Cantilever beam probe of atomic force microscope, preparation method and imaging method

Abstract

The invention provides a cantilever beam probe of an atomic force microscope, a preparation method and an imaging method, and relates to the technical field of semiconductor testing. The method comprises the following steps: fixing a cantilever beam of a first type of atomic force microscope probe with a nanoscale needle tip at the head end on a needle tip of a second type of atomic force microscope probe in a curing connection mode, the cantilever beam probe of the second type of atomic force microscope takes the nanoscale needle tip of the first type of atomic force microscope probe as the needle tip of the cantilever beam probe of the second type of atomic force microscope; wherein the second type of atomic force microscope probe is a micron-sized needle tip, and the micron-sized metal needle tip is formed on a cantilever beam of the quartz tuning fork; one surface, back to the nano-scale needle tip, of the cantilever beam of the first-type atomic force microscope probe is fixedly connected with the micron-scale needle tip, and the fixedly connected position is close to the tail end of the cantilever beam of the first-type atomic force microscope probe; the problem that when a traditional qPlus probe is used for magnetic domain imaging of a magnetic material, enough resolution is difficult to achieve can be solved.

Description

Technical Field

[0001] The invention relates to the technical field of atomic force microscope imaging, and in particular to a cantilever beam probe of an atomic force microscope, a preparation method and an imaging method. Background Art

[0002] The quartz tuning fork has high elastic constant and low thermal drift characteristics. It detects signals through the piezoelectric effect, which makes the qPlus probe technology come into being and shows excellent test performance in low temperature and ultra-high vacuum environment. The qPlus probe is particularly suitable for high-precision mechanical measurements in atomic force microscopy (AFM). Its high sensitivity and high stability make it an ideal choice for nanoscale surface detection.

[0003] Magnetic atomic force microscopy (MFM) has a wide range of applications in magnetic storage, magnetic material research and development, semiconductor new material research, nanomaterials and biochemistry. Its core component, the magnetic atomic force microscope probe, is usually coated with a 10-50 nanometer thick magnetic metal layer or alloy (such as Ni, Co, etc.) on the surface of an ordinary topography probe to achieve a sensitive response to the magnetic field on the sample surface. In order to observe the magnetic domain structure of magnetic materials in low temperature and ultra-high vacuum environments, researchers also tried to use qPlus probes made of magnetic metals as magnetic atomic force microscope probes.

[0004] However, traditional qPlus probes are usually made of metals such as Fe and W, and the curvature radius of their needle tips is often at the micron level. The micron-level curvature radius limits their precise perception of the magnetic field on the sample surface, especially in high-resolution magnetic imaging. It cannot provide sufficiently detailed magnetic domain structure information, resulting in difficulty in achieving sufficient resolution when performing magnetic domain imaging of magnetic materials. Summary of the invention

[0005] In view of this, the embodiments of the present invention provide a cantilever probe, preparation method and imaging method for an atomic force microscope to eliminate or improve one or more defects existing in the prior art, and solve the problem that the traditional qPlus probe is difficult to achieve sufficient resolution when imaging the magnetic domains of magnetic materials.

[0006] One aspect of the present invention provides a method for preparing a cantilever probe of an atomic force microscope, the method comprising the following steps:

[0007] A cantilever beam of a first type atomic force microscope probe with a nanoscale needle tip at the head end is fixed to the needle tip of a second type atomic force microscope probe by a solidification connection method to form a cantilever beam probe of the second type atomic force microscope with the nanoscale needle tip of the first type atomic force microscope probe as its needle tip; wherein the second type atomic force microscope probe is a micrometer-scale needle tip, and the micrometer-scale metal needle tip is formed on a cantilever beam of a quartz tuning fork; a side of the cantilever beam of the first type atomic force microscope probe that is opposite to the nanometer-scale needle tip is fixedly connected to the micrometer-scale needle tip, and the fixed connection position is close to the end of the cantilever beam of the first type atomic force microscope probe.

