Linear displacement laser interferometer calibration method and device based on three-standard-optical-axis air bath
A technology of laser interferometer and laser interference, which is applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of large Abbe error, unequal optical path, and inconsistent influence, etc., and achieve the effect of small Abbe error
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[0027] The specific embodiments of the present invention will be described in further detail below in conjunction with the accompanying drawings.
[0028] A linear displacement laser interferometer calibration device based on a three-standard optical axis gas bath. It includes a standard laser interferometer laser 1 and three laser interferometers configured to receive the interference signal positions corresponding to three parallel standard measuring beams 3, 4, and 5 respectively. Receivers 7, 8, 9, and wires connect the three receivers 7, 8, and 9 to the standard laser interferometer signal processing system 10; the output optical path of the standard laser interferometer laser 1 is equipped with a middle through hole 14 to allow The three-axis hollow standard laser interferometer group 2 passed through by the calibrated laser interferometer measuring beam 13; the three-axis hollow standard laser interferometer group 2 is equipped with a guide rail 19 on one side, and the movi...
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