Linear displacement laser interferometer calibrating method and device based on four-standard light-axis gas bath
A laser interferometer and laser interference technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of large Abbe error, inconsistent optical path influence, inaccurate calibration measurement results, etc., and achieve the effect of small Abbe error
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[0027] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0028]A linear displacement laser interferometer calibration device based on a four-standard optical axis gas bath, including a standard laser interferometer laser 1 and four receivers 8, 9, 19, 11 arranged at positions capable of receiving standard laser interferometer interference signals , the wires connect the four receivers 8, 9, 10, 11 to the standard laser interferometer signal processing system 12 respectively; on the output optical path of the standard laser interferometer laser 1, an intermediate through hole 16 is arranged to allow the calibrated laser interferometer The four-axis hollow standard laser interference mirror group 2 through which the measuring beam 15 passes; a guide rail 21 is arranged on one side of the four-axis hollow standard laser interference mirror group 2, and the moving table 20 is fitted on the gu...
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