[0008] In some embodiments of the present invention, the first type of atomic force microscope probe is a magnetic atomic force microscope probe; the second type of atomic force microscope probe is a quartz tuning fork probe; or, the second type of atomic force microscope probe is a qPlus probe, and the tip of the qPlus probe is a metal tip.

[0009] In some embodiments of the present invention, the curing connection method includes welding or curable adhesive bonding.

[0010] In some embodiments of the present invention, when the curing connection mode is a curable adhesive bonding mode, fixing the cantilever beam of the first type atomic force microscope probe on the needle tip of the second type atomic force microscope probe by curing connection mode includes:

[0011] placing a curable colloid on the tip of the second type of atomic force microscope probe and / or on a fixed connection position of the cantilever beam of the first type of atomic force microscope probe;

[0012] The tip of the second type AFM probe is brought into contact with the fixed connection position of the cantilever of the first type AFM probe, so that the cantilever of the first type AFM probe is fixed on the tip of the second type AFM probe after the curable colloid is cured.

[0013] In some embodiments of the present invention, when the curing connection mode is a curable adhesive bonding mode, fixing the cantilever beam of the first type atomic force microscope probe on the needle tip of the second type atomic force microscope probe by curing connection mode includes:

[0014] contacting the tip of the second type of atomic force microscope probe with the fixed connection location of the cantilever beam of the first type of atomic force microscope probe;

[0015] A curable colloid is placed at a contact position to adhere the tip of the second type AFM probe to the fixed connection position of the cantilever of the first type AFM probe, so that the cantilever of the first type AFM probe is fixed on the tip of the second type AFM probe after the curable colloid is cured.

[0016] In some embodiments of the present invention, the method further comprises: cutting off the end of the cantilever beam of the first type atomic force microscope probe by using a cutting technique.

[0017] In some embodiments of the present invention, the cutting technique is ion beam cutting.

[0018] In some embodiments of the present invention, there is a preset tilt angle between the tip of the second type AFM probe and the cantilever beam of the first type AFM probe.

[0019] Another aspect of the present invention provides a cantilever probe for an atomic force microscope. The cantilever probe is prepared by the above-mentioned method for preparing the cantilever probe for an atomic force microscope.

[0020] Another aspect of the present invention provides an imaging method of an atomic force microscope, wherein the cantilever beam probe used in the method is prepared by the aforementioned method for preparing the cantilever beam probe of the atomic force microscope.

[0021] The cantilever probe, preparation method and imaging method of the atomic force microscope of the present invention can solve the problem that the traditional qPlus probe is difficult to achieve sufficient resolution when performing magnetic domain imaging of magnetic materials; by solidifying and connecting a preset probe with a probe cantilever having a nanoscale probe, the probe cantilever is transplanted to the end of the needle tip of the preset probe, so that its low thermal drift characteristic can be retained without sacrificing thermal stability, so that the entire probe system can maintain accurate measurement in a wider temperature range while obtaining nanoscale magnetic detection capabilities, thereby improving the resolution during magnetic domain imaging.

[0022] In addition, the second type of atomic force microscope probe is a quartz tuning fork probe with high mechanical sensitivity, which can accurately detect tiny force changes. In this way, for magnetic imaging at the nanoscale, the cantilever beam probe can capture subtle magnetic field changes, which can further improve the measurement accuracy and stability of the cantilever beam probe in magnetic atomic force microscope application scenarios, and can effectively avoid positioning errors caused by external vibrations or thermal disturbances during the scanning process of the probe, thereby improving the stability and reliability of the entire probe system and ensuring high resolution during the imaging process.

[0023] Additional advantages, purposes, and features of the present invention will be described in part in the following description, and will become apparent to those skilled in the art after studying the following, or may be learned from the practice of the present invention. The purposes and other advantages of the present invention may be achieved and obtained by the structures specifically indicated in the specification and the accompanying drawings.

