Laser direct writing image detection method and system and related equipment

By setting and processing binary image sequences in the laser direct writing device, the horizontal offset of the laser spot is detected, and the image deformation problem caused by the spot offset in the laser array is solved, and the precise positioning of the image deformation area and the measurement of deformation are realized, helping to correct the error of laser direct writing imaging.

CN119668036AActive Publication Date: 2025-03-21SHENZHEN ANTELAND TECH CO LTD

Patent Information

Application Number
CN202311214500.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2023-09-19
Publication Date
2025-03-21
Estimated Expiration
2043-09-19

AI Technical Summary

Technical Problem

In existing laser direct writing devices, the offset of the laser spot in the scanning direction of the laser array causes image deformation and it is difficult to accurately locate and measure the spot offset.

Method used

By setting up multiple sets of non-repetitive binary images to form an image sequence in the horizontal direction and performing binarization processing, the offset of each laser spot in the horizontal direction is detected, and the precise positioning of the image deformation area and the measurement of the deformation variable are achieved.

Benefits of technology

The precise positioning of image deformation areas and measurement of deformations in laser direct writing equipment is realized, helping to correct the errors in laser direct writing imaging.

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Abstract

The embodiment of the invention provides a laser direct-writing image detection method, a laser direct-writing image detection system and related equipment, which realize accurate positioning of an image deformation area position on a complete exposure breadth and measurement of deformation quantity by detecting the offset of light spots of different lasers in the horizontal direction at the same moment. The method comprises the following steps: arranging a plurality of groups of non-repeated binary images to be ranked in the horizontal direction to form an image sequence, and carrying out binarization processing on the image sequence to obtain the position of a laser exposure point; in a synchronous scanning process of a plurality of lasers in the laser array, controlling each laser to expose a mapping position of an exposure point on a photosensitive coating in an image sequence by using a synchronous switch instruction so as to respectively form a latent image of the image sequence in a respective scanning area of each laser; and if the plurality of developing image sequences are not aligned in the horizontal direction from the target binary images in the same sequence, detecting coordinate values of difference points of the target binary images in each developing image sequence in the horizontal direction.
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Description

Technical Field

[0001] The present invention relates to the field of laser direct writing technology, and in particular to a laser direct writing image detection method, system and related equipment. Background Art

[0002] Existing laser direct writing equipment (such as the laser direct platemaking device for flat screen printing screens disclosed in the patent scheme with application number 201310084860.3) is often provided with a laser array composed of multiple lasers distributed in a linear shape, and a preset image is formed on the photosensitive coating based on the reciprocating scanning of the laser array.

[0003] The applicant has discovered that due to the errors in the laser array mechanical hardware itself or the influence of different motion parameters, the light spots of some lasers in the laser array in the laser scanning direction (horizontal direction) will shift to varying degrees in certain exposure areas, ultimately causing the latent image formed by the laser array scanning exposure to deform in the horizontal direction.

[0004] After the equipment is installed, how to determine the horizontal displacement of each laser spot in the laser array at a certain moment (a certain position) under fixed motion parameters in the laser array becomes an urgent problem to be solved. Summary of the invention

[0005] The embodiments of the present invention provide a laser direct writing image detection method, system and related equipment, which realizes the precise positioning of the image deformation area on the complete exposure format and the measurement of the deformation amount by detecting the horizontal offset of the light spots of different lasers at the same time.

[0006] A first aspect of an embodiment of the present invention provides a laser direct writing image detection method, which may include:

[0007] Arrange multiple groups of non-repetitive binary images in a horizontal direction to form an image sequence, and perform a binary process on the image sequence to obtain the position of the laser exposure point;

[0008] During the process of synchronously scanning the multiple pixel rows on the photosensitive coating by the multiple lasers in the laser array, each laser is controlled by a synchronous switch instruction to expose the mapping position of the exposure point in the image sequence on the photosensitive coating, so as to form a latent image of the image sequence in the respective scanning area of ​​each laser;

[0009] After the photosensitive coating is developed to form multiple developed image sequences corresponding to the multiple image sequences, if the multiple developed image sequences are not aligned in the horizontal direction starting from the target binary images of the same order, the coordinate values ​​of the difference points of the target binary images in each of the developed image sequences are detected in the horizontal direction.

