Quantitative line scanning method for curved sample based on electronic probe

An electronic probe and line scanning technology, which is applied in measuring devices, material analysis using wave/particle radiation, instruments, etc., can solve the problem that the electronic probe can only analyze flat samples, so as to improve the inspection efficiency and accuracy, The effect of expanding the sample range

Inactive Publication Date: 2013-12-25
ANGANG STEEL CO LTD
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Problems solved by technology

[0005] The invention aims to solve the problem that the electronic probe can only analyze flat samples, thereby providing an electronic probe for curved surface samples that can correct the measurement error caused by the unevenness of the sample, expand the analysis range of the electronic probe sample, and improve the inspection efficiency and accuracy. quantitative line scan method

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  • Quantitative line scanning method for curved sample based on electronic probe
  • Quantitative line scanning method for curved sample based on electronic probe

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Embodiment Construction

[0023] EXAMPLES The curved surface sample quantitative line scanning method of the present invention is used to conduct line scanning analysis on uneven samples. The steps are as follows:

[0024] 1. Put the clean analysis sample into the electron probe sample chamber, and use the backscattered electron image to find the sample analysis area.

[0025] 2. During the measurement, select the working parameters of the electron microscope, the accelerating voltage is 15kV, the electron beam current is 100nA, and the beam spot size is 1?. Surface distribution map parameter selection: the scanning method is sample stage scanning, the minimum moving step is 1.0°, the coordinates are manually positioned, and Trace Map selects YES. The dwell time of the sample stage scanning is 30ms, and the moving step is 6.0 X 6.0 ?. The correction parameters of the curved surface sample are set to 9×9 grids. After reading the current point coordinates, move to the next point coordinates, manually...

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Abstract

The invention provides a quantitative line scanning method for a curved sample based on an electronic probe. The method comprises the following steps of searching a sample analysis region through a backscattered electron image; setting the acceleration voltage of an electronic microscope, the size of electronic beams, the size of electronic beam spots, the minimum moving step length of a surface distribution diagram and a grid data lattice; reading the coordinate position of a current point, moving a subsequent point, and reading the coordinates of the moved point until the coordinate positions of all grid points are completely read; performing element characteristic X-ray spectrum analysis to obtain an element strength surface scanning diagram of an analysis region; testing the X-ray strength of a standard sample of an analyzed element, and converting the X-ray strength in an original counting surface scanning result into concentration content to obtain a quantitative surface distribution diagram; performing line scanning to obtain a quantitative line scanning curve of the curved sample. By the adoption of the method, a measurement error caused by unevenness of the surface of the sample can be corrected, the detection efficiency and the detection accuracy are improved, the problem that the electronic probe can be used for analyzing a flat sample only is effectively solved, and the range of samples, which can be analyzed by the electronic probe, is expanded.

Description

technical field [0001] The invention belongs to the field of metallurgical analysis and inspection, and in particular relates to an electronic probe quantitative line scanning method for curved surface samples. Background technique [0002] The line scan curve of the electronic probe can qualitatively and quantitatively describe the segregation rate of a certain component in the sample, understand the diffusion rate of a certain element and measure the thickness of the diffusion layer, and determine the uniformity of the element distribution in the sample, etc., so the line of the electronic probe Scanning analysis is an extremely useful analytical tool for steel products. [0003] However, not all samples can be analyzed by electronic probe for line scanning, because the electronic probe requires the sample to be flat as a mirror, otherwise great measurement errors will occur and wrong analysis results will be obtained. For example, the composition of a sample is evenly di...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/225
Inventor 李文竹马惠霞严平沅钟莉莉黄磊王晓峰
Owner ANGANG STEEL CO LTD
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