In-situ measurement film temperature sensor based on blade

Abstract

The invention discloses a blade-based in-situ measurement film temperature sensor, which belongs to the technical field of film sensors for aero-engines, and comprises a multilayer film structure, the multilayer film structure is arranged on the surface of a blade, the multilayer film structure and the curved surface of the blade are manufactured in a conformal manner, the thickness of the multilayer film structure is micron-sized, and the thickness of the multilayer film structure is micron-sized. And in-situ measurement of the blade surface temperature is realized. According to the invention, non-disturbance temperature measurement is realized through an ultrathin conformal structure, high temperature resistance, fast response and high precision are realized, and the problem of temperature measurement of aero-engine blades under extreme working conditions is solved.

Description

Technical Field

[0001] The invention belongs to the technical field of thin film sensors for aircraft engines, and in particular relates to an in-situ measurement thin film temperature sensor based on blades. Background Art

[0002] In the field of internal temperature measurement of aircraft engines, accurate monitoring of blade surface temperature is the key to ensuring engine thermal efficiency, reliability and life. As the temperature before the turbine moves towards 2000~2250K (fourth to fifth generation engines), traditional temperature measurement technology faces significant challenges in high dynamic, high temperature and high pressure environments.

[0003] Traditional thermocouples need to be fixed by welding or gluing, which easily introduces additional thermal resistance and destroys the surface flow field. The lead wire is easy to break under high-speed rotation, resulting in signal transmission failure. The embedded couple method requires pre-embedded grooves, which weakens the structural strength of the blade.

[0004] Fiber Optic Temperature Measurement Technology The fiber Bragg grating (FBG) or Raman scattering principle has anti-electromagnetic interference characteristics, but there is black body radiation interference from the fiber material under high temperature and high pressure environment (the signal-to-noise ratio drops by 40% when >1500K), and the miniaturized packaging leads to an increase in the fiber brittle breakage rate (the failure rate reaches 32% when the rotation speed is >15000rpm); Microwave Radiometer Technology The temperature is inverted by receiving microwaves (frequency band 18-26.5GHz) radiated by blade heat. However, due to the multipath reflection of metal parts of the turbine disk, a phase distortion of ±15dB is generated on the three-dimensional surface, resulting in a temperature inversion error of more than ±25K. The use of temperature-indicating paint can only provide qualitative or semi-quantitative temperature distribution with low accuracy (±10°C). It needs to be disassembled for interpretation and cannot be monitored in real time. Infrared radiation temperature measurement is affected by emissivity uncertainty and environmental reflection interference, and the error is large on low emissivity surfaces (such as ceramic coated blades) (±7°C). Although fluorescence temperature measurement has high accuracy (±1°C), the stability of fluorescent materials in high-temperature combustion gases and the coupling technology are not yet mature.

[0005] The response time of traditional thermocouples is in milliseconds, which makes it difficult to capture transient temperature changes in blades. Although ultrasonic temperature measurement has a fast response, it can only reflect the average temperature and cannot achieve high spatial resolution measurement. Summary of the invention

[0006] The technical problem to be solved by the present invention is to provide a blade-based in-situ measurement thin film temperature sensor in view of the deficiencies in the above-mentioned prior art, so as to solve the technical problem that the existing sensors cannot achieve in-situ and turbulence-free temperature measurement on the surface of components.

[0007] The present invention adopts the following technical solutions: A blade-based in-situ measurement thin film temperature sensor comprises a multi-layer thin film structure, which is arranged on the surface of the blade. The multi-layer thin film structure and the curved surface of the blade are manufactured conformally, and the thickness of the multi-layer thin film structure is in the micron level, thereby realizing in-situ measurement of the blade surface temperature.

[0008] Preferably, the multilayer film structure includes a transition layer, an insulating layer, a positive electrode sensitive film and a negative electrode sensitive film from bottom to top. The positive electrode sensitive film and the negative electrode sensitive film are overlapped at the upper end to form a temperature sensing area. The positive electrode sensitive film and the negative electrode sensitive film constitute the cold end lead area of ​​the thermocouple at the lower end pin to lead out the temperature measuring thermoelectric potential.

[0009] Preferably, the thickness of the transition layer is 0.1-10 μm.

[0010] Preferably, the transition layer is made of NiCoCrAlY, with a specific composition of Ni 45%, Co 20%, Cr 20%, Al 14% and Y 1%.

[0011] Preferably, the thickness of the insulating layer is 5-30 μm.

[0012] Preferably, the insulating layer is Al 2 O 3 .

[0013] Preferably, the length of the positive electrode sensitive film and the negative electrode sensitive film is greater than or equal to 60 mm, the width is 0.5-5 mm, and the thickness is 0.5-5 μm.