[0024] Those skilled in the art will appreciate that the objectives and advantages that can be achieved with the present invention are not limited to the above specific description, and the above and other objectives that can be achieved by the present invention will be more clearly understood from the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The drawings described herein are used to provide a further understanding of the present invention, constitute a part of the present application, and do not constitute a limitation of the present invention. In the drawings:

[0026] Figure 1 The present invention is a flowchart of a method for preparing a cantilever probe of an atomic force microscope provided in one embodiment of the present invention.

[0027] Figure 2 A needle tip of a first type atomic force microscope probe and a cantilever beam of a second type atomic force microscope probe provided by an embodiment of the present invention.

[0028] Figure 3 A schematic diagram of pre-processing a needle tip of a first type atomic force microscope probe provided by an embodiment of the present invention.

[0029] Figure 4 A schematic diagram of cutting a cantilever beam by an ion beam provided in one embodiment of the present invention. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the embodiments and the accompanying drawings. Here, the illustrative embodiments of the present invention and their descriptions are used to explain the present invention, but are not intended to limit the present invention.

[0031] It should also be noted that, in order to avoid obscuring the present invention due to unnecessary details, only structures and / or processing steps closely related to the solutions according to the present invention are shown in the accompanying drawings, while other details that are not closely related to the present invention are omitted.

[0032] It should be emphasized that the term “include / comprises” when used herein refers to the presence of features, elements, steps or components, but does not exclude the presence or addition of one or more other features, elements, steps or components.

[0033] It should also be noted that, unless otherwise specified, the term “connection” herein may refer not only to a direct connection but also to an indirect connection involving an intermediate.

[0034] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the accompanying drawings, the same reference numerals represent the same or similar components, or the same or similar steps.

[0035] The following are some explanations of the terms involved in this application:

[0036] Probe: A slender tool commonly used in various scientific experiments and industrial applications, usually used to contact or measure the surface of a material, or used for current conduction, signal detection and other functions in certain technical applications. The material of the preset probe usually has good mechanical strength and conductivity, and can adapt to micro-scale operations, especially in the fields of magnetic force microscopy (MFM), atomic force microscopy (AFM), nanotechnology and electronic equipment manufacturing.

[0037] Cantilever Beam: Cantilever beams are usually very slender, and their sizes can be in the micrometer or even nanometer level. Its length is generally between tens and hundreds of micrometers, while its width and thickness are usually only a few micrometers or less. Cantilever beams are a very critical component in equipment such as magnetic force microscopes and atomic force microscopes. Their main function is to support the probe at one end and allow the probe to scan along the surface of the sample. The probe is usually located at the free end of the cantilever beam, while the other end of the cantilever beam is fixed to the probe control system. Cantilever beams are usually designed to have a certain elastic modulus, so that they can accurately measure contact force, friction, surface hardness, etc. Changes in these forces will cause the cantilever beam to bend, which is reflected by the laser beam to sensors such as photodiodes and converted into electrical signals, thereby achieving high-precision measurements.

[0038] Quartz tuning fork probe: refers to a probe made by fixing one arm of a quartz tuning fork on a probe holder and bonding a tungsten wire needle tip that has been electrochemically corroded to the other arm. The tuning fork vibrates by mechanically exciting the piezoelectric ceramic, detecting the force between the needle tip and the sample surface, and obtaining the vibration signal of the tuning fork through the piezoelectric effect. In the actual working process, since the vibration signal generated by the quartz tuning fork is very weak, only at the nA level, it is necessary to use a preamplifier to amplify the vibration signal, and use a lock-in amplifier (LIA) to obtain the signal. The curve of the tuning fork vibration signal can be obtained in the lock-in amplifier through the frequency sweep operation, and the vibration frequency of the exciting piezoelectric ceramic can be adjusted to the resonant frequency position of the tuning fork probe to ensure that the probe operates at the resonant frequency.

[0039] The following is a detailed introduction to the method for preparing the cantilever probe of the atomic force microscope provided in the present application.

