36 results about "Quartz tuning fork" patented technology

The invention relates to the technical field of gas sensing detection, and discloses a gas detection method and system based on a quartz tuning fork enhanced photoacoustic spectrum. The method comprises the following steps: constructing a standardized continuous tuning fork signal data stream; dynamically segmenting the data stream based on the gas concentration interval, and extracting time domain and frequency domain features in parallel in each segment to form an initial feature vector; dynamically adjusting an anomaly judgment threshold according to the jump amplitude of the adjacent segment feature vectors, and scanning and screening out an effective analysis interval of a stable concentration state according to the anomaly judgment threshold; performing cross-domain coupling compensation on the feature vectors in the effective interval to generate enhanced feature vectors; and finally, performing reverse traceability reasoning through a gas leakage propagation model based on the enhanced feature vector, and outputting a leakage source position identifier. The device can adapt to a dynamically changing concentration field, and the reliability and traceability positioning capability of gas detection in a complex environment are improved.

The application discloses a kind of chirp modulation photo-thermal-optical spectrum resonance frequency and concentration synchronous measurement method and system, belong to photo-thermal-optical spectrum field, comprising: S1, generating chirp modulation signal driving laser, produces modulated laser beam;S2, the modulated laser beam is inducted after passing through gas to the surface of quartz tuning fork excitation photo-thermal-optical signal demodulation obtains first harmonic signal;S3, using lorentz line function fitting the first harmonic signal;S4, according to fitting result, the center resonance frequency position of quartz tuning fork is calculated;S5, whether the center resonance frequency position of the quartz tuning fork is located in the center of first harmonic signal;If not, adjust chirp modulation signal initial frequency repeats S1-S5, until the center resonance frequency position of quartz tuning fork is located in the center of first harmonic signal;S6, according to fitting result, response coefficient is calculated, and inversion obtains gas concentration information.The application can realize high-precision measurement of gas concentration and real-time correction of resonance frequency.

The application relates to the technical field of accelerometers, and provides a quartz vibrating beam accelerometer sensitive structure, which comprises a quartz flexible beam arranged at one end of a rigid beam, a quartz mass pendulum arranged at the other end of the quartz flexible beam, and a quartz tuning fork vibrating beam structure connected with the rigid beam at one end and connected with the quartz mass pendulum at the other end. The quartz vibrating beam accelerometer sensitive structure provided by the application is provided with the quartz flexible beam, the quartz mass pendulum and the quartz tuning fork vibrating beam structure, all of which are made of quartz crystal materials, so that the matching of the material thermal expansion coefficient can be improved, and the temperature drift problem caused by the mismatching of the material thermal expansion coefficient is solved.

This invention provides a quartz gyroscope circuit, including a closed-loop drive circuit. The closed-loop drive circuit includes a drive interdigitator, a drive terminal circuit, and a controller. The drive terminal circuit converts the drive response charge signal generated by the drive interdigitator into a drive response voltage signal and transmits the drive response voltage signal to the controller. The controller generates an original digital reference signal, adjusts the frequency and amplitude of the original digital reference signal based on the drive response voltage signal to generate a drive voltage signal, and transmits the drive voltage signal to the drive terminal circuit. The drive terminal circuit amplifies the drive voltage signal and applies the amplified drive voltage signal to the drive interdigitator so that the oscillation frequency of the drive interdigitator is at the resonant frequency of the quartz tuning fork, and the oscillation amplitude of the drive interdigitator is within a preset amplitude range. This invention addresses the shortcomings of existing analog quartz gyroscopes, where the oscillation frequency cannot operate at the resonant frequency and the oscillation amplitude is unstable.