[0014] Preferably, the positive electrode sensitive film is ITO, and the negative electrode sensitive film is In 2 O 3 .

[0015] Preferably, the area of ​​the temperature sensing region is greater than or equal to 16×5 mm.

[0016] Preferably, the material of the blade is a high temperature resistant nickel-based alloy Compared with the prior art, the present invention has at least the following beneficial effects: A blade-based in-situ measurement thin film temperature sensor adopts a multi-layer thin film structure (transition layer-insulating layer-thermoelectric sensitive layer). The multi-layer film is conformally manufactured with the blade alloy substrate surface. The multi-layer film has a thickness of microns, and the micron-level film fits perfectly with the blade surface, avoiding flow field interference caused by the protrusion of traditional thermocouple wires. The impact on the engine aerodynamic performance is negligible, and in-situ, turbulence-free temperature measurement of the blade surface is achieved.

[0017] Furthermore, the micron-level film fits perfectly to the blade surface and will not disrupt high-speed airflow like traditional raised sensors, thus ensuring the aerodynamic performance of the engine. The positive and negative film directly contact the blade surface, and the heat conduction path is extremely short. The measured response time is 15 microseconds, which is 60 times faster than traditional thermocouples and can capture transient temperature fluctuations (such as millisecond temperature changes caused by unstable combustion). The transition layer matches the thermal expansion of the blade material to prevent high-temperature cracking; the alumina insulation layer still maintains high resistance (>80kΩ) at 1000°C to avoid leakage; ITO / In 2 O 3 The film works continuously at 800°C for 50 hours with a sensitivity attenuation of <5%. The cold end lead is directly connected to the acquisition system through a high-temperature wire, and the data is updated every 0.1 seconds, which can warn of the risk of blade overheating 30 minutes in advance; the sensor can be invisible on the surface of the blade without affecting the operation of the engine, and can also sense temperature changes as sensitively as the skin, which is crucial to improving the safety and life of aircraft engines.

[0018] Furthermore, in the NiCoCrAlY transition layer, Al forms a dense aluminum oxide protective layer at high temperature, isolating oxygen and corrosive gases, and preventing the base material from being oxidized and corroded. Co and Ni enhance the high temperature strength of the material and withstand the extreme high temperature of the engine blades. Cr and aluminum oxide work synergistically to resist corrosion such as salt spray and sulfides in the fuel gas, and avoid rapid failure of the coating. Experiments show that in a high-temperature corrosive environment, the service life is more than 3 times that of ordinary nickel-based alloys. The thermal expansion coefficient of the material is between the blade substrate (nickel alloy) and the upper insulating layer (aluminum oxide), which reduces stress cracking between layers when the temperature changes and ensures the stability of the sensor structure. Adding 1% yttrium (Y) can refine the material grains, enhance the bonding strength between the coating and the blade substrate, and prevent the coating from peeling off at high temperatures. Tests show that the bonding strength is 50% higher than that of yttrium-free coatings. It is suitable for common processes such as plasma spraying. After spraying, the coating is dense and has few pores, with low processing costs and easy large-scale production. The surface roughness after spraying is low and does not affect the aerodynamic performance of the blade. Taking into account the characteristics of high temperature protection, corrosion resistance, structural stability and easy processing, it can work stably and long-term in the extreme environment of aircraft engines, which is the key guarantee for the reliable operation of thin film temperature sensors.

[0019] Furthermore, the 10μm film prepared by magnetron sputtering and other processes has a smooth surface and low porosity, which avoids pinhole leakage or thermal stress cracking, takes into account both insulation strength and lightweight requirements, and the total thickness is controlled at the micron level to avoid disturbing the aerodynamic performance of the blade. It has high temperature resistance, strong corrosion resistance and dense structure to ensure reliable electrical insulation of the sensor in high temperature and corrosive gas flow at 1100℃.

[0020] Furthermore, the insulating layer is Al 2 O 3, effectively isolates the sensor electrode from the metal blade substrate, prevents high-temperature short circuit, is resistant to acid and alkali corrosion (such as hydrochloric acid, sulfuric acid, NaOH, etc.), can resist sulfide and salt spray corrosion in the fuel gas, and ensures the long-term stability of the sensor in the extreme environment of the engine.

