138 results about "Measuring output" patented technology

The invention provides a metering data automatic calibration method and system, and the method comprises the steps: obtaining an actual measurement output value of a target intelligent sensor for a measured physical quantity in a normal operation process of metering equipment, accessing a standard reference signal outputted by an external standard device subjected to the traceability of the quantity value, reading a pre-stored standard reference value and a standard threshold value, and carrying out the calibration of the measured physical quantity. According to the actually measured output value, the standard reference value and the standard reference signal, obtaining a standardized output value through a fitting mode; when the standardized output value exceeds a standard threshold value, switching to a calibration mode, providing forward and reverse standard input quantities by an external standard device, acquiring a response signal, and calculating a nonlinear compensation coefficient and a hysteresis correction coefficient; and updating the output correction parameter according to the compensation coefficient. By adopting the scheme of the invention, the cost constraint of different error attention in measurement data calibration can be realized, and the calibration robustness is improved.

The invention discloses a dynamic virtual impedance control method for multi-machine parallel connection of a network construction type energy storage converter, and belongs to the technical field of power electronics. The method aims to solve the problem that accurate reactive power distribution, circulating current suppression, dynamic response and voltage precision are difficult to consider in a multi-machine parallel system through fixed parameter virtual impedance. A dynamic adjustable virtual impedance module is introduced into the voltage outer loop output end of each converter, and virtual resistance and virtual inductance are calculated in real time based on locally measured output current, bus voltage change rate and adjacent machine reactive power deviation information; and the average reactive power of the system is estimated through a phase synchronization mechanism under the condition of no communication so as to realize multi-machine cooperation. According to the method, the reactive power distribution error is less than 5%, the bus voltage drop is less than 3%, the high-frequency circulating current is controlled within 5% of the rated current under all working conditions, and the dynamic performance and robustness of the system are remarkably improved.

Disclosed is a system for zero voltage switching in a power converter with a first half-bridge and a second half-bridge. The first half-bridge has a first set of transistors and output inductor. The second half-bridge has a second set of transistors and auxiliary inductor. A current sensing means measures, at switching cycle scale, average and maximum current values of output inductor and average, minimum and maximum current values of auxiliary inductor. A voltage sensing means measures input and output voltages of first and second half-bridge. A controller is configured to compute dead times of pulse width modulation control signal of second half-bridge, generate pulse width modulation control signal of second half-bridge and to adapt dead times of first half-bridge.

The invention discloses a spurious suppression method based on random phase shift, and the method comprises the steps: adjusting the amplitude and phase of each channel, enabling the amplitude and phase of each channel to be consistent, synthesizing the signals of each channel, and measuring the SFDR value S1 of a system; phase shifting is carried out on the input signal M1, the spurious phase in the output signal is measured, the spurious phase change M2 before and after phase shifting of the input signal is calculated, and the multiple relation n between M2 and M1 is calculated; all channels are divided into two groups randomly, the first group of channels does not change the phase of the input signal, and the second group of channels shifts the phase of the input signal, that is, the input signal is respectively input into a digital-to-analog converter; performing reverse phase shift on the output signals of the second group of channels in a digital domain, namely, recovering the phase of the output signals to be consistent with the phase of the first group of output signals, and outputting the phase difference pi between spurious output and spurious output of the first group of channels; and synthesizing two groups of signals, measuring the SFDR value S2 of the system, and comparing the SFDR value S2 with S1.

A specific logic circuitry of a semiconductor Integrated Circuit (IC) is measured by a sensor. The sensor includes: a signal splitter that splits a signal from the specific logic circuitry into two test paths; a delay element that receives and applies a delay to a first test path, the delay based on a predetermined timing margin that is selected from a group of discrete timing margin values comprising a shortest timing margin value and at least one longer timing margin value; a comparison circuit that compares the delayed first test path and a second test path and provides a measurement output according to the comparison for an instance of measuring; and a controller that sets the predetermined timing margin such that, over the instances of measuring, a frequency of selection of the shortest timing margin value is higher than a frequency of selection of each longer timing margin value.

