Method and device for calibrating optically biaxial compensation and gas bath type linear displacement laser interferometer

A laser interferometer and laser interferometry technology, which is applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problem of large Abbe errors, inconsistent effects, and the inability to determine whether the interference mirror group and the measuring mirror belong to the standard laser interferometer components or It belongs to the problem of being calibrated to achieve the effect of small Abbe error and guaranteed accuracy

CN103499285AActive Publication Date: 2014-01-08HARBIN INST OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2014-01-08

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Abstract

The invention relates to a method and a device for calibrating an optically biaxial compensation and gas bath type linear displacement laser interferometer and belongs to the technical field of laser measurement. According to the invention, a measurement beam of the calibrated laser interferometer passes through a middle through hole of a biaxial hollow laser interference mirror set and the measurement beam of the calibrated laser interferometer is placed in parallel at the middle position between two parallel standard measurement beams; vertical distances between the standard measurement beams and the measurement beam of the calibrated laser interferometer are very small and the average value of the air refractive indexes of the two standard measurement beams is approximate to the value of the air refractive index of the measurement beam of the calibrated laser interferometer; a stable gas bath environment formed by a gas bath device enables the air temperature, the humidity and the air pressure to be approximately and uniformly distributed and enables the average value of the air refractive indexes of the two standard measurement beams to be more approximate to the value of the air refractive index of the measurement beam of the calibrated laser interferometer; and a measurement error caused by the surface morphology of the reflecting surface of a target reflector is compensated into a linear displacement measurement result so as to ensure accuracy of the linear displacement measurement value.
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Description

technical field

[0001] The invention belongs to the technical field of laser measurement, and mainly relates to a laser interferometer calibration method and device. Background technique

[0002] Laser interferometry linear displacement technology is a standard measurement technology with high precision. It is widely used in precision and ultra-precision machining, microelectronics equipment, nanotechnology industrial equipment and national defense equipment. In order to ensure the accuracy of laser interferometer measurement of linear displacement , requires a scientific and effective linear displacement laser interferometer calibration method and device. The general idea of ​​calibrating a linear displacement laser interferometer is to use a linear displacement laser interferometer with a higher level of precision for calibration. When the accuracy of the two is similar, it is called comparison. In the actual calibration work, most of the linear displacement laser interfe...

Examples

Embodiment Construction

[0029] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0030] A dual-optical axis compensation and air bath linear displacement laser interferometer calibration device, including a standard laser interferometer laser 1 and two receivers 6 and 7 arranged at positions capable of receiving standard laser interferometer interference signals, the wires connect the two The two receivers 6 and 7 are respectively connected to the standard laser interferometer signal processing system 8; the output optical path of the standard laser interferometer laser 1 is equipped with a dual-axis through-hole 12 that allows the calibrated laser interferometer measurement beam 11 to pass through Hollow standard laser interference mirror group 2; guide rail 17 is arranged on one side of biaxial hollow standard laser interference mirror group 2, and the moving table 16 is fitted on the guiding rail 17, and the ...