Large-dip-angle free-form surface measuring method and device based on reference plane comparison measurement
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A technology for comparing measurement and datum planes, applied in measurement devices, mechanical measurement devices, and optical devices, etc., it can solve the problems of surface roughness, undulation, and inclination of the measurement accuracy of the sample, so as to improve the measurable range and reduce the Effects of Bay Error
Active Publication Date: 2020-04-03
BEIJING INSTITUTE OF TECHNOLOGYGY
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[0007] To sum up, the measurement accuracy of the existing measurement methods is greatly affected by the differences in the characteristics of the sample surface such as roughness, undulation, and inclination angle, which is the main technical bottleneck for improving the measurement accuracy of the free-form surface profile.
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Embodiment 1
[0038] Such as figure 1 As shown, a large-inclination free-form surface measurement device based on the comparison measurement of the reference plane, including: active air-flotation isolation spring 1, air-flotation isolation base 2, X-direction air-flotation guide rail 3, gantry frame 4, the first nanometer Precision height measurement sensor 5, first flat crystal 6, second nanometer precision height measurement sensor 7, third nanometer precision height measurement sensor 8, Z direction air bearing guide rail 9, Y direction air bearing guide rail 10, air bearing shaft 11, The second flat crystal 12 , the fourth nanometer precision height measuring sensor 13 , the truss 14 , the reference flat crystal attitude adjustment device 15 , the third flat crystal 16 , and the support frame 17 .
[0039] The connection and positional relationship of the above components are:
[0040] The air flotation isolation base 2 is installed on the active air flotation isolation spring 1; the ...
Embodiment 2
[0048] Such as figure 2 As shown, a large-inclination free-form surface measurement device based on the comparison measurement of the reference plane, including: active air-flotation isolation spring 1, air-flotation isolation base 2, X-direction air-flotation guide rail 3, gantry frame 4, the first nanometer Precision height measurement sensor 5, first flat crystal 6, second nanometer precision height measurement sensor 7, third nanometer precision height measurement sensor 8, Z direction air bearing guide rail 9, Y direction air bearing guide rail 10, air bearing shaft 11, The second flat crystal 12 , the fourth nanometer precision height measuring sensor 13 , the truss 14 , the reference flat crystal attitude adjustment device 15 , the third flat crystal 16 , and the support frame 17 .
[0049] The connection and positional relationship of the above components are:
[0050] The air flotation isolation base 2 is installed on the active air flotation isolation spring 1; the...
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Abstract
The invention discloses a large-dip-angle free-form surface measurement method and device based on reference plane comparison measurement, and belongs to the technical field of optical precision detection. A high-precision horizontal plane optical flat is used as the reference standard of an X-Y plane so that the straightness errors of the two guide rails in the height direction are removed. Meanwhile the plane optical plane is used for monitoring the transverse micro-displacement of the X guide rail and the Y guide rail so that the transverse straightness errors of the two guide rails are removed. A sensor for monitoring a reference plane and a sensor for measuring height information of a free-form surface are coaxially mounted, so that abbe errors caused by inclination of a guide rail and a truss are reduced; straightness errors of the X-direction air floatation guide rail and the Y-direction air floatation guide rail are compensated through the reference datum plane, and dimension reduction error separation of free-form surface high-precision measurement is achieved. The nano-precision free-form surface sensor provides a high-precision three-dimensional linear positioning and scanning measurement means for free-form surface detection by utilizing an air floatation rotating shaft to widen the test range and combining a macro-micro cross-scale nano-precision undisturbed driving and positioning method of a residual air recovery type air floatation guide rail.
Description
technical field [0001] The invention relates to a high-precision detection method and device for large-angle free-form surfaces, which are used for nano-precision detection of free-form surfaces in precision optical systems, and belong to the technical field of optical precision detection. [0002] technical background [0003] The free-form surface element has the largest degree of freedom in surface morphology, and it is easy to eliminate aberrations in the imaging system. advantages such as sex. Using a free-form surface optical system to replace the previous optical system composed of a plane, a spherical mirror, and a coaxial quadratic mirror to improve imaging quality, reduce system volume and weight, and solve imaging accuracy, portability, and reliability issues has been achieved. It has become an important trend in the development of optical systems. [0004] However, while the freeform surface increases the degree of freedom in design, it puts forward higher requi...
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