[0021] Furthermore, the 2μm ultra-thin thickness of the positive / negative electrode sensitive film significantly reduces the heat capacity, shortening the thermal response time of the temperature sensing area to milliseconds, which is suitable for capturing transient temperature changes on the blade surface. The strip design covers a larger temperature measurement area. 2 O 3 The material's thermoelectric effect can detect temperature differences of 0.1°C, meeting the precise temperature measurement needs of aircraft engines. The micron-level total thickness (including transition layer and insulation layer) is conformal to the blade surface, and the surface roughness variation is <0.5μm, which avoids airflow separation or turbulence, and has a negligible impact on engine efficiency. The dense structure is achieved through the magnetron sputtering process, with no pores at a thickness of 2μm, and is resistant to high-temperature oxidation at 1100°C. The performance decay is <3% after 50 thermal cycles. It balances response speed, temperature measurement accuracy and structural reliability, and is particularly suitable for high-temperature, high-speed and dynamic temperature measurement scenarios of aircraft engine blades.

[0022] Furthermore, the temperature sensing area is a rectangular area, which covers a wider area than the traditional small size, can capture more temperature gradient signals, and improve sensitivity. Experiments show that the signal-to-noise ratio of the thermoelectric potential is improved by about 30% at this size; the ultra-thin structure is combined with a micron-level film, and the thermal response time is <20ms, which is suitable for capturing transient temperature changes on the blade surface. The rectangular structure is more resistant to bending stress than the slender electrode, and the electrode contact remains stable under blade vibration (>10000g centrifugal force). After 100 thermal cycles, the performance decay is <2%, achieving a balance between sensitivity, response speed and aerodynamic performance, which can not only accurately capture the temperature distribution of high-temperature gas flow, but also adapt to the extreme working conditions of aircraft engines.

[0023] In summary, the present invention realizes disturbance-free temperature measurement with an ultra-thin conformal structure, has high temperature resistance, fast response and high precision, and solves the temperature measurement problem of aircraft engine blades under extreme working conditions.

[0024] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings to be used in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0026] Figure 1It is a schematic diagram of the structural disassembly of the present invention; Figure 2 It is the overall structure diagram of the present invention.

[0027] Among them: 1. Blade; 2. Transition layer; 3. Insulation layer; 4. Cold end lead area; 5. Positive electrode sensitive film; 6. Negative electrode sensitive film; 7. Temperature sensing area. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "one side", "one end", "one side" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, in the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0030] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] It should be understood that when used in this specification and the appended claims, the terms "include" and "comprises" indicate the presence of described features, integers, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or combinations thereof.

[0032] It should also be understood that the terms used in the present specification are only for the purpose of describing specific embodiments and are not intended to limit the present invention. As used in the present specification and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include plural forms.

[0033] It should be further understood that the term "and / or" used in the present description and the appended claims refers to any and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0034] Various structural schematic diagrams of the embodiments disclosed in the present invention are shown in the accompanying drawings. These figures are not drawn to scale, and some details are magnified and some details may be omitted for the purpose of clear expression. The shapes of various regions and layers shown in the figures and the relative sizes and positional relationships therebetween are only exemplary, and may deviate in practice due to manufacturing tolerances or technical limitations, and those skilled in the art may additionally design regions / layers with different shapes, sizes, and relative positions according to actual needs.

[0035] The present invention provides an in-situ measurement thin film temperature sensor based on a blade, which is composed of a blade and a multi-layer thin film (transition layer-insulating layer-thermoelectric sensitive layer) to form an in-situ measurement thin film temperature sensor. The in-situ measurement thin film temperature sensor can improve the disturbance problem of the existing blade surface temperature measurement method on the internal flow field of the engine, and realize in-situ disturbance-free temperature measurement on the blade surface. By adopting magnetron sputtering technology and chemical vapor deposition technology, a multi-layer thin film structure is designed on a blade alloy substrate and two thermoelectrode sensitive films of different materials are prepared for measuring the blade surface temperature.

[0036] See also Figure 1 and Figure 2 The present invention provides a blade-based in-situ measurement thin film temperature sensor, comprising a blade 1, a transition layer 2, an insulating layer 3, a positive electrode sensitive film 5, a negative electrode sensitive film 6 and a temperature sensing area 7, as follows: A multilayer thin film structure is designed on the surface of blade 1. The multilayer thin film structure is conformally manufactured with the blade surface to form a thin film temperature sensor for in-situ measurement of the blade. The thin film temperature sensor for in-situ measurement of the blade is directly prepared on the blade surface to achieve in-situ measurement of the blade surface temperature.

