Morphology compensation type three-optical-axis linear displacement laser interferometer calibration method and device
A laser interferometer and laser interferometry technology, applied in the direction of optical devices, measuring devices, instruments, etc., can solve the inconsistency of influence, large Abbe error, and the inability to determine whether the interference mirror group and the measuring mirror belong to the standard laser interferometer components or It belongs to the problem of being calibrated to achieve the effect of ensuring accuracy and small Abbe error
A laser interferometer and laser interferometry technology, applied in the direction of optical devices, measuring devices, instruments, etc., can solve the inconsistency of influence, large Abbe error, and the inability to determine whether the interference mirror group and the measuring mirror belong to the standard laser interferometer components or It belongs to the problem of being calibrated to achieve the effect of ensuring accuracy and small Abbe error
CN103528526AActive Publication Date: 2014-01-22HARBIN INST OF TECH
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[0027] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0028] A shape-compensated three-axis axis displacement laser interferometer calibration device, including a standard laser interferometer laser 1 and three receivers 7 arranged at positions that can respectively receive interference signals corresponding to three parallel standard measurement beams 3, 4, and 5 , 8, 9, the wires connect the three receivers 7, 8, 9 with the standard laser interferometer signal processing system 10 respectively; on the output optical path of the standard laser interferometer laser 1, the middle through hole 14 is configured to allow the calibrated laser The three-axis hollow standard laser interferometer group 2 through which the interferometer measurement beam 13 passes; the guide rail 19 is arranged on one side of the three-axis hollow standard laser interferometer group 2, and the moving table 18 i...
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The invention discloses a morphology compensation type three-optical-axis linear displacement laser interferometer calibration method and device, and belongs to the technical field of laser measurement. A calibrated laser interferometer measurement light beam is caused to pass through a middle through hole of a three-axis hollow laser interferoscope group and is arranged on the center position of three parallel standard measurement light beams distributed in a regular triangular prism side edge mode in parallel; in a plane vertical to the three standard measurement light beams, the difference of the environment interference degree between the three standard measurement light beams and the calibrated laser interferometer measurement light beam is small in an equilateral triangle area formed by the projection points of the three standard measurement light beams in the plane; the air refractive index average value of the three standard measurement light beams is approximate to the air refractive index value of the calibrated laser interferometer measurement light beam; a measurement error caused by the surface morphology of a target reflecting mirror reflecting surface is compensated into a linear displacement measurement result to guarantee the accuracy of a linear displacement measurement value.
Description
technical field [0001] The invention belongs to the technical field of laser measurement, and mainly relates to a laser interferometer calibration method and device. Background technique [0002] Laser interferometry linear displacement technology is a standard measurement technology with high precision. It is widely used in precision and ultra-precision machining, microelectronics equipment, nanotechnology industrial equipment and national defense equipment. In order to ensure the accuracy of laser interferometer measurement of linear displacement , requires a scientific and effective linear displacement laser interferometer calibration method and device. The general idea of calibrating a linear displacement laser interferometer is to use a linear displacement laser interferometer with a higher level of precision for calibration. When the accuracy of the two is similar, it is called comparison. In the actual calibration work, most of the linear displacement laser interfe...
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Patent Timeline
22 Jan 2014
Publication
CN103528526A
- IPC
- G01B11/02
- Inventors
- 谭久彬; 胡鹏程