The present application relates to a device for testing electrical performance parameters of bipolar transistors, comprising a test fixture for operatively mechanically and electrically coupling a bipolar transistor to be tested, a test circuit for applying a test input signal to the transistor under test, a measurement circuit for measuring an output signal of the transistor and determining electrical performance parameters thereof, and a controller for automating the testing process and analyzing the measurement data, wherein the test fixture has fluid cavities formed through its length by one or more flow holes, and at least one cooling section in the form of a uniform or non-uniform spiral is arranged in each fluid cavity to extend along the corresponding fluid cavity. The test circuit comprises a signal generator for generating the input signal and a power supply for providing necessary bias voltages to the transistor; the measurement circuit comprises an oscilloscope for measuring the output signal and a computer for processing the measurement data; the controller is capable of automatically acquiring and analyzing the measurement data of the transistor to determine the electrical performance parameters.

The invention relates to a variable-frequency adaptive protection control method and system based on dynamic vector correction, and belongs to the field of power protection control. The method comprises the following steps: measuring an output instantaneous frequency through three-mode fusion; performing dynamic correction on the rotating coordinate system based on the instantaneous frequency to obtain a correction amplitude; performing three-domain confidence factor correction based on the correction amplitude to obtain a comprehensive confidence coefficient; cooperative compensation is carried out based on the comprehensive confidence coefficient and the instantaneous frequency, and the cooperative compensation comprises protection constant value adaptive compensation and excitation-synchronous cooperative compensation which are respectively used for compensating an over-current protection constant value and excitation voltage; and obtaining an error index, carrying out real-time closed-loop verification based on the error index, and optimizing cooperative compensation. Frequency conversion adaptive protection control is realized by means of dynamic vector correction, three-domain confidence evaluation, excitation-protection cooperative compensation and the like.

The invention discloses a temperature monitoring system suitable for a fusion reactor low-clutter system and an over-temperature protection method. The temperature monitoring system comprises a high-speed temperature acquisition unit, a thermocouple sensor, an industrial control upper computer and a database server. A microwave excitation signal of the microwave excitation source is amplified by the microwave source klystron and then transmitted to the low-clutter coupled antenna through the microwave transmission line, and a plurality of temperature measuring points are arranged on the waveguide surface of the microwave transmission line and the end face of the low-clutter coupled antenna. Measurement output ends of the thermocouple sensors are uniformly accessed and gathered into the high-speed temperature acquisition unit and are uploaded to the industrial control upper computer, and the industrial control upper computer records and stores acquired multi-channel real-time temperature data, control signal output values and alarm events into the database server. The method has the advantages that early warning and temperature regulation are carried out for potential thermal runaway faults, so that the equipment safety of a high-power microwave transmission device and the normal operation of a low-clutter current driving system are guaranteed.

A method for detecting a deviation of a position sensor is provided, which detects a deviation in the mounting positions of position sensors of a motor. The invention is a method for detecting a deviation of a position sensor, wherein the method includes: switching on an energy supply to a U-phase conductor wire, a V-phase conductor wire and a W-phase conductor wire.-Conductor wire of a motor to rotate a rotor of the motor; switching off the power supply to the U-phase conductor wire, the V-phase conductor wire and the W-phase conductor wire when a rotor speed reaches a predetermined speed; measuring induced voltages generated in the U-phase conductor wire, the V-phase conductor wire and the W-phase conductor wire in the off state, calculating the positions of a U-phase tooth, a V-phase tooth and a W-phase tooth of the motor based on the induced voltages and measuring outputs from a U-phase position sensor, a V-phase position sensor and a W-phase position sensor; and calculating differences between intended and actual mounting positions of the U-phase position sensor, the V-phase position sensor, and the W-phase position sensor by comparing the calculated positions with the outputs. [Selected drawing].

Embodiments of the present application disclose a current measurement method and device, computer equipment and a computer readable storage medium. The method comprises obtaining a measurement range corresponding to a plurality of measurement ranges in a current measurement device and a calibration point, the calibration point comprising a calibration input value corresponding to each range and a corresponding calibration output value; inputting a plurality of input currents within the measurement range in the current measurement device to obtain a measurement output value corresponding to a current input value of the measurement range based on the input current; determining a linear mapping relationship corresponding to each range based on the calibration input value and the calibration output value, and calculating an input error corresponding to the current input value based on the linear mapping relationship; constructing an error mapping relationship corresponding to each range according to the measurement output value and the input error; and measuring a to-be-measured current based on the linear mapping relationship and the error mapping relationship. In this way, the accuracy of current measurement is improved, the measurement range of current measurement is improved, and the efficiency of current measurement is improved.