[0010] Optionally, as a possible implementation, in the embodiment of the present invention, the step of controlling each laser to expose the mapping position of the exposure point in the image sequence on the photosensitive coating with a synchronized switch instruction may include:

[0011] Controlling each laser to expose the scanning area at a mapping position of an exposure point in an image sequence on the photosensitive coating;

[0012] Alternatively, each laser is controlled to sequentially expose the mapping position of the exposure points in the multiple image sequences in the scanning area on the photosensitive coating.

[0013] Optionally, as a possible implementation, in an embodiment of the present invention, the binary image in the image sequence is composed of pattern units corresponding to non-repeating four-bit binary numbers, wherein the binary number 0 and the binary number 1 correspond to different image samples, respectively.

[0014] Optionally, as a possible implementation manner, the laser direct writing image detection method in the embodiment of the present invention may further include:

[0015] An identification image for identifying image sequences at different positions is arranged between two adjacent image sequences, and the pixel row where each identification image is located does not overlap with the pixel row where the adjacent image sequence is located.

[0016] Optionally, as a possible implementation, in an embodiment of the present invention, the coordinate values ​​of the identification image in the horizontal direction are distributed in an arithmetic progression.

[0017] A second aspect of an embodiment of the present invention provides a laser direct writing image detection system, which may include:

[0018] A first setting module is used to arrange a plurality of groups of non-repetitive binary images in a horizontal order to form an image sequence, and to perform a binary process on the image sequence to obtain the position of the laser exposure point;

[0019] a control module, which controls each laser to expose the mapping position of the exposure point in the image sequence on the photosensitive coating layer with a synchronized switch instruction during the synchronized scanning of the multiple pixel rows on the photosensitive coating layer by the multiple lasers in the laser array, so as to form a latent image of the image sequence in the respective scanning area of ​​each laser;

[0020] A detection module, after the photosensitive coating is developed to form multiple developed image sequences corresponding to the multiple image sequences, if the multiple developed image sequences are not aligned in the horizontal direction starting from the target binary images of the same order, then detects the coordinate values ​​of the difference points of the target binary images in each of the developed image sequences in the horizontal direction.

[0021] Optionally, as a possible implementation, the control module may include:

[0022] A first control unit controls each laser to expose a mapping position of an exposure point in an image sequence in a scanning area on the photosensitive coating;

[0023] Alternatively, the second control unit controls each laser to sequentially expose the mapping position of the exposure point in the multiple image sequences in the scanning area on the photosensitive coating.

[0024] Optionally, as a possible implementation, the laser direct writing image detection system may further include:

[0025] The second setting module sets an identification image for identifying image sequences at different positions between two adjacent image sequences, and the pixel row where each identification image is located does not overlap with the pixel row where the adjacent image sequence is located.

[0026] A third aspect of an embodiment of the present invention provides a computer device, the computer device comprising a processor, the processor being configured to implement the steps in the first aspect and any possible implementation manner of the first aspect when executing a computer program stored in a memory.

[0027] A fourth aspect of an embodiment of the present invention provides a computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, the steps in the first aspect and any possible implementation of the first aspect are implemented.

[0028] It can be seen from the above technical solutions that the embodiments of the present invention have the following advantages:

[0029] In the embodiment of the present invention, multiple groups of non-repetitive binary images are arranged in the horizontal direction to form an image sequence, and the image sequence is binarized to obtain the position of the laser exposure point, and then each laser is controlled to expose the mapping position of the exposure point in the image sequence on the photosensitive coating with a synchronous switch instruction, so as to form the latent image of the image sequence in each scanning area of ​​each laser. After the photosensitive coating is developed to form multiple developed image sequences corresponding to the multiple image sequences, it can be observed that the multiple developed image sequences are not aligned in the horizontal direction starting from the target binary image of the same order. If they are not aligned, the coordinate values ​​of the target binary images in each developed image sequence in the horizontal direction are detected, and the position of the light spot of each laser at the moment of exposing the target binary image can be obtained, and then the relative offset of the light spot of each laser at the moment of exposing the difference point of the target binary image can be calculated according to each coordinate value. It can be seen that the scheme in the embodiment of the present application realizes the precise positioning of the position of the image deformation area on the complete exposure format and the measurement of the deformation amount by detecting the horizontal offset of the light spots of different lasers at the same time, which is conducive to correcting the error of laser direct writing imaging. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 A schematic diagram of an embodiment of a laser direct writing image detection method in an embodiment of the present invention;

[0031] Figure 2 A schematic diagram of a binary image corresponding to a binary number in a laser direct writing image detection method in an embodiment of the present invention;

[0032] Figure 3 Schematic diagram of the distribution of the development image sequence in the embodiment of the present invention;

[0033] Figure 4 FIG. 1 is a schematic diagram of an embodiment of a computer device in an embodiment of the present invention. DETAILED DESCRIPTION

[0034] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0035] The terms "first", "second", "third", "fourth", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments described herein can be implemented in an order other than that illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0036] In the description of this application, unless otherwise specified, "multiple" means two or more. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two components.

