Machining and detecting device and method for large-aperture aspheric contour

A contour processing and aspheric technology, which is used in metal processing equipment, manufacturing tools, control of workpiece feed movement, etc., can solve the problem of difficult to adapt to the measurement requirements of large-diameter aspheric components, and does not fully utilize the compensability of spatial reference motion errors. , processing efficiency, low handling risks, etc., to achieve the effects of small deformation, short movement range, and improved processing efficiency and accuracy

Active Publication Date: 2017-03-22
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0009] 1) Processing and testing are relatively independent. Large-caliber (diameter above Ф400mm) aspheric components are repeatedly clamped back and forth between the processing equipment and the testing equipment, which consumes a lot of time for repeated assembly and alignment, and the processing efficiency is low and there is a problem of handling risk, etc.;
[0010] 2) During the milling and fine grinding stages of large-diameter aspheric components, due to the influence of surface scattering, it is difficult to use high-precision interferome

Method used

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  • Machining and detecting device and method for large-aperture aspheric contour
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  • Machining and detecting device and method for large-aperture aspheric contour

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Example Embodiment

[0046] Example 1

[0047] Such as figure 1 As shown, the contour processing and detection method for large-diameter aspheric elements, the detection processing steps are as follows:

[0048] The aspherical element 10 is placed on the precision air-floating rotary table 3, and the sensor measuring system 5 is fixed on the transverse measuring arm 9 connected with the shaft sleeve 8 of the precision linear air-floating guide system 2, and can be used as a shaft sleeve 8 During the measurement process, it is necessary to ensure that the movement direction of the sensing measurement system 5 and the precision linear air bearing guide system 2 is perpendicular, and the sensing measurement system 5 performs one-dimensional linear movement along the generatrix direction 15 of the aspherical element 10 to complete one time One-dimensional scanning measurement.

[0049] Such as figure 2 As shown, along the direction of the generatrix 15, the sensor measurement system 5 is used to scan and m...

Example Embodiment

[0053] Example 2

[0054] Combine figure 1 with image 3 As shown, the large-caliber aspheric surface processing detection device is mainly composed of a base 1, a precision linear air bearing guide system 2, a precision air bearing rotary table 3, a linear air bearing guide system movement error laser monitoring system 4, an air bearing table adjustment system 11. Measuring sensor system 5, polishing articulated arm 7, computer polishing measurement control system 12, etc., precision linear air bearing guide system 2, linear air bearing guide system motion error laser monitoring system 4, researching and throwing articulated arm 7 distribution Around the precision air-floating rotary table 3, they are all fixed on the base 1. Among them, the sensing measurement system 5 is fixed on the transverse measurement arm 9 connected to the shaft sleeve 8 of the precision linear air bearing guide system 2, and can make a one-dimensional linear movement with the shaft sleeve 8; the radial...

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Abstract

The invention belongs to the technical field of optical precision test and precision machining, and relates to a machining and detecting device and method for a large-aperture aspheric surface, which can be used for detecting and machining the surface shape of a large-sized high-precision aspheric element in a precise optical system. According to the invention, based on technologies such as a straight-line/rotating benchmark technology, the high-precision machining and detection of a large-sized aspheric element, which are based on a precise air-floatation rotation center and integrate machining and detecting functions, are realized by combining the functions of machining equipment and detecting equipment. According to the invention, a workpiece is polished repeatedly by a polishing joint arm according to set technological machining parameters, then contour parameters of a polished working surface are directly detected by a sensing measurement system on a measuring arm, and a computer measurement control system determines the machining path and polishing quantity of the polishing joint arm according to detected contour data, so that the machining efficiency and precision of the large-aperture aspheric element are improved.

Description

technical field [0001] The invention belongs to the technical fields of optical precision testing and precision machining, and relates to a large-diameter precision aspheric surface processing detection device and a method thereof, which can be used for detection and processing of large-scale high-precision aspheric element surface shapes in precision optical systems. [0002] technical background [0003] Large-aperture high-precision aspheric optical components play an extremely important role in precision optical systems such as aerospace cameras and astronomical telescopes. In aspheric surface processing, in order to meet the design requirements of aspheric surface shape and roughness, it generally adopts manufacturing processes such as processing-inspection-reprocessing-reinspection. To a certain extent, the key to obtaining high-precision aspheric components It lies in whether reliable and effective detection technology can be provided to guide the processing, especiall...

Claims

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Application Information

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IPC IPC(8): B24B13/06B24B49/12B24B49/04
CPCB24B13/06B24B49/04B24B49/12
Inventor 赵维谦邱丽荣马飞
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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