The invention belongs to the technical field of high-speed data testing, and discloses a high-speed signal eye pattern testing method and system based on automatic testing equipment, and the method comprises the steps that a high-speed signal configuration vector is divided into a configuration section and an action section, the configuration section is used for rapidly configuring a testing environment, and the action section is used for controlling a testing action; in the action section, constructing a virtual clock as a reference Trigger signal, and synchronizing the virtual clock and a high-speed signal to be detected to the same sequence group; performing waveform capture on the synchronized high-speed signal to be detected, and generating a two-dimensional array formed by sampling time and level values; the two-dimensional array is processed by a difference peak-valley segmentation method, the eye height, the rising / falling time and the jitter are measured based on a processing result, automatic control, measurement and output of test data can be realized through testing of automatic test equipment, data analysis and processing are facilitated, the test efficiency is improved, and interference of human factors is avoided.

The application provides a differential pressure transmitter comprehensive compensation method based on Kriging interpolation and cubic spline interpolation, which comprises the following steps: measuring the calibration output voltage of a differential pressure transmitter at multiple temperature calibration points, static pressure calibration points and differential pressure calibration points to obtain data calibration points; fitting a variogram function theoretical model by using Kriging interpolation and obtaining a compensation matrix; establishing an output voltage model by using cubic spline interpolation; when the measured value of the ambient temperature is a temperature calibration point, the measured value of the static pressure is directly brought into the output voltage model to obtain a theoretical voltage, three calibration output voltages adjacent to the theoretical voltage are selected, a differential pressure function relationship is established by using cubic spline interpolation, and the measured output voltage is brought into the differential pressure function relationship to obtain a to-be-measured differential pressure; when the measured value of the ambient temperature is not a temperature calibration point, a compensation coefficient is determined by using the variogram function theoretical model, and the to-be-measured differential pressure is calculated by using the compensation coefficient. The application adopts cubic spline interpolation at the modeling temperature and adopts Kriging interpolation at the non-modeling temperature, so that the algorithm with large calculation amount can be used to improve the compensation precision, the repeated interpolation at each temperature and static pressure interval is avoided, the workload is reduced, and the real-time performance of the compensation is improved.

The invention relates to a low-dropout linear voltage stabilizing circuit of a self-adaptive load capacitor, and belongs to the field of analog integrated circuit design. According to the circuit, the problem that the phase margin is reduced and even oscillates due to the fact that a fixed compensation network cannot adapt to wide-range load capacitance change in a traditional scheme is solved. The key points of the technical scheme are as follows: an actual value of a load capacitor connected with an output node is accurately measured through a load capacitor detection circuit in a power-on stage; and controlling the switchable phase compensation network to be automatically switched to an optimal compensation gear matched with the capacitance value based on the measurement result. The scheme is mainly used in various power supply management chips, so that the low dropout linear regulator can maintain stable output and optimized phase margin under any load capacitance from a nano-method magnitude to a micro-method magnitude.

This utility model relates to a six-dimensional torque sensor system. Through integrated circuit design and packaging within the six-dimensional torque sensor, high-precision and highly sensitive deformation sensing and electrical signal conversion output are achieved via strain gauges on the elastic beams of the main frame structure. After specific measurement using a half-bridge differential Wheatstone bridge, the measured signal is amplified, filtered, and converted from digital to analog data by an ADC chip before being sent to a lower-level computer. The lower-level computer then reads the acquired sensor measurement signal, forming a high-precision circuit design specifically matched to the six-dimensional torque sensor. The coordinated installation of the strain gauges, half-bridge differential Wheatstone bridge, and ADC chip makes it less susceptible to environmental factors and effectively suppresses noise interference while achieving high signal gain, effectively realizing the measurement output function of the six-dimensional torque sensor.

The invention discloses a digital twinborn model construction method and device of a coal-fired power generation unit. The method comprises the steps that a mechanism model used for describing the running state of a coal-fired unit is constructed based on the structure and the running mechanism of the coal-fired unit; predicting historical input data based on the mechanism model to obtain mechanism prediction outputs corresponding to the historical input data; based on the actual measurement output and the mechanism prediction output of the same historical input data and the feature vector of unit operation, performing model training on the initial data driving model to obtain a target data driving model; and constructing a target digital twin model based on the mechanism model and the target data driving model. According to the method, the digital twinborn model of the coal-fired power generation unit can be accurately and reasonably constructed, and a foundation is laid for subsequent accurate prediction of the running state of the coal-fired power generation unit.