[0037] For ease of understanding, the laser array formed by multiple lasers applicable to the embodiment of the present application will be described below. The vertical projection points of the lasers in the laser array along the preset straight line direction (vertical direction) are arranged without overlapping. In practical applications, the laser array reciprocates and scans the photosensitive coating multiple times along the laser scanning direction (perpendicular to the direction of the preset straight line). During one scanning process, the multiple laser beams in the laser array are parallelly scanned at a fixed spacing (the fixed spacing is determined by the installation position and is fixed) on multiple pixel rows of the same batch on the photosensitive coating to selectively expose the pixel points in each pixel row. After the last scan is completed, the laser is moved with a fixed moving step along the vertical direction of the scanning direction (i.e., the preset straight line direction), so that the laser can perform parallel scanning and exposure on the unscanned pixel rows in each scanning gap between adjacent lasers on the photosensitive coating.

[0038] It is understandable that the connecting lines of adjacent lasers in the laser array in the present application can form a straight line perpendicular to the laser scanning direction, or a straight line not perpendicular to the laser scanning direction, or a broken line, as long as the vertical projection points of the lasers in the laser array along the preset straight line direction (the direction perpendicular to the laser scanning direction) do not overlap, and the specific arrangement method is not limited here. Among them, the specific mechanical structure for realizing the movement of the laser assembly is not limited here. For example, a manipulator, a screw drive, etc. can be set to realize the movement of the laser array in the horizontal and vertical directions.

[0039] It should be noted that the horizontal direction in the embodiment of the present application refers to the direction parallel to the direction of the pixel row of the image to be formed on the photosensitive coating or a plane parallel to the photosensitive coating, and the vertical direction refers to the direction perpendicular to the selected horizontal direction on the photosensitive coating or a plane parallel to the photosensitive coating. Therefore, the horizontal direction and the vertical direction in the present application change with the position of the photosensitive coating and the direction of the pixel row of the image to be formed on the photosensitive coating, and the specific direction is not limited here.

[0040] The specific process in the embodiment of the present application is described below. Figure 1 , an embodiment of a laser direct writing image detection method in an embodiment of the present invention may include:

[0041] S101: Arrange a plurality of groups of non-repetitive binary images in a horizontal direction to form an image sequence, and perform a binary process on the image sequence to obtain the position of the laser exposure point.

[0042] In order to determine the positions of the light spots of multiple lasers in a laser array at the same moment, the applicant proposed to expose multiple lasers synchronously (the switching instructions of multiple lasers at the same moment are the same, that is, synchronous exposure), respectively forming an image sequence corresponding to each laser, and then identifying the position information of the light spots of each laser at the same moment based on the developed image, and then determining the horizontal offset of each laser in the laser array at this moment based on the position information.

[0043] To this end, it is necessary to set up multiple groups of non-repetitive binary images through the measurement system and arrange them in the horizontal direction to form an image sequence, and binarize the image sequence to obtain the position of the laser exposure point. The specific binarization is an existing technology and will not be described here.

[0044] For example, as a possible implementation, the binary image in the image sequence is composed of pattern units corresponding to non-repeating four-bit binary numbers, wherein the binary number 0 and the binary number 1 correspond to different image patterns. Figure 2 As shown, the pattern unit corresponding to the binary number 0 is different from the pattern unit corresponding to the binary number 1, and the images corresponding to the four-bit binary number can form 16 non-repeating binary images, which are then arranged in the horizontal direction to form an image sequence.

[0045] It can be understood that the composition of the above-mentioned image sequence is merely exemplary, and other forms of pattern units can be used in actual applications. For example, different pattern units corresponding to various bases of octal, decimal, and hexadecimal numbers can be set, and then non-repeating pattern units corresponding to non-repeating octal, decimal, and hexadecimal numbers form an image sequence. The specific composition of the image sequence is not limited here, and it only needs to be composed of multiple groups of non-repeating binary images.

[0046] S102: Controlling each laser to expose the mapping position of the exposure point in the image sequence on the photosensitive coating with a synchronous switch command, so as to form a latent image of the image sequence in the respective scanning area of ​​each laser.