[0040] like Figure 1 As shown, an embodiment of the present application provides a method for preparing a cantilever probe of an atomic force microscope, the method comprising at least the following steps:

[0041] Step S101, fix the cantilever of the first type AFM probe with a nano-scale tip at the head end to the tip of the second type AFM probe by curing connection to form a cantilever probe of the second type AFM with the nano-scale tip of the first type AFM probe as its tip.

[0042] The second type of atomic force microscope probe is a micrometer-sized needle tip, and the micrometer-sized metal needle tip is formed on a cantilever beam of a quartz tuning fork. The side of the cantilever beam of the first type of atomic force microscope probe that is opposite to the nanometer-sized needle tip is fixedly connected to the micrometer-sized needle tip, and the fixed connection position is close to the end of the cantilever beam of the first type of atomic force microscope probe.

[0043] In some embodiments of the present invention, the first type of atomic force microscope probe is a magnetic atomic force microscope probe; the second type of atomic force microscope probe is a quartz tuning fork probe; or, the second type of atomic force microscope probe is a qPlus probe, and the tip of the qPlus probe is a metal tip.

[0044] An atomic force microscope probe refers to a tool that can perform precision surface contact, measurement, and operation, including but not limited to an iron (Fe) probe, a cobalt (Co) probe, or a nickel (Ni) probe; alternatively, an atomic force microscope probe refers to a probe covered with a magnetic coating, which is obtained by coating a 10 to 50 nanometer thick magnetic metal layer or alloy (such as nickel, cobalt, etc.) on the surface of a non-magnetic metal probe.

[0045] In some embodiments of the present invention, the movement of the first type AFM probe and / or the second type AFM probe is controlled by a pneumatic or electric platform, a three-dimensional mobile platform or a servo system so that the end of the cantilever of the first type AFM probe contacts the tip of the second type AFM probe, and after the contact, a preset tilt angle exists between the tip of the second type AFM probe and the cantilever of the first type AFM probe.

[0046] The preset tilt angle is a preset angle range between the tip of the second type atomic force microscope probe and the cantilever beam of the first type atomic force microscope probe, including 90° to 85°, 70° to 85°, etc. The contact force control between the probe and the sample surface is adjusted by adjusting the preset tilt angle. This embodiment does not limit the range of the preset tilt angle.

[0047] In some embodiments of the present invention, the initial positional relationship between the first type AFM probe and the second type AFM probe is fixed, and the first type AFM probe and / or the second type AFM probe are controlled to move in a preset direction and a preset distance, so that the end of the cantilever beam of the first type AFM probe contacts the tip of the second type AFM probe. The preset direction includes a horizontal direction or a vertical direction.

[0048] For example, taking a pneumatic or electric platform as an example, the pneumatic platform or electric drive is used to control the first type of atomic force microscope probe and / or the second type of atomic force microscope probe to be positioned with precise XYZ axis coordinates; under the adjustment of the control system, the second type of atomic force microscope probe above the end of the cantilever beam of the first type of atomic force microscope probe is controlled to move down according to a preset distance, so that the tip of the second type of atomic force microscope probe is precisely in contact with the end of the cantilever beam; in this process, the control system adjusts the movement speed and force of the platform in real time through a feedback loop to ensure that no deviation or damage occurs during the pre-contact process.

[0049] In some embodiments of the present invention, the initial position relationship between the first type of atomic force microscope probe and the second type of atomic force microscope probe is fixed, and the movement of the first type of atomic force microscope probe and / or the second type of atomic force microscope probe is controlled in a preset direction and a preset distance. During the movement, the contact force is monitored and adjusted in real time by a force sensor to ensure that the contact force between the cantilever beam of the first type of atomic force microscope probe and the tip of the second type of atomic force microscope probe remains within an appropriate range.

