Method and device for calibrating return compensation type four-optical-axis linear displacement laser interferometer
A laser interferometer, laser interference technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problem of large Abbe error and inability to determine whether the interferometric mirror group and the measuring mirror belong to standard laser interferometer components or to be calibrated , inconsistency of influence, etc., to achieve the effect of small Abbe error
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[0027] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0028] A return compensation type four optical axis displacement laser interferometer calibration device, including a standard laser interferometer laser 1 and four receivers 8, 9, 10, 11 arranged at positions that can receive the interference signal of the standard laser interferometer, and wires Connect the four receivers 8, 9, 10, 11 to the standard laser interferometer signal processing system 12 respectively; on the output optical path of the standard laser interferometer laser 1, an intermediate through hole 16 is arranged to allow the calibrated laser interferometer to measure the light beam 15 passes through the four-axis hollow standard laser interference mirror group 2; one side of the four-axis hollow standard laser interference mirror group 2 is equipped with a guide rail 22, and the moving table 21 is fitted on the guid...
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