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Method for eliminating or reducing nonlinearity errors in laser heterodyne interferometry

A laser heterodyne interference and nonlinear error technology, applied in the direction of reducing undesired effects, optics, optical components, etc., can solve problems such as difficulties, reduce adverse effects, eliminate or reduce nonlinear errors, and improve measurement accuracy. Effect

Inactive Publication Date: 2010-11-24
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

But if you want to reduce the nonlinear error by an order of magnitude, such as reducing the nonlinear error to one tenth, you need at least ten times the return optical path, and in some cases, this is difficult

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  • Method for eliminating or reducing nonlinearity errors in laser heterodyne interferometry
  • Method for eliminating or reducing nonlinearity errors in laser heterodyne interferometry
  • Method for eliminating or reducing nonlinearity errors in laser heterodyne interferometry

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Embodiment Construction

[0017] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

[0018] like figure 1 As shown, the laser light emitted by the laser 1 is divided into two beams by the first beam splitter 2, one of which continues to propagate forward along the original direction, and after frequency conversion by the acousto-optic device 3, it is divided into two beams by the second beam splitter 4, A small part of the light beam reflected by the third mirror 16 is adjusted to the required phase and amplitude after being adjusted by the second phase and amplitude adjuster 9, and meanwhile, the polarization is also adjusted to the required direction, and is incident on the The fifth beam splitter 10 .

[0019] The reflected one of the two beams divided by the first beam splitter 2 is reflected by the first reflector 14 and enters the fourth beam splitter 7, and is divided into two beams by the fourth beam splitter...

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Abstract

The invention discloses a method for eliminating or reducing nonlinearity errors in laser heterodyne interferometry, which belongs to the technical field of light heterodyne interferometry in precision measuring technology. The method comprises a step of adding new light rays after amplitude adjustment and phase adjustment into laser beams participating in interferences, wherein the new light rays has the same frequency and amplitude as those of light signals generating the nonlinearity errors, and has reverse phases with the light signals generating the nonlinearity errors so as to counteract the interferences generated by the light signals generating the nonlinearity errors to the laser heterodyne interferometry. The method has the advantages of effectively eliminating or reducing the nonlinearity errors and improving the measurement precision.

Description

technical field [0001] The invention belongs to the field of laser heterodyne interferometry in precision measurement technology, and relates to a method for eliminating or reducing nonlinear errors in the laser heterodyne interferometry. The method can also be applied to a more general wave interference process to generate a periodic signal added to the original signal that varies with the wave length. Background technique [0002] Laser heterodyne interferometry can be used to measure displacement and vibration, etc., and is one of the best precision measurement methods. This method is to convert the measured displacement into the frequency or phase change of the heterodyne signal, and then measure this change. Since the frequency of the heterodyne signal is much lower than the optical frequency, the photoelectric signal is easily subdivided by electronics. Processing, and easy to achieve a higher measurement resolution, the current method can achieve picometer (pm) or be...

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Application Information

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IPC IPC(8): G01D3/028G01D3/032G02B5/30G02B27/10
Inventor 孙强李也凡
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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