Machining and detecting device and method for large-aperture aspheric contour

Abstract

The invention belongs to the technical field of optical precision test and precision machining, and relates to a machining and detecting device and method for a large-aperture aspheric surface, which can be used for detecting and machining the surface shape of a large-sized high-precision aspheric element in a precise optical system. According to the invention, based on technologies such as a straight-line / rotating benchmark technology, the high-precision machining and detection of a large-sized aspheric element, which are based on a precise air-floatation rotation center and integrate machining and detecting functions, are realized by combining the functions of machining equipment and detecting equipment. According to the invention, a workpiece is polished repeatedly by a polishing joint arm according to set technological machining parameters, then contour parameters of a polished working surface are directly detected by a sensing measurement system on a measuring arm, and a computer measurement control system determines the machining path and polishing quantity of the polishing joint arm according to detected contour data, so that the machining efficiency and precision of the large-aperture aspheric element are improved.

Description

technical field [0001] The invention belongs to the technical fields of optical precision testing and precision machining, and relates to a large-diameter precision aspheric surface processing detection device and a method thereof, which can be used for detection and processing of large-scale high-precision aspheric element surface shapes in precision optical systems. [0002] technical background [0003] Large-aperture high-precision aspheric optical components play an extremely important role in precision optical systems such as aerospace cameras and astronomical telescopes. In aspheric surface processing, in order to meet the design requirements of aspheric surface shape and roughness, it generally adopts manufacturing processes such as processing-inspection-reprocessing-reinspection. To a certain extent, the key to obtaining high-precision aspheric components It lies in whether reliable and effective detection technology can be provided to guide the processing, especiall...

AI Technical Summary

Problems solved by technology

[0009] 1) Processing and testing are relatively independent. Large-caliber (diameter above Ф400mm) aspheric components are repeatedly clamped back and forth between the processing equipment and the testing equipment, which consumes a lot of time for repeated assembly and alignment, and the processing efficiency is low and there is a problem of handling risk, etc.;

[0010] 2) During the milling and fine grinding stages of large-diameter aspheric components, due to the influence of surface scattering, it is difficult to use high-precision interferometric methods to measure directly. Due to the limitation of accuracy, it has become difficult to meet the measurement requirements of large-aperture aspheric components with increasing caliber

[0011] 3) The measurement accuracy of the existing aspheric surface profile measuring instrument is mainly limited by the rotation accuracy of the spindle, the accuracy of the linear guide rail, the position error between the references and the sensing technology, etc., and the compensability of the motion error of the spatial reference is not fully utilized.

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