Calibration method and device for three-optical-axis return and air bath linear displacement laser interferometer

Abstract

The invention discloses a calibration method and device for a three-optical-axis return and air bath linear displacement laser interferometer, and belongs to a laser measuring technology. Measuring light beams of a calibrated laser interferometer pass through a middle through hole of a three-axis hollow laser interferoscope group, and is placed in parallel at the central position of three parallel standard measuring light beams distributed in the form of lateral edges a regular triangular prism; the vertical distances between the standard measuring light beams and the measuring light beams of the calibrated laser interferometer are small; the average value of the air refractive indexes of the three parallel standard measuring light beams is close to the air refractive index values of the measuring light beams of the calibrated laser interferometer; in a stable air bath environment formed by an air bath device, the average value of the air refractive indexes of the three parallel standard measuring light beams is closer to the air refractive index values of the measuring light beams of the calibrated laser interferometer; a micro-inching device is used for measuring a derivation displacement average value according to three light beam position detectors to perform real-time return complementation on a target reflecting mirror, so that the incidence positions of measuring light beams on the reflecting surface of the target reflecting mirror are kept constant.

Description

technical field [0001] The invention belongs to the technical field of laser measurement, and mainly relates to a laser interferometer calibration method and device. Background technique [0002] Laser interferometry linear displacement technology is a standard measurement technology with high precision. It is widely used in precision and ultra-precision machining, microelectronics equipment, nanotechnology industrial equipment and national defense equipment. In order to ensure the accuracy of laser interferometer measurement of linear displacement , requires a scientific and effective linear displacement laser interferometer calibration method and device. The general idea of ​​calibrating a linear displacement laser interferometer is to use a linear displacement laser interferometer with a higher level of precision for calibration. When the accuracy of the two is similar, it is called comparison. In the actual calibration work, most of the linear displacement laser interfe...

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Problems solved by technology

Since the two sets of laser interferometers are placed in parallel, the two paths of light are similarly affected by the environment, and the refractive index of air has little influence on the two paths of light. Big error

[0004] figure 2 It is a schematic diagram of the face-to-face laser interferometer calibration device. The standard measuring mirror and the calibrated measuring mirror are installed on the moving platform face to face. The advantage is that the measuring beam axes of the two sets of laser interferometers can be adjusted to almost the same measuring axis. The Abbe error is very small. The disadvantage is that the near end of one interferometer is the far end of the other.

[0005] In 2011, the National Institute of Metrology established the first 80-meter long-length laser interferometer measurement device in China (Leng Yuguo, Tao Lei, Xu Jian. Analysis of the accuracy and influencing factors of the dual-frequency laser interferometer system based on the 80-meter measurement device. Metrology and Testing Technology, 2011, 38(9): 47-49), the standard device used is to place three Agilent5530 long-distance dual-frequency laser interferometers in parallel to form a three-way laser interferometer, and the calibrated laser interferometer The instrument is placed between them for calibration and calibration. This scheme is a derivative of the parallel calibration method, and since three-way light is used for simultaneous measurement, it can compensate for the Abbe error during measurement. However, since three lasers are placed in parallel Therefore, the spatial position of the three-way standard measurement light is relatively far away, and the distance between the measurement light of the calibrated laser interferometer and each standard measurement light is also relatively long. All measurement light paths are affected by the environment differently, and the air refractive index has inconsistent effects on all measurement light paths. , resulting in inaccurate calibration measurements

Since the two sets of laser interferometers share one interferometer group and measuring mirror, it is impossible to determine whether the shared interferometer group and measuring mirror belong to the standard laser interferometer part or the calibrated standard laser interferometer part. Therefore, it is not exactly two sets Calibration of the laser interferometer for calibration

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