A technique for recursively determining the modulation index for controlling a DC-AC inverter is disclosed. The modulation index can first be selected. The input voltage to the power inverter can be measured. Based on the input voltage and the selected modulation index, the output voltage of the power inverter may be estimated. The output current of the power inverter can be measured. Using the estimated output voltage and the measured output current, the active power and reactive power can be determined. Using the active power and reactive power, the updated modulation index can be determined. The updated modulation index coefficient can be used to generate a pulse-width modulated signal used to control the power inverter.

The application discloses a kind of complex dynamic network system fault-tolerant control method, device and storage medium, belong to fault-tolerant control research technical field, its method includes obtaining the measurement output signal and control input signal of each node in complex dynamic network system;The measurement output signal and control input signal are input into the adaptive sliding mode observer designed in advance, generate system state estimation value, and through system state estimation value, drive state estimation error to converge to zero;Based on system state estimation value, through the adaptive fault-tolerant controller designed in advance, solve controller gain matrix, and through controller gain matrix drive system state estimation value and the tracking error of target node state converges to zero.The application is improved further to system performance under the condition that system is stable at present stage, improves the performance of system, and can output correct value under the condition that there is external attack.

To provide a force measuring device of sufficient accuracy combined with an appropriate and simple configuration.SOLUTION: A force-measuring device based on the principles of electromagnetic force compensation, comprising an electronic circuit driven by a direct current, the electronic circuit comprising an inductor, in particular a coil, a control unit for controlling a compensation force by controlling a current through the inductor as a function of a force to be measured, and means for providing a measurement output indicative of the force to be measured, wherein the control of the current comprises a dynamic switching of two switch states associated with two conducting directions of the inductor (1L, 2L).SELECTED DRAWING: Figure 2

The invention relates to the technical field of intelligent detection, particularly discloses an automatic detection system and method for optical characteristics of a semiconductor laser, and aims to solve the problems of lack of automatic wavelength test, poor multi-device collaboration and insufficient data quality control in the prior art. A laser driver, a power meter and a spectrograph are automatically identified and stable communication is established by scanning a communication port and inquiring equipment identifiers, test types, current sequence parameters and temperature setting parameters input by a user are received, equipment is controlled to execute automatic test according to the test types, output power and working voltage are measured through power test, and the output power and the working voltage are measured through temperature control. The wavelength test measures the output wavelength, collects data after the output of the laser is stable during the test, carries out signal-to-noise ratio screening on the wavelength data, generates a PIV characteristic curve and a wavelength tuning curve based on the processed data, and displays the PIV characteristic curve and the wavelength tuning curve on a user interface. According to the invention, cooperative detection of PIV and wavelength characteristics can be realized, data reliability and test efficiency are improved, and scene requirements of precise spectral analysis are met.

The invention discloses a calculation graph compilation error attribution method, system and equipment based on a benchmark reference model and a medium, belongs to the technical field of computers, and aims to solve the technical problem that in the model compilation optimization process of an AI compiler, when end-to-end test results are inconsistent, error sources are difficult to effectively attribut and position, and the calculation graph compilation error attribution accuracy is poor. According to the technical scheme, a reference path, an isolation to-be-measured path and an accumulation to-be-measured path are cooperatively executed for each node in a calculation graph, corresponding reference output, isolation to-be-measured output and accumulation to-be-measured output are respectively obtained, and differential analysis is carried out on the reference output, the isolation to-be-measured output and the accumulation to-be-measured output, so that the calculation graph is obtained. Compiling errors are accurately attributed to function errors of operators, internal calculation errors or transmission characteristics accumulated to the errors, and accurate positioning and quantitative analysis of the compiling errors are achieved; the method specifically comprises the following steps: constructing an initial calculation graph; initializing node attributes; and constructing a benchmark reference model.

