Portable multifunctional vacuum calibration system and method
A calibration system and multi-functional technology, applied in the field of measurement, can solve the problems of high cost of magnetic levitation rotor gauge, inability to meet the needs of on-site vacuum leak calibration, complex and huge system, etc.
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[0043] Example 1
[0044] The steps of the method for calibrating the vacuum leak 7 to be calibrated using the above device are:
[0045] S11. Install the vacuum leak 7 to be calibrated on the third vacuum valve 8, and check the installation tightness;
[0046] S12. Turn on the mechanical pump 1, the first vacuum valve 3, the second vacuum valve 4, the fourth vacuum valve 10, the fifth vacuum valve 11, the ninth vacuum valve 15, the sixth vacuum valve 17, and the seventh vacuum valve 19 in sequence. Exhaust air in the calibration chamber 5, plenum chamber 16, and each valve pipeline, open the second vacuum gauge 18, and keep the ambient temperature range at 23±3℃, when the second vacuum gauge 18 measures the pressure in the plenum chamber to be less than 20Pa , Start molecular pump 2;
[0047] S13. When the vacuum degree in the plenum chamber 16 is less than 130 Pa, open the ninth vacuum valve 15 and the first vacuum gauge 14. When the vacuum degree in the calibration chamber 5 is le...
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[0057] Example 2
[0058] The steps of the method for calibrating the vacuum gauge 22 to be calibrated using the above device are:
[0059] S21. Install the vacuum gauge 22 to be calibrated on the calibration chamber 5 and check the installation tightness;
[0060] S22. Turn on the mechanical pump 1, the first vacuum valve 3, the second vacuum valve 4, the fourth vacuum valve 10, the fifth vacuum valve 11, the ninth vacuum valve 15, the sixth vacuum valve 17, and the seventh vacuum valve 19 in sequence. The eighth vacuum valve 23 evacuates the calibration chamber 5, the plenum chamber 16, and each valve pipe, opens the second vacuum gauge 18, and keeps the ambient temperature at 23±3℃, when the second vacuum gauge 18 measures the pressure chamber The pressure in 16 is less than 20Pa, start molecular pump 2;
[0061] S23. Open the third capacitance gauge 21. When the vacuum in the plenum chamber 16 is less than 130Pa, open the ninth vacuum valve 15 and the first vacuum gauge 14. When ...
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