A method for improving
measurement precision by using an acousto-optic device in optical
heterodyne interferometry belongs to the field of
measurement precision by using acousto-optic device in optical
heterodyne interferometry in precise measurement technology. In the
measurement precision by using acousto-optic device in optical
heterodyne interferometry by using the acousto-optic device, by changing the polarization direction of the part
light beam output during an acoustic-optic interaction process, for instance, by utilizing abnormal Gragg
diffraction, the polarization direction of the first-order
diffraction light with frequency converted is vertical to other light beams, particularly the polarization direction of the zero-order light with the frequency unconverted; therefore, the
crosstalk light is extremely easy to be filtered. Alternatively, the polarization direction of the reference
light beam can be adjusted so that the polarization direction of the reference light component in the
signal light beam is vertical to the polarization direction of the reference light beam, thus leading the interference
signal output by a
detector to be the minimum. In conclusion, the difference among the useful light beam, the
crosstalk light and the
noise light on the polarization direction can be caused; by utilizing the difference, the method can inhibit the effect of the interference light effectively, so as to reduce nonlinearity, improve
signal-to-
noise ratio and improve the measurement precision by magnitude.