A five-degree-of-freedom (DOF) microscopic depth-of-field
measurement device and method are disclosed. In the device, a five-DOF motion platform is mounted on a support, possessing three translational
degrees of freedom (X, Y, Z) and two
rotational degrees of freedom (B, C) (or A, C). A clamping stage for the object to be measured is fixed to the motion platform. An optical measurement
system is connected to the motion platform via a brittle clamp, and the optical measurement
system includes an industrial camera, a lens
barrel, an objective lens, and a
light source connected in sequence. This invention first automates the acquisition of the displacement of each axis of the motion platform by converting the workpiece coordinates of the
microstructure to be measured to the measurement coordinates, and guides the motion platform to a designated position based on the displacement of each axis. Then, it acquires image sequences of the
microstructure at equal intervals along the same direction. By extracting the
focal position of each pixel in the image, it achieves three-dimensional
point cloud measurement or large depth-of-field
image measurement of the object to be measured, featuring high measurement efficiency and anti-collision protection.