[0047] After setting the image sequence, multiple lasers in the laser array can be controlled to synchronously scan multiple pixel rows on the photosensitive coating. During the scanning process, each laser is controlled by a synchronous switch command to expose the mapping position of the exposure point in the image sequence on the photosensitive coating, so as to form a latent image of the image sequence in the respective scanning area of ​​each laser, and then each developed image sequence corresponding to each image sequence is obtained through development processing. The specific development process is a prior art and will not be described here.

[0048] It should be noted that the scanning area of ​​each laser can accommodate dozens of images of image sequences. In the embodiment of the present application, not only can each laser be controlled to expose an area corresponding to an image sequence in the scanning area, but each laser can also be controlled to sequentially and synchronously expose areas corresponding to multiple image sequences in its respective scanning area. The specifics are not limited here. Each laser sequentially and synchronously exposing areas corresponding to multiple image sequences can not only expand the detection range of image deformation, improve the detection range and accuracy, but also can detect the deformation of different image sequences of the same laser in the scanning area, further expanding the detection range and dimension.

[0049] S103: If the plurality of developed image sequences are not aligned in the horizontal direction starting from the target binary image of the same order, the coordinate values ​​of the difference points of the target binary images in each developed image sequence in the horizontal direction are detected.

[0050] After the photosensitive coating is developed to form multiple developed image sequences corresponding to the multiple image sequences, if the multiple developed image sequences are not aligned in the horizontal direction starting from the target binary images of the same order, the coordinate values ​​of the difference points of the target binary images in each developed image sequence are detected in the horizontal direction, and then the relative offset of the light spot of each laser in the horizontal direction can be calculated according to the respective coordinate values.

[0051] For example, Figure 3 As shown, only the development image sequences corresponding to the two image sequences 1010 and 1101 are shown. In actual applications, there may be more image sequences. Multiple development image sequences are obtained from the same sorted target binary image ( Figure 3The selected part) is not aligned in the horizontal direction at the beginning. If the coordinate values ​​of the difference points of the target binary images in the nth, n+1th, n+2nd and n+3th developing image sequences are 32, 31, 33 and 34 respectively in the horizontal direction, it can be determined that the horizontal offsets of the laser spot corresponding to the nth, n+2nd and n+3th developing image sequences relative to the laser spot of the n+1th developing image sequence at the moment of printing the difference points of the target binary image are 1, 2 and 3 respectively, and then the original image can be adjusted according to each offset to correct the offset.

[0052] It can be seen from the above disclosure that in the embodiment of the present application, multiple groups of non-repetitive binary images are arranged in the horizontal direction to form an image sequence, and the image sequence is binarized to obtain the position of the laser exposure point, and then each laser is controlled to expose the mapping position of the exposure point in the image sequence on the photosensitive coating with a synchronized switch instruction, so as to form a latent image of the image sequence in the respective scanning area of ​​each laser. After the photosensitive coating is developed to form multiple developed image sequences corresponding to the multiple image sequences, it can be observed that the multiple developed image sequences are not aligned in the horizontal direction starting from the target binary image of the same order. If they are not aligned, the coordinate values ​​of the target binary images in each developed image sequence in the horizontal direction are detected, and the position of the light spot of each laser at the moment of exposing the target binary image can be obtained, and then the relative offset of the light spot of each laser at the moment of exposing the difference point of the target binary image can be calculated according to each coordinate value. It can be seen from this that the scheme in the embodiment of the present application realizes the precise positioning (with pixel-level accuracy) of the position of the image deformation area on the complete exposure format and the measurement of the deformation amount by detecting the horizontal offset of the light spots of different lasers at the same time, which is beneficial to correcting the errors of laser direct writing imaging.

[0053] Optionally, as a possible implementation, in the above Figure 1 Based on the embodiment shown in the figure, because the spot size is larger than the pixel row, the points in the adjacent pixel row in the area where the exposed point is located are exposed, resulting in the adjacent image sequence being overexposed and causing the adjacent image sequence to overlap to form the following Figure 2 The development pattern unit shown. In order to avoid image overlap, adjacent image sequences need to be separated. To this end, when each laser sequentially and synchronously exposes the areas corresponding to multiple image sequences in the scanning area, an identification image for identifying image sequences at different positions may be provided between two adjacent image sequences (the pixel row where each identification image is located does not overlap with the pixel row where the adjacent image sequence is located), so that adjacent image sequences are spaced apart by one or more pixel rows to avoid image sequence overlap due to overexposure. Preferably, the coordinate values ​​of the identification images in the horizontal direction may be distributed in an arithmetic progression, or may not follow the arithmetic progression distribution, and the identification images only need to be distributed at intervals in the horizontal direction.