The application discloses a photoacoustic spectrum sound detector and a gas detection device, which comprises a first Helmholtz resonant cavity, a quartz tuning fork and a second Helmholtz resonant cavity. The two Helmholtz resonant cavities are coaxially connected by a cylindrical barrel and a thin tube. When laser is incident from the light transmission window of the first Helmholtz cavity, passes through the gap between the vibrating arms of the quartz tuning fork and is emitted from the window of the second Helmholtz cavity, the two Helmholtz resonant cavities resonate and amplify the sound wave signal excited by the laser beam, so that the sound pressure near the vibrating arms of the quartz tuning fork is enhanced, the environmental noise and the window noise are suppressed, and the signal-to-noise ratio of the quartz tuning fork in detecting the sound wave signal near the vibrating arms is improved. In the application, the Helmholtz cavity can resonate and amplify the sound wave, thereby improving the output signal amplitude. In the measurement process, the Helmholtz cavity can suppress the environmental noise and the window noise, further improve the signal-to-noise ratio and improve the gas detection precision.

The application discloses a Fourier photoacoustic gas detection device and method, and belongs to the technical field of gas detection. In view of the limited anti-interference ability of a sound signal and the low detection sensitivity of an existing Fourier transform photoacoustic spectrum, a Fourier photoacoustic gas detection device is designed. A supercontinuum broadband light source is used as an excitation light source of a photoacoustic effect, the broadband light source is subjected to unified intensity modulation through an intensity modulation assembly and phase modulation through an interferometer assembly. After the broadband interference light emitted through double modulation interacts with gas molecules, wide-spectrum mixed sound waves are generated, a quartz tuning fork sound measurement assembly extracts resonance components and converts the resonance components into electrical signals. The generated electrical signals are sequentially subjected to processing through a signal amplification assembly, a phase-sensitive demodulation assembly and a Fourier transform assembly, and the processed signals are used for component discrimination and concentration inversion of a target gas.

The invention provides a gas detection method and a gas detection system, and belongs to the technical field of spectral measurement, and the method comprises the following steps: carrying out collimation processing on a laser beam through a collimating lens; the wavelength of the laser beam is matched with the A band of the target gas; after the collimated laser beam penetrates through the gas in the medicine bottle to be detected, focusing the emergent laser beam to a quartz tuning fork by using a focusing lens; the quartz tuning fork converts the received optical signal into an electric signal; the absorption spectrum of the target gas is obtained along with the change of the wavelength of the laser, and then the concentration of the target gas in the medicine bottle to be detected is determined. The intensity of a traditional transmission absorption measurement mechanism is improved through the photoacoustic effect, limitation of medicine bottle refraction and internal shielding on long optical path construction is avoided, the requirements of the system for optical alignment precision and spatial layout are greatly reduced, and miniaturization and engineering applicability of equipment are achieved while high sensitivity is guaranteed.

The application provides a quartz vibrating beam accelerometer with enhanced temperature environment adaptability, wherein a TO package of a sensitive structure is not fixedly installed to an accelerometer shell in a conventional metal connection mode, but is fixed to an inner wall of the shell through a ring-shaped glue body, so that the influence of external environment temperature change can be reduced, and the temperature performance of the accelerometer is improved; a heat insulation baffle is installed between a circuit and a head of the sensitive structure, so that the temperature gradient between double beams of the sensitive structure caused by the start-up temperature rise of the circuit can be effectively reduced, and the start-up time of the accelerometer is reduced.

The application provides a quartz tuning fork resonator and a manufacturing method thereof, which comprises a base, a pair of vibration arms formed on the base, and a counterweight region formed at an end of the vibration arms away from the base, wherein an upper surface of the counterweight region is formed with a metal film layer, a blank gap is left between an edge of the metal film layer and a physical edge of the counterweight region, and the thickness of the metal film layer gradually decreases from a central region to an edge region. The application improves the controllability of film layer distribution by setting the blank gap and the gradient metal film layer with a central thickness and an edge thickness, completely inhibits the metal vapor superposition of the edge and the sidewall of the counterweight region from the structural level, eliminates the local stress concentration, and improves the long-term frequency stability.