[0050] For example, taking the servo motor control platform as an example, the second type of atomic force microscope probe is located above the cantilever beam of the first type of atomic force microscope probe, and the servo motor control platform is precisely moved in the three axial directions of X-axis, Y-axis and Z-axis, and the second type of atomic force microscope probe is controlled in the Z-axis direction to approach the end of the cantilever beam of the first type of atomic force microscope probe; then, the position of the second type of atomic force microscope probe is carefully adjusted through the X-axis and Y-axis to ensure that the needle tip of the second type of atomic force microscope probe is precisely aligned with the predetermined contact position; when the second type of atomic force microscope probe contacts the cantilever beam, the contact force is monitored by the force sensor and adjusted in real time to ensure that the contact force between the second type of atomic force microscope probe and the cantilever beam remains within an appropriate range.

[0051] In actual implementation, refer to Figure 2 The magnetic atomic force microscope can also be manually controlled by controlling the displacement and needle lowering system of the magnetic atomic force microscope to control the contact between the tip of the first type atomic force microscope probe and the end of the cantilever beam of the second type atomic force microscope probe.

[0052] In some embodiments of the present invention, the curing connection method includes welding or curable adhesive bonding; in actual implementation, the preset probe and quartz tuning fork curing connection method can also be other connection methods, such as crimping connection. This embodiment does not limit the implementation method of the curing connection method.

[0053] Among them, the welding method refers to heating or melting the metal material to form a firm connection between the nanoscale tip of the first type atomic force microscope probe and the contact part of the cantilever beam of the second type atomic force microscope; the curable adhesive bonding method refers to using an adhesive (such as epoxy resin, cyanoacrylate, polyurethane, etc.) to bond the nanoscale tip of the first type atomic force microscope probe and the contact part of the cantilever beam of the second type atomic force microscope together.

[0054] In the case of curing and connecting the nano-scale needle tip of the first type atomic force microscope probe and the cantilever beam of the second type atomic force microscope by using a curable adhesive bonding method, the nano-scale needle tip of the first type atomic force microscope probe or the cantilever beam of the second type atomic force microscope is pre-treated by the curable colloid so that the nano-scale needle tip of the first type atomic force microscope probe or the cantilever beam of the second type atomic force microscope has adhesion, so that after the curable colloid is cured, the cantilever beam of the first type atomic force microscope probe is fixed on the needle tip of the second type atomic force microscope probe. For example: Reference Figure 3 , Taking the first type of atomic force microscope probe as Fe probe as an example, the nano-needle tip of the Fe probe is pretreated by epoxy resin glue.

[0055] Specifically, when the curing connection method is a curable glue bonding method, the cantilever beam of the first type of atomic force microscope probe is fixed to the needle tip of the second type of atomic force microscope probe by the curing connection method, including: placing a curable colloid on the needle tip of the second type of atomic force microscope probe and / or on the fixed connection position of the cantilever beam of the first type of atomic force microscope probe; contacting the needle tip of the second type of atomic force microscope probe with the fixed connection position of the cantilever beam of the first type of atomic force microscope probe, so that the cantilever beam of the first type of atomic force microscope probe is fixed on the needle tip of the second type of atomic force microscope probe after the curable colloid is cured.

[0056] Alternatively, in the case of using a curable adhesive to bond and connect the nanoscale tip of a first type of atomic force microscope probe and the cantilever of a second type of atomic force microscope, after the nanoscale tip of the first type of atomic force microscope probe contacts the cantilever of the second type of atomic force microscope, the contact position is processed so that the cantilever of the first type of atomic force microscope probe is fixed on the tip of the second type of atomic force microscope probe.

[0057] Specifically, in the case where the curing connection method is the curable adhesive bonding method, the cantilever beam of the first type of atomic force microscope probe is fixed to the needle tip of the second type of atomic force microscope probe by the curing connection method, including: contacting the needle tip of the second type of atomic force microscope probe with the fixed connection position of the cantilever beam of the first type of atomic force microscope probe; placing a curable colloid in the contact position to adhere the needle tip of the second type of atomic force microscope probe to the fixed connection position of the cantilever beam of the first type of atomic force microscope probe, so that the cantilever beam of the first type of atomic force microscope probe is fixed on the needle tip of the second type of atomic force microscope probe after the curable colloid is cured.

