Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Method and device for calibrating return compensation type four-optical-axis linear displacement laser interferometer

A laser interferometer, laser interference technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problem of large Abbe error and inability to determine whether the interferometric mirror group and the measuring mirror belong to standard laser interferometer components or to be calibrated , inconsistency of influence, etc., to achieve the effect of small Abbe error

Active Publication Date: 2014-01-22
HARBIN INST OF TECH
View PDF2 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the two sets of laser interferometers are placed in parallel, the two paths of light are similarly affected by the environment, and the refractive index of air has little influence on the two paths of light. Big error
[0004] figure 2 It is a schematic diagram of the face-to-face laser interferometer calibration device. The standard measuring mirror and the calibrated measuring mirror are installed on the moving platform face to face. The advantage is that the measuring beam axes of the two sets of laser interferometers can be adjusted to almost the same measuring axis. The Abbe error is very small. The disadvantage is that the near end of one interferometer is the far end of the other.
[0005] In 2011, the National Institute of Metrology established the first 80-meter long-length laser interferometer measurement device in China (Leng Yuguo, Tao Lei, Xu Jian. Analysis of the accuracy and influencing factors of the dual-frequency laser interferometer system based on the 80-meter measurement device. Metrology and Testing Technology, 2011, 38(9): 47-49), the standard device used is to place three Agilent5530 long-distance dual-frequency laser interferometers in parallel to form a three-way laser interferometer, and the calibrated laser interferometer The instrument is placed between them for calibration and calibration. This scheme is a derivative of the parallel calibration method, and since three-way light is used for simultaneous measurement, it can compensate for the Abbe error during measurement. However, since three lasers are placed in parallel Therefore, the spatial position of the three-way standard measurement light is relatively far away, and the distance between the measurement light of the calibrated laser interferometer and each standard measurement light is also relatively long. All measurement light paths are affected by the environment differently, and the air refractive index has inconsistent effects on all measurement light paths. , resulting in inaccurate calibration measurements
Since the two sets of laser interferometers share one interferometer group and measuring mirror, it is impossible to determine whether the shared interferometer group and measuring mirror belong to the standard laser interferometer part or the calibrated standard laser interferometer part. Therefore, it is not exactly two sets Calibration of the laser interferometer for calibration

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method and device for calibrating return compensation type four-optical-axis linear displacement laser interferometer
  • Method and device for calibrating return compensation type four-optical-axis linear displacement laser interferometer
  • Method and device for calibrating return compensation type four-optical-axis linear displacement laser interferometer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0027] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0028] A return compensation type four optical axis displacement laser interferometer calibration device, including a standard laser interferometer laser 1 and four receivers 8, 9, 10, 11 arranged at positions that can receive the interference signal of the standard laser interferometer, and wires Connect the four receivers 8, 9, 10, 11 to the standard laser interferometer signal processing system 12 respectively; on the output optical path of the standard laser interferometer laser 1, an intermediate through hole 16 is arranged to allow the calibrated laser interferometer to measure the light beam 15 passes through the four-axis hollow standard laser interference mirror group 2; one side of the four-axis hollow standard laser interference mirror group 2 is equipped with a guide rail 22, and the moving table 21 is fitted on the guid...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A method and a device for calibrating a return compensation type four-optical-axis linear displacement laser interferometer belong to the technical field of laser measurement. The measurement light beams of the calibrated laser interferometer penetrate through a middle through hole of a four-axis hollow laser interferoscope group; the measurement light beams of the calibrated laser interferometer are arranged in the central positions of four parallel standard measurement light beams which are distributed in the form of the lateral edges of a right square prism in parallel; the perpendicular distance between the standard measurement light beams and the measurement light beams of the calibrated laser interferometer is very small, and the air refractive index of the standard measurement light beams is extremely close to that of the measurement light beams of the calibrated laser interferometer; any two-dimensional derived displacements of the four standard measurement light beams relative to a target reflector in a plane which is perpendicular to the standard measurement light beams can be respectively measured by four light beam position detectors; the average value of the derived displacements is measured by a micro-motion device according to the four light beam position detectors to carry out return compensation on the derived displacements in real time, so that the incidence positions of the measurement light beams on the reflecting surface of the target reflector do not vary.

Description

technical field [0001] The invention belongs to the technical field of laser measurement, and mainly relates to a laser interferometer calibration method and device. Background technique [0002] Laser interferometry linear displacement technology is a standard measurement technology with high precision. It is widely used in precision and ultra-precision machining, microelectronics equipment, nanotechnology industrial equipment and national defense equipment. In order to ensure the accuracy of laser interferometer measurement of linear displacement , requires a scientific and effective linear displacement laser interferometer calibration method and device. The general idea of ​​calibrating a linear displacement laser interferometer is to use a linear displacement laser interferometer with a higher level of precision for calibration. When the accuracy of the two is similar, it is called comparison. In the actual calibration work, most of the linear displacement laser interfe...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02G01B11/02
Inventor 胡鹏程谭久彬
Owner HARBIN INST OF TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products