The application discloses an integral cavity enhanced LITES gas concentration detection system and a design method thereof, relates to the LITES gas concentration detection technology, and aims to solve the problem that the prior art cannot consider safety, precision and sensitivity simultaneously. In the system, a quartz tuning fork is arranged at a central position of an integral cavity; laser generated by a laser generating device enters a gas absorption cell, and transmitted light formed after target gas absorption is incident on the integral cavity; the transmitted light acts on the quartz tuning fork in a back-and-forth process in the integral cavity; an electric signal output by the quartz tuning fork is collected by a signal collection card, a target signal component is obtained by demodulation of a lock-in amplifier, and a data processing device is used for calculation according to the target signal component to obtain the target gas concentration. The method comprises the following steps: determining optical structure parameters of the integral cavity, and assembling the integral cavity according to the optical structure parameters; and adjusting the position of the quartz tuning fork and the angle of laser entering the integral cavity, so that the laser can repeatedly act on a sensitive area of the quartz tuning fork in a back-and-forth process in the integral cavity.

The invention provides a digital demodulation type quartz MEMS tuning fork trimming device, and belongs to the field of MEMS tuning fork trimming. The device comprises an upper computer and a quartz MEMS tuning fork which are respectively connected with a first controller and a second controller. The upper computer is used for sending a first driving command to the first controller and sending a second driving command and a third driving command to the second controller; the second controller is used for controlling the quartz MEMS tuning fork to work in a gyro function mode according to the second driving command and the first parameter when a driving end mass block of the quartz MEMS tuning fork is roughly repaired; and the fine trimming module is used for performing linear frequency sweeping on the quartz MEMS tuning fork according to the third driving command during fine trimming to obtain a target mechanical orthogonal item, and determining that fine trimming of the driving end mass block is completed when the target mechanical orthogonal item reaches the standard. The trimming efficiency and precision can be considered through double-stage trimming and automatic control, and meanwhile the trimming cost is reduced.

A gas concentration sensing apparatus and a gas concentration measurement method. The gas concentration sensing apparatus comprises a sensor (100), a radio wave generator (200), and a signal processing module (300), wherein the radio wave generator (200) is electrically connected to a signal input end (101) of the sensor (100), and the signal processing module (300) is electrically connected to a signal output end (102) of the sensor (100); the sensor (100) comprises a quartz tuning fork (110) and a sensing micro-wire (120) that are electrically connected; the sensor (100) is used for having a gas to be measured introduced thereto, and allowing the sensing micro-wire (120) to absorb the gas to be measured; the radio wave generator (200) is used for emitting a vibrating radio wave to the sensor (100), such that the quartz tuning fork (110) and the sensing micro-wire (120) resonate upon receiving the vibrating radio wave, and transmitting a mechanical resonance signal to the signal processing module (300); and the signal processing module (300) is used for collecting the mechanical resonance signal and converting same into an electrical signal of a resonance frequency. In the solution, the characteristic that the overall resonance frequency of a quartz tuning fork (110) and a sensing micro-wire (120) changes with the concentration of a gas to be measured is used to directly obtain a corresponding concentration value of the gas to be measured, thereby achieving a simple and efficient measurement process.

The invention relates to the technical field of trace gas optical sensing, in particular to a photoacoustic spectrometry gas detection system and method based on a hollow-core optical fiber and a quartz tuning fork, and the system comprises a signal generation module, a laser modulation module, a hollow-core optical fiber enhanced detection module and a signal processing module, the system performs long-range interaction with to-be-measured gas in the hollow-core optical fiber by modulating laser, thermal expansion generated after light energy is absorbed is transmitted to the mechanically coupled quartz tuning fork through the optical fiber wall, the quartz tuning fork converts vibration into an electric signal through a piezoelectric effect, and finally the gas concentration is obtained through treatment. According to the invention, the bottleneck that the optical path is limited in the traditional technology is broken through, the detection sensitivity is greatly improved, and the application potential in trace and complex environment gas detection is expanded.

The utility model provides a weighting structure of quartz tuning forks, which is used for weighting a plurality of quartz tuning forks distributed in a tuning fork array, and comprises a mask plate which is arranged at an interval with the tuning fork array, and the spacing distance between the mask plate and the tuning fork array is greater than the thickness of a weighting layer on the quartz tuning forks; a mask window is formed in the position, corresponding to each weighting layer, of the mask plate. In the scheme, the mask plate and the tuning fork array are arranged at an interval, and the spacing distance between the mask plate and the tuning fork array is greater than the thickness of the weighting layer on the quartz tuning fork, so that the edge of the weighting layer can be prevented from being adhered to the inner wall of the mask window during weighting; therefore, the problem that in the prior art, a weighting layer of a small and medium-sized quartz tuning fork adheres to a mask to generate silver scraps is solved, and the preparation precision of the small-sized quartz tuning fork is improved.

The invention discloses an acetylene detection device and method based on a composite sensitized quartz tuning fork, and belongs to the field of photoacoustic spectrometry gas detection, and the device comprises the composite sensitized quartz tuning fork, a laser excitation module, a vibration generation module, a signal demodulation module and a main control computer. The inner side of the quartz tuning fork vibration arm is provided with a composite sensitized film composed of a reduced graphene oxide layer and palladium nano-clusters loaded on the surface of the reduced graphene oxide layer. During detection, the main control computer controls the vibration generation module to be in a high-impedance state and drives the laser excitation module to emit modulation laser to penetrate through a tuning fork vibration arm gap, and the signal demodulation module is used for synchronously demodulating a photoacoustic piezoelectric signal output by a tuning fork, so that the concentration information of acetylene gas is obtained. Through the implementation of the invention, the problems that a common quartz tuning fork in the prior art is low in response sensitivity to a trace gas photoacoustic signal and the detection accuracy is influenced by frequency drift caused by environment change due to the lack of a real-time resonant frequency calibration mechanism can be solved.

The invention provides a method for optimizing the temperature performance of a quartz tuning fork gyroscope, which comprises the following steps of: introducing an orthogonal deflection angle in a demodulation process to obtain that the ratio of an available orthogonal scale to an in-phase scale can represent the size of an incomplete orthogonal deflection angle of a gyroscope output signal and a reference demodulation signal; and when the actually measured orthogonal deflection angle is obtained, a corresponding physical model is established on the basis of mathematical rules of different deflection angles and temperatures, and real-time monitoring and compensation of the deflection angles at different temperatures are realized, so that when the orthogonal deflection angle is introduced later, the deflection angles at different temperatures can be monitored and compensated in real time. The phase of the reference demodulation signal is orthogonal to the phase of the gyroscope signal, so that the zero offset variation in the full-temperature range is improved, and the hysteresis effect of the gyroscope in the full-temperature range is reduced.

The invention discloses a photoinduced thermoelastic spectrum bi-component trace gas detection device and method based on an asymmetric quartz tuning fork, and the device comprises a tunable laser, a laser alignment system, a gas chamber, the asymmetric quartz tuning fork, an impedance amplifier, a control and data acquisition system and a computer. The tunable laser outputs a laser beam containing two modulation frequency components at the same time, the laser beam is shaped by the laser alignment system and then is emitted into the gas chamber, the laser beam and gas to be measured in the gas chamber are subjected to a periodic photo-thermal effect, and then the laser beam is irradiated to a stress sensitive area of the asymmetric quartz tuning fork. Two paths of photo-thermal current signals generated by the asymmetric quartz tuning fork are amplified and converted into two paths of voltage signals by the impedance amplifier, the two paths of voltage signals are synchronously acquired by the control and data acquisition system, finally, filtering and second harmonic demodulation are performed by the computer, and concentration information of gas to be detected is obtained through inversion. According to the invention, the sensitivity, the stability and the system integration degree of double-component trace gas measurement can be obviously improved.

The invention discloses a photo-thermal spectrum device and method based on orthogonal pseudo-random code modulation, and the device comprises a control and signal processing unit, a pseudo-random code generator, a laser driver, a tunable laser, a collimator, an air chamber, a focusing lens, a quartz tuning fork, a pre-amplifier, a data collector, and a related demodulator. A pseudo-random code sequence with good self-correlation and cross-correlation characteristics is used for carrying out binary orthogonal modulation on laser intensity, and weak photo-thermal signals are extracted from strong noise through a correlation demodulation technology. The method has the advantages that the method is insensitive to narrow-band noise due to the broadband modulation characteristic, any noise irrelevant to pseudo-random codes can be effectively suppressed by relevant calculation, and the method has extremely high anti-interference capability; related processing is equivalent to long-time energy accumulation, and the noise bandwidth can be compressed; the broadband characteristic of the pseudo-random code enables the pseudo-random code to cover the drift range of the resonant frequency of the quartz tuning fork, and the system is higher in adaptability to environmental changes and higher in stability.

The invention discloses a light-induced thermoelastic multi-component gas detection device and method based on quadrature modulation, which adopts a technical path combining double-path quadrature phase modulation and single-path quadrature demodulation, that is, two tunable lasers are respectively driven by sinusoidal signals with the same modulation frequency but orthogonal phases; the two laser beams are combined by the wavelength division multiplexer, collimated by the collimator, acted by the gas chamber and the gas and focused by the lens and then radiated to the surface of the quartz tuning fork, a piezoelectric signal generated by the quartz tuning fork comprises excitation mixing information of the two gases, and the signal is amplified by the preamplifier and then sent to the lock-in amplifier; and the phase-locked amplifier synchronously calculates two components X and Y which are orthogonal to each other according to a reference signal with the same frequency as the laser modulation signal, and the two components respectively and independently correspond to the concentration information of the two target gases, so that real-time, synchronous and crosstalk-free measurement of the two-component gases is realized.

The application discloses a quartz vibrating beam accelerometer differential measurement system and a use method thereof, which comprises a frequency difference circuit module, a digital frequency synthesis circuit module and a frequency measurement module, the frequency difference circuit module is used for completing subtraction operation of square wave signal frequency; the digital frequency synthesis circuit module is used for synthesizing the minuend frequency and the subtrahend frequency in the frequency difference circuit module; and the frequency measurement module is used for measuring the output frequency in the frequency difference circuit module and controlling the digital frequency synthesis circuit module; according to the synthesized minuend frequency and the subtrahend frequency in the digital frequency synthesis circuit module, the frequency difference circuit module performs difference processing on two square wave signals, and inputs the difference-processed signal into the frequency measurement module, so that the real-time output frequency of the accelerometer is measured, the differential measurement is completed, the frequency and scale factor drift of the quartz vibrating beam accelerometer caused by temperature change can be effectively inhibited, the requirement on the frequency measurement method accuracy can be reduced, and the resolution is effectively improved.

The application discloses a gold nanorod enhanced photothermal elastic gas detection system and a detection method, which are used for improving the universality of the gas detection system. The system comprises an adjustable laser, a gas cell and a quartz tuning fork. The light receiving area of the quartz tuning fork is arranged at the corresponding position of the modulated laser output by the adjustable laser. The light receiving area is provided with a photoelectric conversion film coating. The photoelectric conversion film coating comprises gold nanorod material deposited on the surface of the quartz tuning fork. The longitudinal localized surface plasmon resonance absorption peak of the gold nanorod material is matched with the absorption wavelength band of the to-be-detected gas. When the modulated laser emitted by the gas cell irradiates the photoelectric conversion film coating, the gold nanorod material enhances the absorption of the modulated laser through the localized surface plasmon resonance effect and converts the modulated laser into heat energy. The heat energy generated by the photoelectric conversion film coating is transmitted to the quartz tuning fork, so that the quartz tuning fork generates thermal elastic deformation and excites the quartz tuning fork to vibrate and output a gas concentration electric signal.

The invention provides a nanoscale resolution vector electric field imaging device, and relates to the field of quantum imaging. The vector electric field imaging device comprises a quartz tuning fork which is movably arranged relative to the upper surface of a to-be-tested sample and is configured to perform simple harmonic vibration along a first direction; the probe is fixedly arranged on the lower surface of the quartz tuning fork and is configured to perform simple harmonic vibration along the first direction along with the quartz tuning fork, and an NV color center is carried in the probe; the microwave radiation module is configured to emit microwave pulses to the probe when the probe is located at the highest point or the lowest point of simple harmonic vibration, so that the NV color center accumulates phase information; the fluorescence acquisition module is configured to send laser to the probe and acquire fluorescence excited by the NV color center to obtain a fluorescence signal; and a processing module configured to perform vector electric field imaging based on the fluorescence signal.

The application discloses a Fourier photo-thermal gas detection device and method, and belongs to the technical field of gas detection. In view of the problems of narrow spectral response range, low power tolerance and the need for refrigeration of a light detector in an existing Fourier transform spectrum, a Fourier photo-thermal gas detection device is designed, a thermal light source is used as an excitation light source of absorption effect, the thermal light source is subjected to unified intensity modulation of wide spectrum light through an intensity modulation assembly and phase modulation through an interferometer assembly; the broadband light emitted after being subjected to double modulation is partially absorbed after acting on gas molecules, a quartz tuning fork light detector assembly effectively collects transmitted light, extracts resonance components in the transmitted light and converts the resonance components into electrical signals; the generated electrical signals are sequentially subjected to processing through a signal amplification assembly, a phase-sensitive demodulation assembly and a Fourier transform assembly, and composition discrimination and concentration inversion of a target gas are realized through the processed signals.

The application provides a quartz tuning fork gyroscope, comprising a tuning fork structure, a first cover plate and a second cover plate; the tuning fork structure is clamped between the first cover plate and the second cover plate, and the tuning fork structure comprises a tuning fork body and an outer frame, and the tuning fork body is built in the outer frame; the tuning fork body comprises a pair of driving parts, a pair of detecting parts, a connecting beam and a coupling beam, one end of the coupling beam is connected with the pair of driving parts, the other end is connected with the pair of detecting parts, and the tuning fork body is connected with the outer frame through the connecting beam; the detecting part comprises a detecting fork finger and a detecting hammer head connected with the detecting fork finger; the detecting fork finger has opposite first opposite surfaces, the first opposite surfaces are provided with first detecting electrodes, the detecting hammer head has opposite second opposite surfaces, and the second opposite surfaces are provided with second detecting electrodes; one side of the first cover plate facing the tuning fork structure is provided with third detecting electrodes, and one side of the second cover plate facing the tuning fork structure is provided with fourth detecting electrodes, so that differential capacitance type detection is realized, and the detection precision of the quartz tuning fork gyroscope is improved.

The invention discloses a quartz tuning fork frequency response curve rapid measurement system and method, and belongs to the technical field of quartz enhanced laser spectrums.The quartz tuning fork frequency response curve rapid measurement system comprises a signal generator, a quartz tuning fork, a trans-impedance amplifier, an analog-to-digital converter and a microprocessor which are connected in sequence. The signal generator is used for generating a chirp signal; the quartz tuning fork is used for receiving the chirp signal and generating piezoelectric current due to mechanical vibration; the trans-impedance amplifier is used for converting the piezoelectric current into a voltage signal and amplifying the voltage signal; the analog-to-digital converter is used for carrying out data acquisition on the amplified voltage signal; and the microprocessor is used for fitting the acquired data to obtain a frequency response curve of the quartz tuning fork. The chirp signal covers the whole resonance frequency band of the quartz tuning fork at a time, and the response curve of the quartz tuning fork is rapidly obtained. The test efficiency of frequency response is obviously improved, and the calibration time of the quartz tuning fork is greatly shortened.

