Morphology compensation type three-optical-axis linear displacement laser interferometer calibration method and device
A laser interferometer and laser interferometry technology, applied in the direction of optical devices, measuring devices, instruments, etc., can solve the inconsistency of influence, large Abbe error, and the inability to determine whether the interference mirror group and the measuring mirror belong to the standard laser interferometer components or It belongs to the problem of being calibrated to achieve the effect of ensuring accuracy and small Abbe error
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0027] The specific embodiments of the present invention will be described in further detail below in conjunction with the accompanying drawings.
[0028] A shape-compensated three-optical axis displacement laser interferometer calibration device, comprising a standard laser interferometer laser 1 and three receivers 7 arranged at positions that can respectively receive interference signals corresponding to three parallel standard measuring beams 3, 4, and 5 , 8, 9, wires connect the three receivers 7, 8, and 9 to the standard laser interferometer signal processing system 10; the standard laser interferometer laser 1 output optical path is equipped with a middle through hole 14 to allow the laser to be calibrated The three-axis hollow standard laser interferometer group 2 through which the interferometer measurement beam 13 passes; the three-axis hollow standard laser interferometer group 2 is equipped with a guide rail 19 on one side, and the moving table 18 is installed on the g...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap