A kind of micro air floating measuring head based on
diamond vibrator drive belongs to high-precision measurement and electromechanical technical field;Two air floating short sleeves are fixedly connected on the base of the device, air floating guide rail is installed between the base and air floating short sleeve, measuring needle and
metal target are respectively fixedly connected at the two ends of air floating guide rail;
Diamond vibrator is installed in the middle of air floating guide rail, pre-tightening hinge is installed on the periphery of
diamond vibrator, the matching relationship between pre-tightening hinge and both sides of
diamond vibrator is
interference fit, pre-tightening hinge is fixedly connected with motor cover shell through upper mounting hole, motor cover shell is installed between two air floating short sleeves and is fixedly connected on the base, and
capacitor sensor is installed on the side facing
metal target.The device has no
Abbe error in principle, has active trigger and self-locking function, so it has the advantages of small trigger measurement force and high
measurement precision.