The application discloses a kind of gas concentration detection method and system for acetylene, belong to gas detection technical field, the method is applied to including oscillating arm and composite sensitized film quartz tuning fork;Composite sensitized film is coated in the side of oscillating arm;The method includes to quartz tuning fork is applied sweep excitation, obtains current resonance frequency;Quartz tuning fork is placed in the acetylene environment to be measured, and time sequence resonance frequency is obtained;According to current resonance frequency control drive laser irradiation acetylene environment to be measured, to obtain time sequence piezoelectric signal;According to time sequence resonance frequency obtains first gas concentration and according to time sequence piezoelectric signal obtains second gas concentration;According to time sequence resonance frequency, first gas concentration, time sequence piezoelectric signal and second gas concentration obtain the target gas concentration of acetylene environment to be measured.Therefore, by implementing the present application, the technical problem that prior art cannot accurately, quickly detect acetylene concentration can be solved, for improving the precision of detection.

The application discloses a time division multiplexing quartz enhanced photoacoustic spectroscopy oil dissolved gas detection system and method, and belongs to the field of power equipment online monitoring and photoelectric sensing technology. The system comprises a laser excitation unit, an optical switch, a micro gas chamber, an acoustic-electric transducer, an acoustic resonance enhancement structure, a degassing unit and a signal processing unit. The laser excitation unit comprises at least two lasers, which are respectively used for exciting different to-be-detected gases; the optical switch alternately selects each laser beam according to a preset time sequence to realize time division multiplexing injection. The micro gas chamber has a volume of only 1.6 mL, and is internally integrated with a quartz tuning fork and a collinear acoustic micro resonator, so that the photoacoustic signal can be enhanced by about 20 times. The signal processing unit demodulates the second harmonic component through a lock-in amplifier, and obtains the concentration of each gas through computer inversion. The application realizes the simultaneous detection of multi-component gases by using a single detection module through the time division multiplexing technology, has the advantages of high sensitivity and fast response speed, and is suitable for the online monitoring of early fault characteristic gases of a transformer.

The invention discloses a quick-response laser spectrum gaseous trace water detection device and a detection device. The device comprises a quartz tuning fork assembly, wherein the quartz tuning fork assembly comprises a connecting base, two vibrating arms and an electrode; the standing wave generation assembly comprises an off-axis resonant tube, and an incident window and an emergent window which are located at the two ends of the off-axis resonant tube; the air inlet and the air outlet are close to two ends of the off-axis resonance tube; the off-axis resonant tube is provided with a coupling opening, and the coupling opening is hermetically covered with a prestressed film. The axial direction of the off-axis resonance tube is the X direction, the extension direction of the vibration arms is the Y direction, in the X direction, one vibration arm is located on one side of the other vibration arm, and a preset distance is reserved between the vibration arms and the prestressed film; the base assembly is detachably connected with the off-axis resonance tube. By introducing a non-contact design, a detachable off-axis resonant tube and a prestressed membrane acoustic coupling structure, rapid and accurate detection of water molecules is realized.

The invention discloses a multi-gas sensing device based on a middle and far infrared super-continuum spectrum, which comprises a middle and far infrared super-continuum spectrum laser, a collimating lens, a rotary filtering device, a gas pool, a focusing lens and a quartz tuning fork which are sequentially arranged along a light path, the quartz tuning fork is electrically connected with a lock-in amplifier, and the lock-in amplifier is electrically connected with a computer. The middle and far infrared super-continuum spectrum laser comprises a seed source, a thulium-doped optical fiber amplifier, a ZBLAN optical fiber, an As2S3 optical fiber and an As2Se3 optical fiber; and a plurality of narrow-band optical filters with different central wavelengths are mounted on a turntable of the rotary filtering device. The middle and far infrared super-continuum spectrum laser used by the device can realize middle and far infrared super-continuum spectrum laser output with the spectral range covering 2-10 microns and the output power reaching 300 mW; according to the device, multi-gas sensing can be effectively carried out, the minimum detection limit reaches ppb level, and the harsh requirements of tip application scenes such as environment trace pollution monitoring, industrial safety early warning and high-precision medical diagnosis can be met.