[0054] The present application also provides a laser direct writing image detection system, which may include:

[0055] A first setting module is used to arrange multiple groups of non-repetitive binary images in a horizontal order to form an image sequence, and to perform a binary process on the image sequence to obtain the position of the laser exposure point;

[0056] A control module, in the process of synchronously scanning a plurality of pixel rows on the photosensitive coating by a plurality of lasers in the laser array, controls each laser to expose a mapping position of an exposure point in an image sequence on the photosensitive coating with a synchronous switch instruction, so as to form a latent image of the image sequence in a respective scanning area of ​​each laser;

[0057] A detection module, after the photosensitive coating is developed to form multiple developed image sequences corresponding to the multiple image sequences, if the multiple developed image sequences are not aligned in the horizontal direction starting from the target binary images of the same order, then detects the coordinate values ​​of the difference points of the target binary images in each developed image sequence in the horizontal direction.

[0058] Optionally, as a possible implementation, the control module may include:

[0059] A first control unit controls each laser to expose a mapping position of an exposure point in an image sequence in the scanning area on the photosensitive coating;

[0060] Alternatively, the second control unit controls each laser to sequentially expose the mapping positions of the exposure points in the multiple image sequences in the scanning area on the photosensitive coating.

[0061] Optionally, as a possible implementation, the laser direct writing image detection system may further include:

[0062] The second setting module sets an identification image for identifying image sequences at different positions between two adjacent image sequences, and the pixel row where each identification image is located does not overlap with the pixel row where the adjacent image sequence is located.

[0063] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0064] The laser direct writing image detection system in the embodiment of the present invention is described above from the perspective of modular functional entities. Figure 4 , the computer device in the embodiment of the present invention is described below from the perspective of hardware processing:

[0065] The computer device 1 may include a memory 11, a processor 12 and an input / output bus 13. When the processor 11 executes the computer program, the above Figure 1 The steps in the method embodiment shown are, for example, Figure 1 Alternatively, when the processor executes the computer program, the functions of the modules or units in the above-mentioned device embodiments are realized.

[0066] The memory 11 includes at least one type of readable storage medium, and the readable storage medium includes a flash memory, a hard disk, a multimedia card, a card-type memory (for example, an SD or DX memory, etc.), a magnetic memory, a magnetic disk, an optical disk, etc. In some embodiments, the memory 11 may be an internal storage unit of the computer device 1, such as a hard disk of the computer device 1. In other embodiments, the memory 11 may also be an external storage device of the computer device 1, such as a plug-in hard disk equipped on the computer device 1, a smart memory card (Smart Media Card, SMC), a secure digital (Secure Digital, SD) card, a flash card (Flash Card), etc. Further, the memory 11 may also include both an internal storage unit of the computer device 1 and an external storage device. The memory 11 may not only be used to store application software and various types of data installed in the computer device 1, such as the code of a computer program, etc., but may also be used to temporarily store data that has been output or is to be output.

[0067] In some embodiments, the processor 12 may be a central processing unit (CPU), a controller, a microcontroller, a microprocessor or other data processing chip, and is used to run program codes or process data stored in the memory 11, such as executing a computer program.

[0068] The input / output bus 13 may be a peripheral component interconnect (PCI) bus or an extended industry standard architecture (EISA) bus, etc. The bus may be divided into an address bus, a data bus, a control bus, etc.

[0069] Furthermore, the computer device may also include a wired or wireless network interface 14. The network interface 14 may optionally include a wired interface and / or a wireless interface (such as a WI-FI interface, a Bluetooth interface, etc.), which is usually used to establish a communication connection between the computer device 1 and other electronic devices.

[0070] Optionally, the computer device 1 may also include a user interface, which may include a display (Display), an input unit such as a keyboard (Keyboard), and optionally, the user interface may also include a standard wired interface and a wireless interface. Optionally, in some embodiments, the display may be an LED display, a liquid crystal display, a touch-sensitive liquid crystal display, and an OLED (Organic Light-Emitting Diode) touch device, etc. The display may also be appropriately referred to as a display screen or a display unit, which is used to display information processed in the computer device 1 and to display a visual user interface.