The invention provides an environmental factor compensation method, device and equipment for a gallium nitride Hall current sensor, and relates to the technical field of sensors. The method comprises the following steps: acquiring an actually measured output voltage of a gallium nitride Hall current sensor under a current environmental condition; wherein the environmental conditions comprise temperature, humidity and electromagnetic interference intensity; inputting the actually measured output voltage and the current environmental condition into a trained environmental error compensation model to obtain current measurement compensation amounts corresponding to the actually measured output voltage and the current environmental condition; wherein the environmental error compensation model is used for representing a mapping relation between a current measurement error of the gallium nitride Hall current sensor and various environmental conditions; and compensating the output current corresponding to the actually measured output voltage based on the current measurement compensation amount to obtain an accurate current measurement value. According to the invention, on the premise that the hardware cost is not increased, the gallium nitride Hall current sensor can maintain excellent measurement performance in a full temperature range, a complex electromagnetic environment and a humidity condition.

The application discloses a chip buffer modeling method, system, device and circuit, obtains a measured output waveform of a chip to be modeled, and takes the measured output waveform as a simulation voltage source; obtains an actual output impedance of the chip to be modeled, and takes the actual output impedance as an impedance value of a simulation output resistance; establishes a buffer model of the chip to be modeled according to the simulation voltage source and the simulation output resistance; and the simulation output resistance in the buffer model is connected to an output end of the simulation voltage source. It can be seen that the application can establish a chip buffer model based on chip measured parameters in the case of lacking a chip model, thereby ensuring that simulation work is smoothly carried out, and helping to improve the PCB design effect; moreover, the chip buffer model established based on the chip measured parameters has a smaller difference from an actual chip buffer and higher accuracy; in addition, the chip buffer model has a simple structure and is easy to obtain, and compared with a complex model provided by a manufacturer, the complexity of model verification is lower.

The embodiment of the application provides a kind of controller test system, the overcurrent protection method of controller test system, belong to test technical field.The system includes the controller to be measured, load module, arbitration module, host computer, control module and power module, wherein: the output end of the controller to be measured outputs first branch current;Arbitration module is arranged between the controller to be measured and load module, is connected with output end and load respectively, and outputs second branch current.Determine arbitration by at least one of first branch current and second branch current, when arbitration result of determination represents that system exists exception, generate control instruction, to make at least one of arbitration module and load module and the controller to be measured disconnected, can realize the real-time monitoring of the controller to be measured, abnormality determination and fast protection, improve the accuracy and reliability of test system, meet the demand of frequent fault injection test scene.

The present invention relates to a substrate processing equipment, and more particularly, to a substrate processing equipment equipped with a current / voltage / power measurement module for measuring the current / voltage applied for generating and maintaining plasma during substrate processing using plasma, and further for measuring the power of incident and reflected waves. The present invention discloses a substrate processing equipment comprising a process chamber forming a sealed processing space in which plasma is formed to perform substrate processing; a substrate support unit disposed in the processing space on which a substrate is seated; and a gas injection unit for injecting a process gas into the processing space, wherein the substrate support unit includes a heater for heating the seated substrate, and a current / voltage / power measurement module for measuring an RF voltage, current, and power of an incident wave and a reflected wave generated by plasma in the processing space is installed adjacent to a heater power line for supplying power to the heater.

The invention relates to a circuit and a method for generating an oscillator signal. The present disclosure relates to an oscillator circuit comprising: a controller configured to generate a frequency control signal, the frequency control signal comprising a first frequency control value; a digitally controlled oscillator (DCO) configured to generate an oscillator output signal based on the frequency control signal, where the output signal is generated at a first frequency in response to a first frequency control value of the frequency control signal; and a digital feedback circuit configured to receive the output signal and output a first feedback signal, where the oscillator circuit is configured such that the first frequency depends on or is at least partially based on a value of the first feedback signal, and the controller is configured to provide a first control instruction to instruct the digital feedback circuit to update the first feedback signal, the digital feedback circuit is configured to, in response to the first control instruction: measure a first frequency of the output signal; and adjusting a value of the first feedback signal to reduce an error between the first frequency and the first target frequency.

A quantum computing task processing method includes: performing transformation processing on input quantum states of n+m qubits through a parameterized quantum circuit, the n+m qubits including n task bits and m auxiliary bits; measuring output quantum states of the n+m qubits to obtain a bit string of the n+m qubits; updating parameters of the parameterized quantum circuit based on output quantum states of the n task bits when an auxiliary substring satisfies a post-selection condition and the parameterized quantum circuit has not converged, the auxiliary substring being a substring corresponding to the m auxiliary bits in the bit string; and obtaining a computing result of the target quantum computing task based on the output quantum states of the n task bits when the auxiliary substring satisfies the post-selection condition and the circuit has converged.

