Dual-frequency laser interferometer

A dual-frequency laser interference and beam technology, which is applied in the field of laser interferometers, can solve the problems of low nonlinear error, low extinction ratio, many components, and complex structure, and achieve low nonlinear error, simple installation and adjustment, and low thermal drift error. Effect

Active Publication Date: 2009-10-28
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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Problems solved by technology

However, the structure is very complex, using many components, difficult to install and adjust, and the final nonlinear error is still affected by the low extinction ratio of the reflected light of the polarization beam splitter prism

Method used

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Embodiment Construction

[0023] In order to better understand the technical content of the present invention, specific embodiments are given together with the attached drawings for description as follows.

[0024] Please refer to Figure 4 , Figure 4 Shown is a schematic structural diagram of a dual-frequency laser interferometer according to an embodiment of the present invention.

[0025] Figure 4 In the shown dual-frequency laser interferometer structure, comprising a first polarization beam splitter prism 1, a second polarization beam splitter prism 2, a compensation mirror 3, a first corner cube prism 4, a quarter wave plate 5, a measuring mirror 6 and The second corner cube 7.

[0026] Such as Figure 4 As shown, the laser beam from the dual-frequency laser includes lasers of two frequencies f1 and f2, which are two linearly polarized lights whose polarization directions are perpendicular to each other. Among them, f2 whose polarization direction is perpendicular to the incident plane is ...

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Abstract

The invention provides a dual-frequency laser interferometer, which comprises a first polarization splitting prism, a second polarization splitting prism, a compensating mirror and a first cube-corner prism which are arranged in the reflected light direction of the first polarization splitting prism, a quarter wave plate and a reflector which are arranged in the transmitted light direction of the first polarization splitting prism, and a second cube-corner prism which is opposite to the second polarization splitting prism and arranged at the other side of the first polarization splitting prism; wherein the thickness of the compensating mirror is 2 times of that of the quarter wave plate. On one hand, the dual-frequency laser interferometer with high stability can increase the extinction ratio of the reflected light and reduce the nonlinear error in the premise of not increasing the processing difficulty of the polarization splitting prism; and on the other hand, the dual-frequency laser interferometer reduces the heat drift error to the maximum; therefore, the dual-frequency laser interferometer has the advantages of low heat drift error, low nonlinear error, simple assembling and adjusting, easy component processing and the like.

Description

technical field [0001] The invention relates to a laser interferometer, in particular to a dual-frequency laser interferometer. Background technique [0002] As an ultra-precise non-contact measuring device, the laser interferometer can perform high-speed and high-precision displacement measurement. If it is combined with different accessories, it can also measure length, speed, angle, flatness, straightness, etc. Large range, high resolution, high precision and other advantages. It has a very wide range of applications in semiconductor manufacturing, precision machine tool processing, military, aerospace, automobile manufacturing, coordinate measurement and other fields. With the continuous improvement of resolution and measurement accuracy of laser interferometers, nonlinear errors and thermal drift errors have attracted more and more attention. [0003] The non-linear error is caused by the interpenetration of the laser beams of different polarization states in the meas...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02
Inventor 张志平肖鹏飞张晓文池峰陈勇辉
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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