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Method and device for measuring free-form surface with large inclination angle based on comparative measurement of reference plane

A technology of comparative measurement and reference plane, which is applied in the direction of measuring devices, mechanical measuring devices, and mechanical devices, etc., can solve the problems of surface roughness, fluctuations, and inclination angles of measurement accuracy samples, so as to improve the measurable range and accuracy , the effect of reducing the Abbe error

Active Publication Date: 2022-02-11
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] To sum up, the measurement accuracy of the existing measurement methods is greatly affected by the differences in the characteristics of the sample surface such as roughness, undulation, and inclination angle, which is the main technical bottleneck for improving the measurement accuracy of the free-form surface profile.

Method used

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  • Method and device for measuring free-form surface with large inclination angle based on comparative measurement of reference plane
  • Method and device for measuring free-form surface with large inclination angle based on comparative measurement of reference plane
  • Method and device for measuring free-form surface with large inclination angle based on comparative measurement of reference plane

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] like figure 1 As shown, a large-inclination free-form surface measurement device based on the comparison measurement of the reference plane, including: active air-flotation isolation spring 1, air-flotation isolation base 2, X-direction air-flotation guide rail 3, gantry frame 4, the first nanometer Precision height measurement sensor 5, first flat crystal 6, second nanometer precision height measurement sensor 7, third nanometer precision height measurement sensor 8, Z direction air bearing guide rail 9, Y direction air bearing guide rail 10, air bearing shaft 11, The second flat crystal 12 , the fourth nanometer precision height measuring sensor 13 , the truss 14 , the reference flat crystal attitude adjustment device 15 , the third flat crystal 16 , and the support frame 17 .

[0039] The connection and positional relationship of the above components are:

[0040] The air flotation isolation base 2 is installed on the active air flotation isolation spring 1; the X-d...

Embodiment 2

[0048] like figure 2 As shown, a large-inclination free-form surface measurement device based on the comparison measurement of the reference plane, including: active air-flotation isolation spring 1, air-flotation isolation base 2, X-direction air-flotation guide rail 3, gantry frame 4, the first nanometer Precision height measurement sensor 5, first flat crystal 6, second nanometer precision height measurement sensor 7, third nanometer precision height measurement sensor 8, Z direction air bearing guide rail 9, Y direction air bearing guide rail 10, air bearing shaft 11, The second flat crystal 12 , the fourth nanometer precision height measuring sensor 13 , the truss 14 , the reference flat crystal attitude adjustment device 15 , the third flat crystal 16 , and the support frame 17 .

[0049] The connection and positional relationship of the above components are:

[0050] The air flotation isolation base 2 is installed on the active air flotation isolation spring 1; the X-...

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Abstract

The invention discloses a method and device for measuring a free-form surface with a large inclination angle based on comparative measurement of a reference plane, and belongs to the technical field of optical precision detection. The present invention uses a high-precision horizontal flat crystal as the reference reference of the X-Y plane to remove the straightness error in the height direction of the two guide rails. straightness error. The sensor for monitoring the datum plane and the sensor for measuring the height information of the free-form surface are coaxially installed to reduce the Abbe error caused by the inclination of the guide rail and the truss; the straightness error of the X-direction and Y-direction air bearing guide rail is compensated by referring to the datum plane to realize the freedom Dimensionality reduction error separation for high precision measurement of curved surfaces. Nano-precision free-form surface sensor, using the air-floating shaft to increase the test range, combined with the macro-micro-scale nano-precision non-disturbance driving and positioning method of the residual air recovery air-floating guide rail, provides high-precision three-dimensional linear positioning and positioning for free-form surface detection Scanning means of measurement.

Description

technical field [0001] The invention relates to a high-precision detection method and device for large-angle free-form surfaces, which are used for nano-precision detection of free-form surfaces in precision optical systems, and belong to the technical field of optical precision detection. [0002] technical background [0003] The free-form surface element has the largest degree of freedom in surface morphology, and it is easy to eliminate aberrations in the imaging system. advantages such as sex. Using a free-form surface optical system to replace the previous optical system composed of a plane, a spherical mirror, and a coaxial quadratic mirror to improve imaging quality, reduce system volume and weight, and solve imaging accuracy, portability, and reliability issues has been achieved. It has become an important trend in the development of optical systems. [0004] However, while the freeform surface increases the degree of freedom in design, it puts forward higher requi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24G01B5/00
CPCG01B11/24G01B5/0002
Inventor 邱丽荣唐顺赵维谦
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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