[0058] In some embodiments of the present invention, the cantilever beam of the first type of atomic force microscope probe includes a single cantilever beam, or is a cantilever beam obtained by cutting the original structure of the first type of atomic force microscope probe including the cantilever beam. Specifically, when the cantilever beam of the first type of atomic force microscope probe refers to the original structure of the first type of atomic force microscope probe including the cantilever beam, it also includes: cutting off the end of the cantilever beam of the first type of atomic force microscope probe by using a cutting technology.

[0059] In some embodiments of the present invention, the cutting technique is ion beam cutting. Figure 4 ; Send the probe into the focused ion beam (FIB) chamber and use the ion beam to cut the end of the cantilever beam.

[0060] In summary, the method for preparing a cantilever probe for an atomic force microscope provided in this embodiment is to fix a cantilever of a first type of atomic force microscope probe with a nanometer-scale needle tip at the head end to the needle tip of a second type of atomic force microscope probe by a solidification connection method, so as to form a cantilever probe for an atomic force microscope of the second type using the nanometer-scale needle tip of the first type of atomic force microscope probe as its needle tip; wherein the second type of atomic force microscope probe is a micrometer-scale needle tip, and the micrometer-scale metal needle tip is formed on a cantilever of a quartz tuning fork; a side of the cantilever of the first type of atomic force microscope probe that is opposite to the nanometer-scale needle tip is connected to the micrometer-scale needle tip. The tip of the nanometer-scale probe is fixedly connected, and the fixed connection position is close to the end of the cantilever of the first type atomic force microscope probe; it can solve the problem that the traditional qPlus probe is difficult to achieve sufficient resolution when performing magnetic domain imaging of magnetic materials; by solidifying the preset probe and the probe cantilever with a nanometer-scale probe, the probe cantilever is transplanted to the end of the tip of the preset probe, so that its low thermal drift characteristics can be retained without sacrificing thermal stability, so that the entire probe system can maintain accurate measurement in a wider temperature range while obtaining nanometer-scale magnetic detection capabilities, thereby improving the resolution of magnetic domain imaging.

[0061] In addition, the second type of atomic force microscope probe is a quartz tuning fork probe with high mechanical sensitivity, which can accurately detect tiny force changes. In this way, for magnetic imaging at the nanoscale, the cantilever beam probe can capture subtle magnetic field changes, which can further improve the measurement accuracy and stability of the cantilever beam probe in magnetic atomic force microscope application scenarios, and can effectively avoid positioning errors caused by external vibrations or thermal disturbances during the scanning process of the probe, thereby improving the stability and reliability of the entire probe system and ensuring high resolution during the imaging process.

[0062] Another aspect of the present invention provides a cantilever probe for an atomic force microscope. The cantilever probe is prepared by the above-mentioned method for preparing the cantilever probe for an atomic force microscope.

[0063] Another aspect of the present invention provides an imaging method of an atomic force microscope, wherein the cantilever beam probe used in the method is prepared by the aforementioned method for preparing the cantilever beam probe of the atomic force microscope.

[0064] It should be understood by those skilled in the art that the exemplary components, systems and methods described in conjunction with the embodiments disclosed herein can be implemented in hardware, software or a combination of the two. Whether it is performed in hardware or software depends on the specific application and design constraints of the technical solution. Professional and technical personnel can use different methods to implement the described functions for each specific application, but such implementation should not be considered to be beyond the scope of the present invention. When implemented in hardware, it can be, for example, an electronic circuit, an application specific integrated circuit (ASIC), appropriate firmware, a plug-in, a function card, etc. When implemented in software, the elements of the present invention are programs or code segments used to perform the required tasks. The program or code segment can be stored in a machine-readable medium, or transmitted on a transmission medium or a communication link via a data signal carried in a carrier.

[0065] It should be clear that the present invention is not limited to the specific configuration and processing described above and shown in the figures. For the sake of simplicity, a detailed description of the known method is omitted here. In the above embodiments, several specific steps are described and shown as examples. However, the method process of the present invention is not limited to the specific steps described and shown, and those skilled in the art can make various changes, modifications and additions, or change the order between the steps after understanding the spirit of the present invention.

