Ultra-precision micro-displacement sensing system and processing method based on double-FBG suspended type probe structure

Abstract

The invention discloses an ultra-precision micro-displacement sensing system based on a double-FBG suspended type probe structure. The system is characterized in that a stainless steel needle tube is adopted in a probe to serve as a protective sleeve, two FBG optical fiber measuring bars are arranged in the protective sleeve in the axial direction of the protective sleeve in a parallel mode, one ends of the two optical fiber measuring bars are fixed with the protective sleeve, and the other ends of the two optical fiber measuring bars are suspended in midair to be measured; one of optical fibers is a measuring optical fiber, the end portion of the measuring bar of the measuring optical fiber is provided with a measuring ball stretching out of the protective sleeve, the other of optical fibers is a compensated optical fiber which coats the protective sleeve, and the end portion of the compensated optical fiber forms a closed end through fusion and processing. The ultra-precision micro-displacement sensing system has the advantages of being high in sensitivity, good in stability, large in length-diameter ratio, and strong in anti-interference, and can be widely used for displacement parameter measurement of micro-nano magnitudes of micro devices, microstructures and micro-dimensions.

Description

technical field [0001] The invention relates to a micro-displacement sensor, more specifically a micro-displacement sensor based on a Bragg fiber grating for micro-nano scale. Background technique [0002] Micro-nano technology is an important frontier of current scientific and technological development, among which ultra-precision measurement technology with micro-nano scale is a representative research field, and it is also the premise and basis for the development of micro-nano technology. At present, the research on micro-nano measurement technology is very active at home and abroad, and various measurement principles and methods have been proposed. [0003] The research on micro-nano measurement technology is very active at home and abroad, and many measurement principles and methods have been proposed. At present, there are two main categories of methods capable of nanometering: non-optical methods and optical methods. The former includes: SPM method, capacitance mic...

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Problems solved by technology

[0006] However, since the fiber Bragg grating is formed by writing ultraviolet light on a bare fiber with a diameter of 125um, the fiber Bragg grating is brittle and easy to break, so it cannot be used directly and must be packaged

At present, the usual packaging methods are engineering landfill packaging and cantilever beam paste packaging. These two packaging methods have large size and structure, and the measurement force is also large, which is not conducive to the ultra-precision measurement of the size and parameters of micro-nano devices.

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