The invention provides a quantitative
line scanning method for a curved sample based on an electronic probe. The method comprises the following steps of searching a sample analysis region through a
backscattered electron image; setting the
acceleration voltage of an electronic
microscope, the size of electronic beams, the size of electronic beam spots, the minimum moving step length of a surface
distribution diagram and a grid data lattice; reading the coordinate position of a
current point, moving a subsequent point, and reading the coordinates of the moved point until the coordinate positions of all grid points are completely read; performing element characteristic X-
ray spectrum analysis to obtain an element strength
surface scanning diagram of an analysis region; testing the X-
ray strength of a standard sample of an analyzed element, and converting the X-
ray strength in an original counting
surface scanning result into concentration content to obtain a quantitative surface
distribution diagram; performing
line scanning to obtain a quantitative
line scanning curve of the curved sample. By the adoption of the method, a measurement error caused by unevenness of the surface of the sample can be corrected, the detection efficiency and the detection accuracy are improved, the problem that the electronic probe can be used for analyzing a flat sample only is effectively solved, and the range of samples, which can be analyzed by the electronic probe, is expanded.