[0066] In the present invention, features described and / or illustrated for one embodiment may be used in the same or similar manner in one or more other embodiments, and / or combined with features of other embodiments or replace features of other embodiments.

[0067] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the embodiments of the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A method for preparing a cantilever probe for an atomic force microscope, characterized in that: The method comprises the following steps: A cantilever beam of a first type of atomic force microscope probe with a nanoscale needle tip at the head end is fixed to the needle tip of a second type of atomic force microscope probe by a solidification connection method to form a cantilever beam probe of the second type of atomic force microscope with the nanoscale needle tip of the first type of atomic force microscope probe as its needle tip; wherein the second type of atomic force microscope probe is a micrometer-scale needle tip, and the micrometer-scale metal needle tip is formed on a cantilever beam of a quartz tuning fork; a side of the cantilever beam of the first type of atomic force microscope probe that is opposite to the nanometer-scale needle tip is fixedly connected to the micrometer-scale needle tip, and the fixed connection position is close to the end of the cantilever beam of the first type of atomic force microscope probe.

2. The method for preparing a cantilever probe of an atomic force microscope according to claim 1, characterized in that: The first type of AFM probe is a magnetic AFM probe; The second type atomic force microscope probe is a quartz tuning fork probe; or, the second type atomic force microscope probe is a qPlus probe, and the needle tip of the qPlus probe is a metal needle tip.

3. The method for preparing a cantilever probe for an atomic force microscope according to claim 1 or 2, characterized in that: The curing connection method includes welding or curable adhesive bonding.

4. The method for preparing a cantilever probe for an atomic force microscope according to claim 3, characterized in that: In the case where the curing connection mode is the curable adhesive bonding mode, fixing the cantilever beam of the first type atomic force microscope probe on the needle tip of the second type atomic force microscope probe by curing connection mode includes: Placing a curable colloid on the tip of the second type of atomic force microscope probe and / or on a fixed connection position of the cantilever beam of the first type of atomic force microscope probe; The tip of the second type AFM probe is brought into contact with the fixed connection position of the cantilever of the first type AFM probe, so that the cantilever of the first type AFM probe is fixed on the tip of the second type AFM probe after the curable colloid is cured.

5. The method for preparing a cantilever probe for an atomic force microscope according to claim 3, characterized in that: In the case where the curing connection mode is the curable adhesive bonding mode, fixing the cantilever beam of the first type atomic force microscope probe on the needle tip of the second type atomic force microscope probe by curing connection mode includes: contacting the tip of the second type of atomic force microscope probe with the fixed connection position of the cantilever beam of the first type of atomic force microscope probe; A curable colloid is placed at a contact position to adhere the tip of the second type AFM probe to the fixed connection position of the cantilever of the first type AFM probe, so that the cantilever of the first type AFM probe is fixed on the tip of the second type AFM probe after the curable colloid is cured.

6. The method for preparing a cantilever probe for an atomic force microscope according to claim 3, characterized in that: The method further comprises: The end of the cantilever of the first type of atomic force microscope probe is cut off by using a cutting technique.

7. The method for preparing a cantilever probe for an atomic force microscope according to claim 6, characterized in that: The cutting technique is ion beam cutting.

8. The method for preparing a cantilever probe for an atomic force microscope according to claim 1 or 2, characterized in that: There is a preset tilt angle between the tip of the second type atomic force microscope probe and the cantilever beam of the first type atomic force microscope probe.

9. A cantilever beam probe for an atomic force microscope, characterized in that: The cantilever beam probe is prepared by the method for preparing a cantilever beam probe for an atomic force microscope according to any one of claims 1 to 8.

10. An imaging method of an atomic force microscope, characterized in that: The cantilever beam probe used in the method is prepared by the method for preparing a cantilever beam probe for an atomic force microscope according to any one of claims 1 to 8.

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