Portable multifunctional vacuum calibration system and method

Abstract

The invention relates to a portable multifunctional vacuum calibration system and a method, belonging to the field of measurement technologies. The calibration system comprises a mechanical pump 1, a molecular pump 2, a first vacuum valve 3, a second vacuum valve 4, a third vacuum valve 8, a fourth vacuum valve 10, a fifth vacuum valve 11, a sixth vacuum valve 17, a seventh vacuum valve 19, an eighth vacuum valve 23, a ninth vacuum valve 15, a calibration chamber 5, a quadrupole mass spectrometer 6, a first small hole 9, a second small hole 20, a fine-adjustment valve 12, a gas source 13, a first vacuum gauge 14, a second vacuum gauge 18, a third vacuum gauge 21, a fifth vacuum gauge 24 and a pressure-stabilizing chamber 16; and the method comprises a vacuum leak calibration method and a vacuum gauge calibration method. According to the system, the vacuum gauges and a gas micro-flow calibration function are combined, and the vacuum gauges, vacuum leaks, leak detectors and gas micro-flowmeters can be calibrated in an on-site or on-line manner, so that the system has the characteristics of multifunction, high accuracy, little weight, small volume, portability and the like.

Description

technical field [0001] The invention relates to a portable multifunctional vacuum calibration system and method, in particular to a laboratory, on-site and on-line calibration test system and method for vacuum gauges, vacuum leaks, leak detectors and gas microflow meters, belonging to measurement technology field. Background technique [0002] Vacuum calibration technology is of great significance in scientific research and production of aerospace, surface, microelectronics, solar energy, optoelectronics, etc. For scientific research or enterprise production lines, it is necessary to perform on-site or online calibration of vacuum gauge vacuum leaks, leak detectors and gas microflow meters In this way, the calibration conditions are basically the same as the use conditions, which not only improves the calibration accuracy, but also avoids the economic loss and time wastage caused by stopping the system and sending it to the laboratory for calibration. Therefore, on-site or o...

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Problems solved by technology

[0003] The document "Vacuum Leak Calibration Device with Fixed Conductance Method", published in "Journal of Vacuum Science and Technology" Vol. , requires multiple vacuum pumps and vacuum gauges, etc., and the system is complex and expensive, which is only suitable for laboratory calibration and cannot meet the calibration requirements of on-site vacuum leaks, leak detectors and gas microflow meters

[0004] The document "Development of the Vacuum Measurement Standard Device by the Comparison Method", published in Volume 66, Issue 6, 1992, pages 70-73 of "Aerospace Measurement Technology", introduced the calibration method and calibration system of the vacuum gauge by the comparison method , but its calibration range is 10 -4 ~10 5 Pa, and at 10 -4 ~10 -1 In the Pa pressure range, the magnetic levitation rotor gauge is used for measurement. The lower limit of this measurement method is limited by the lower limit of the magnetic levitation rotor gauge. At the same time, the cost of the magnetic levitation rotor gauge is relatively expensive. In addition, the system is relatively large, which is only suitable for laboratory use and cannot meet the requirements. Calibration requirements for field vacuum gauges

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