[0071] Figure 4 Only the computer device 1 having components 11-14 and a computer program is shown, and those skilled in the art will understand that Figure 4 The structure shown does not constitute a limitation on the computer device 1, and may include fewer or more components than shown in the figure, or combine certain components, or arrange the components differently.

[0072] The present invention also provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the above-mentioned Figure 1 The steps in the method embodiment shown are, for example, Figure 1 Alternatively, when the processor executes the computer program, the functions of the modules or units in the above-mentioned device embodiments are realized.

[0073] In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be an indirect coupling or communication connection through some interfaces, devices or units, which can be electrical, mechanical or other forms.

[0074] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0075] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of software functional units.

[0076] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention is essentially or the part that contributes to the prior art or all or part of the technical solution can be embodied in the form of a software product. The computer software product is stored in a storage medium, including several instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), disk or optical disk and other media that can store program codes.

[0077] As described above, the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features thereof may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A laser direct writing image detection method, characterized in that: Applied to a laser array movable in horizontal and vertical directions, the method comprises: Arrange multiple groups of non-repetitive binary images in a horizontal direction to form an image sequence, and perform a binary process on the image sequence to obtain the position of the laser exposure point; During the process of synchronously scanning the multiple pixel rows on the photosensitive coating by the multiple lasers in the laser array, each laser is controlled by a synchronous switch instruction to expose the mapping position of the exposure point in the image sequence on the photosensitive coating, so as to form a latent image of the image sequence in the respective scanning area of ​​each laser; After the photosensitive coating is developed to form multiple developed image sequences corresponding to the multiple image sequences, if the multiple developed image sequences are not aligned in the horizontal direction starting from the target binary images of the same order, the coordinate values ​​of the difference points of the target binary images in each of the developed image sequences are detected in the horizontal direction.

2. The method according to claim 1, characterized in that The step of controlling each laser to expose the mapping position of the exposure point in the image sequence on the photosensitive coating with a synchronous switch instruction includes: Controlling each laser to expose the scanning area at a mapping position of an exposure point in an image sequence on the photosensitive coating; Alternatively, each laser is controlled to sequentially expose the mapping position of the exposure points in the multiple image sequences in the scanning area on the photosensitive coating.

3. The method according to claim 1 or 2, characterized in that: The binary image in the image sequence is composed of pattern units corresponding to non-repeating four-bit binary numbers, wherein the binary number 0 and the binary number 1 correspond to different pattern units respectively.

4. The method according to claim 1 or 2, characterized in that: The method further comprises: An identification image for identifying image sequences at different positions is arranged between two adjacent image sequences, and the pixel row where each identification image is located does not overlap with the pixel row where the adjacent image sequence is located.

5. The method according to claim 4, characterized in that The coordinate values ​​of the logo image in the horizontal direction are distributed in an arithmetic progression.

6. A laser direct writing image detection system, characterized in that: Applications for laser arrays that can be moved in horizontal and vertical directions, including: A first setting module is used to arrange a plurality of groups of non-repetitive binary images in a horizontal order to form an image sequence, and to perform a binary process on the image sequence to obtain the position of the laser exposure point; a control module, which controls each laser to expose the mapping position of the exposure point in the image sequence on the photosensitive coating layer with a synchronized switch instruction during the synchronized scanning of the multiple pixel rows on the photosensitive coating layer by the multiple lasers in the laser array, so as to form a latent image of the image sequence in the respective scanning area of ​​each laser; A detection module, after the photosensitive coating is developed to form multiple developed image sequences corresponding to the multiple image sequences, if the multiple developed image sequences are not aligned in the horizontal direction starting from the target binary images of the same order, then detects the coordinate values ​​of the difference points of the target binary images in each of the developed image sequences in the horizontal direction.

7. The system according to claim 6, characterized in that The control module comprises: A first control unit controls each laser to expose a mapping position of an exposure point in an image sequence in a scanning area on the photosensitive coating; Alternatively, the second control unit controls each laser to sequentially expose the mapping position of the exposure point in the multiple image sequences in the scanning area on the photosensitive coating.

8. The system according to claim 6 or 7, characterized in that: Also includes: The second setting module sets an identification image for identifying image sequences at different positions between two adjacent image sequences, and the pixel row where each identification image is located does not overlap with the pixel row where the adjacent image sequence is located.

9. A computer device, characterized in that: The computer device comprises a processor, and the processor is configured to implement the method according to any one of claims 1 to 5 when executing a computer program stored in a memory.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the method according to any one of claims 1 to 5 is implemented.

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