Contactless energy transfer device (1), comprising: a transmitter (2); and a receiver (3) which is configured to receive electrical energy from the transmitter (2) in a contactless manner, where the transmitter (2) has: a transmitting coil (14) which is set up to supply electrical energy to the receiver (3), a power supply circuit (10) which is set up to supply alternating current energy to the transmitting coil (14) with an adjustable switching frequency and an adjustable voltage, a current sensing circuit (16) which is set up to measure a current through the transmitting coil (14) and to determine a measured value of the current, a control circuit (19) which is set up to control the switching frequency and the voltage of the alternating current energy which is supplied to the transmitting coil (14) by the power supply circuit (10), and a first communication device (17) that is set up to communicate with the receiver (3), where the receiver (3) has: a resonant circuit (20) comprising a receiving coil (21) configured to receive electrical energy from the transmitter (2) and a resonant capacitor (22) configured to resonate with the receiving coil (21) in response to electrical energy from the transmitter (2), a rectifier circuit (24) which is set up to rectify electrical energy output by the resonant circuit (20), a short-circuit circuit (30) which is configured to switch between short-circuiting and opening the resonant circuit (20), a voltage detection circuit (28) which is set up to measure an output voltage of an electrical energy output by the resonant circuit (20) and to determine a measured value of the output voltage, a second communication device (31) which is set up to communicate with the transmitter (2), and a determination circuit (29) configured to determine whether the measured output voltage is within a predetermined permissible voltage range, and to cause the short-circuiting circuit (30) to short-circuit the resonant circuit (20), and to cause the second communication device (31) to transmit determination information indicating that the contactless power transfer device (1) is not performing a constant voltage output operation in which the output voltage from the rectifier circuit (24) is a constant voltage, even if a resistance of a load circuit (27) connected to the rectifier circuit (24) changes when the measured output voltage is outside the predetermined permissible voltage range, and wherein the control circuit (19) in the transmitter (2) detects a switching frequency of the alternating current energy in response to the determination information received by the receiver (3) through the first communication device (17), which indicates that the contactless energy transfer device (1) is not performing a constant voltage output operation, at which the contactless energy transfer device (1) performs the constant voltage output operation according to the measured current.

The present disclosure describes a test and measurement system with a test and measurement instrument. In addition, the test and measurement system may include an isolation barrier providing galvanic isolation to the test and measurement instrument. The test and measurement system may include a circuit couplable to a device under test (DUT), where the circuit may include: a signal receiver configured to receive signals from the test and measurement instrument through the isolation barrier; an isolated power supply configured to power the circuit via the received signal; a signal generator configured to generate and output an isolated signal to the DUT using the isolated power supply; and a sensor for measuring output signals from the DUT in response to the isolated signal from the signal generator.

The invention provides a model-free adaptive iterative learning injection molding speed control method based on a filter. The method comprises the following steps: modeling an injection process as an actual output model containing measurement disturbance; constructing a control law with a filter, calculating control input, sending the control input to the injection molding system, and collecting measurement output after operation; if the sampling time is less than the maximum sampling time, updating the measurement output, and recalculating the control input; if the measurement error is greater than the error threshold value, entering the next iteration to recalculate the control input; and otherwise, taking the current control input as the control input of learning completion. Measurement disturbance is incorporated into the model, so that the model can reflect the injection molding system more truly; besides, high-frequency disturbance in measurement errors is filtered out through a filter, so that the high-frequency disturbance is closer to the real deviation of the injection speed, and the tracking precision of the injection speed is remarkably improved.

The present invention relates to a substrate processing equipment, and more particularly, to a substrate processing equipment equipped with a current / voltage / power measurement module for measuring the current / voltage applied for generating and maintaining plasma, and further for measuring the power of incident and reflected waves. The present invention discloses a substrate processing equipment comprising a process chamber, a substrate support unit, a gas injection unit, and at least one RF power source. The substrate support unit includes a heater and an RF energy blocking part installed above the heater. A current / voltage / power measurement module is installed adjacent to a grounding wire, which is connected to the RF energy blocking part, to measure the RF voltage, current, and power of an incident wave and a reflected wave generated by the plasma.