Calibration system and calibration method of temperature sensor chip

Abstract

The invention discloses a calibration system of a temperature sensor chip, which comprises a test board and a temperature calibration system, wherein the test panel is provided with a temperature sensor reference chip and a chip to be calibrated; and each chip is connected and communicates with the temperature calibration system through a unified digital interface. The temperature calibration system reads the temperature values of various calibration chips and reference chips through the unified digital interface; and various chips to be calibrated simultaneously acquire the data, thereby realizing synchronous acquisition and calibration of multichip data, greatly improving the acquisition efficiency of the data and reducing the test and calibration time of the chips and calibration cost. The invention has the advantages of simple structure, easy building, short calibration time, high calibration efficiency, low cost, high degree of automation and the like. The invention also discloses a calibration method of the temperature sensor chip.

Description

technical field [0001] The invention relates to a test method for a semiconductor integrated circuit, in particular to a calibration system for a temperature sensor chip, and also relates to a calibration method for the temperature sensor chip. Background technique [0002] The measurement accuracy of CMOS high-precision temperature sensors is affected by many factors such as manufacturing process deviation and packaging stress. In order to meet the precision design requirements of the chip, the temperature sensor chip after preliminary screening and packaging must be calibrated. [0003] The structure of the existing temperature sensor calibration system is as follows: figure 1 As shown, it includes a temperature calibration system and a temperature measuring instrument; the temperature calibration system is used to collect the measurement data of the chip to be calibrated, and the temperature measuring instrument is used to collect the working environment temperature data ...

AI Technical Summary

Problems solved by technology

[0005] (1) Temperature measuring instruments must be high-precision and costly;

[0006] (2) During the calibration process, it is difficult for the temperature probe of the temperature measuring instrument to be well combined with the chip to be calibrated to have the same temperature environment;

[0007] (3) The chip to be calibrated and the test probe are required to be immersed in a liquid environment. The construction of this calibration environment is more complicated, and because the liquid needs to be heated to change the calibration temperature, the calibration time is longer

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