper top 4 is coaxial with the rotation axis of the air bearing turntable 2 .
[0017] The base 1, top column 3, X 1 , Y 1 and Z 1 The three-axis guideways are all made of granite material, X ...
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