The invention relates to a portable multifunctional vacuum calibration
system and a method, belonging to the field of measurement technologies. The calibration
system comprises a mechanical pump 1, a molecular pump 2, a first vacuum valve 3, a second vacuum valve 4, a third vacuum valve 8, a fourth vacuum valve 10, a fifth vacuum valve 11, a sixth vacuum valve 17, a seventh vacuum valve 19, an eighth vacuum valve 23, a ninth vacuum valve 15, a calibration chamber 5, a
quadrupole mass spectrometer 6, a first
small hole 9, a second
small hole 20, a fine-adjustment valve 12, a gas source 13, a first vacuum gauge 14, a second vacuum gauge 18, a third vacuum gauge 21, a fifth vacuum gauge 24 and a pressure-stabilizing chamber 16; and the method comprises a vacuum leak calibration method and a vacuum gauge calibration method. According to the
system, the vacuum gauges and a gas micro-flow
calibration function are combined, and the vacuum gauges, vacuum leaks, leak detectors and gas micro-flowmeters can be calibrated in an on-site or on-line manner, so that the system has the characteristics of multifunction, high accuracy, little weight, small volume, portability and the like.