Minute size measuring device based on embedded system

Abstract

A microsize measurement device based on embedded system comprises a sensor, a memory, a man-machine interface and an embedded controller, including the steps of gathering the digital image of the microsize quantity by the sensor and transmitting it to the embedded controller by the standard digital interface, and then transmitting it to the man-machine interface for display after the embedded controller obtains the digital image gathered by the sensor; calculating the value of the microsize according to the image processing algorism by the embedded controller when the controller obtains the measurement parameter inputted from the man-machine interface; saving the digital image and measurement result to the memory by the controller when the embedded controller obtains the save order inputted from the man-machine interface. The invention, which removes the spatial limit of object stage and takes advantage of high resolution, full digital image real-time collection module, implements high-precision microsize measurement with low costs, low power consumption and small volume.

Description

technical field [0001] The invention relates to a measuring device used in precision engineering, in particular to a micro-sized measuring device based on an embedded system. Background technique [0002] Micro-size measurement is an important part of precision measurement of geometric quantities, and is widely used in military, national defense, aerospace and other precision engineering fields. There are three main problems in micro-size measurement. One is that the sensor is required to have high resolution and accuracy due to the small size of the measured object; the other is that when the micro-size is on the surface of a large workpiece, it is difficult to measure due to the limitation of the stage. ; The third is that the measurement process is usually done manually, the measurement results are easily affected by human factors, and the measurement efficiency is relatively low. Therefore, in the field of metrology and testing, the measurement of tiny dimensions has al...

AI Technical Summary

Problems solved by technology

Compared with the tool microscope, this device has the advantage of realizing digital direct reading and improving the measurement efficiency, but the disadvantage is that it is not limited by the stage and cannot measure the tiny size of the surface of a large workpiece.

"Micro-size measuring device (patent number: ZL 02127864.4)" uses a TV camera to measure tiny sizes such as semiconductor wafers and their processing masks. The output of the two-dimensional image sensor is an analog video signal, which is susceptible to external interference and loss The accuracy of the measurement, the use of a personal computer as the controller makes the measurement system unable to meet the needs of on-site portability

To sum up, the existing instruments or technologies have certain limitations, and cannot well solve the problem of small size measurement for portable applications.

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