Linear displacement laser interferometer calibration method and device based on two-standard-optical-axis air bath
A laser interferometer and laser interferometry technology, applied in the direction of optical devices, measuring devices, instruments, etc., can solve the problem of large Abbe errors and the inability to determine whether the interference mirror group and the measuring mirror belong to the standard laser interferometer components or are calibrated , impact inconsistency and other issues, to achieve the effect of small Abbe error
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0027] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0028]A linear displacement laser interferometer calibration device based on a double-standard optical axis gas bath, including a standard laser interferometer laser 1 and two receivers 6 and 7 arranged at positions that can receive the interference signal of the standard laser interferometer, the wires connect the two The two receivers 6 and 7 are respectively connected with the signal processing system 8 of the standard laser interferometer; it is characterized in that an intermediate through hole 12 is arranged on the output optical path of the standard laser interferometer laser 1 to allow the calibrated laser interferometer measuring beam 11 to pass through The passed biaxial hollow standard laser interference mirror group 2; one side of the biaxial hollow standard laser interference mirror group 2 is equipped with a guide rail...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com