Minute size measuring device based on embedded system

Abstract

Micro-sized measuring device based on embedded system, including: sensor, memory, human-machine interface and embedded controller. The digital image collected by the sensor is sent to the embedded controller through the standard digital video interface, and the embedded controller acquires After the digital image collected by the sensor is sent to the man-machine interface for display; when the controller obtains the measurement parameters input by the man-machine interface, the embedded controller calculates the value of the tiny size according to the image processing algorithm; when the embedded controller The controller saves the digital image and measurement results to memory when receiving a save command input from the man-machine interface. The invention removes the space limitation of the stage, fully utilizes the characteristics of the high-resolution and all-digital image real-time acquisition module, realizes high-precision micro-size measurement, and has the advantages of low cost, low power consumption, and small volume. .

Description

technical field [0001] The invention relates to a measuring device used in precision engineering, in particular to a micro-sized measuring device based on an embedded system. Background technique [0002] Micro-size measurement is an important part of precision measurement of geometric quantities, and is widely used in military, national defense, aerospace and other precision engineering fields. There are three main problems in micro-size measurement. One is that the sensor is required to have high resolution and accuracy due to the small size of the measured object; the other is that when the micro-size is on the surface of a large workpiece, it is difficult to measure due to the limitation of the stage. ; The third is that the measurement process is usually done manually, the measurement results are easily affected by human factors, and the measurement efficiency is relatively low. Therefore, in the field of metrology and testing, the measurement of tiny dimensions has al...

AI Technical Summary

Problems solved by technology

Compared with the tool microscope, this device has the advantage of realizing digital direct reading and improving the measurement efficiency, but the disadvantage is that it is not limited by the stage and cannot measure the tiny size of the surface of a large workpiece.

"Micro-size measuring device (patent number: ZL 02127864.4)" uses a TV camera to measure tiny sizes such as semiconductor wafers and their processing masks. The output of the two-dimensional image sensor is an analog video signal, which is susceptible to external interference and loss The accuracy of the measurement, the use of a personal computer as the controller makes the measurement system unable to meet the needs of on-site portability

To sum up, the existing instruments or technologies have certain limitations, and cannot well solve the problem of small size measurement for portable applications.

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