[0037] The multilayer film structure is conformal to the blade surface and has a thickness of micron level, which can realize non-turbine temperature measurement on the blade surface. The multilayer film structure includes a transition layer 2, an insulating layer 3, a positive electrode sensitive film 5 and a negative electrode sensitive film 6 from bottom to top; the positive electrode sensitive film 5 and the negative electrode sensitive film 6 are overlapped at the upper end to form a temperature sensing area 7, and the positive electrode sensitive film 5 and the negative electrode sensitive film 6 form a cold end lead area 4 of the thermocouple at the lower end pin to lead out the temperature measurement thermoelectric potential. The temperature measurement data of the film temperature sensor is obtained in the cold end lead area 4 through the high-temperature lead, and is connected to the data acquisition equipment to realize real-time measurement of the blade surface temperature.

[0038] Among them, the thickness of the transition layer 2 is 0.1~10μm, the thickness of the insulating layer 3 is 5~30μm, the length of the positive electrode sensitive film 5 and the negative electrode sensitive film 6 is greater than or equal to 60mm, the width is 0.5~5mm, the thickness is 0.5~5μm, and the size of the temperature sensing area 7 is greater than or equal to 16×5mm.

[0039] Preferably, the blade 1 is an aircraft engine turbine rotor blade, and the material is a high-temperature resistant nickel-based alloy.

[0040] The material of the transition layer 2 is NiCoCrAlY, and the specific composition is Ni 40%~50%, Co 15%~25%, Cr 18%~22%, Al 12%~16% and Y 0.5%~1.5%.

[0041] Preferably, the specific composition of the transition layer 2 is Ni 45%, Co 20%, Cr 20%, Al 14% and Y 1%.

[0042] The material of the insulating layer 3 is Al 2 O 3 , which can ensure insulation performance at high temperatures.

[0043] The material of the positive electrode sensitive film 5 is ITO, and the material of the negative electrode sensitive film 6 is In 2 O 3 .

[0044] Preferably, PtRh10 / Pt film (positive electrode PtRh10, negative electrode Pt) is used, which has better high temperature stability (continuous operation for 6 hours at 1200°C). If transparent properties are required, a silicon nitride / ITO / silicon nitride "sandwich" protective layer can be deposited on the ITO surface to inhibit oxygen diffusion.

[0045] The lead wire has a diameter of 0.05~0.1 mm and is connected with high-temperature conductive glue (such as silver-based glue) and encapsulated by thermal spraying alumina coating to prevent erosion by high-speed airflow.

[0046] The working principle of the blade-based in-situ thin-film temperature sensor of the present invention is as follows: 1. Thermoelectric effect and temperature sensing The temperature sensing area 7 (hot junction) is based on the Seebeck effect: when the surface temperature of the blade changes, the positive electrode (PtRh10) and the negative electrode (Pt) materials generate a thermoelectric potential difference due to the temperature difference, and its value is calculated by the following formula: E = α ⋅Δ T in, α is the Seebeck coefficient (PtRh10 / Pt is approximately 10 μV / ℃), Δ T It is the temperature difference between the hot junction and the cold lead area.

[0047] 2. Signal transmission and compensation The cold end lead area 4 is connected to the data acquisition system through a high temperature lead, and a dynamic signal correction algorithm (such as lead-lag compensation) is used to reduce the transient temperature measurement error. For example, the output signal 13 is corrected in real time through closed-loop control by combining the N1 (low-pressure rotor speed) and T25 (compressor inlet temperature) parameters.

[0048] 3. High temperature stability mechanism Transition layer: NiCoCrAlY matches the thermal expansion coefficient of the blade substrate to release thermal stress.

[0049] Insulation layer: Al 2 O 3 A dense oxide layer is formed at high temperature, blocking the electrical conduction path between the substrate and the film.

[0050] The Seebeck coefficient of the PtRh10 / Pt heterojunction reaches 18.5 μV / ℃ at 2000K, which is 230% higher than that of the traditional K-type thermocouple. It can detect micro-temperature differences of 0.1K and meet the needs of blade boundary layer transition monitoring. The lead-lag compensation algorithm combined with the speed-temperature coupling parameter (N1 / T25) compresses the transient response delay from 10ms to 0.5ms, making the transient state temperature measurement error <±0.3%; NiCoCrAlY transition layer (CTE 12.5×10⁻ 6 / K) and nickel-based high-temperature alloy substrate (CTE 13.1×10⁻ 6 / K) achieves 98% thermal expansion matching, and the interface shear stress under thermal cycling is reduced to 6MPa (the traditional welding structure is 85MPa); Al 2 O 3 Layer at 2200K oxygen partial pressure 10⁻¹ 4 Pa still maintains 1×10 6Ω·cm resistivity, leakage current is suppressed below 0.05μA, ensuring stable transmission of weak signals; The gradient film structure uses electromagnetic shielding design (surface resistance <0.1Ω / sq) and anti-particle scouring coating (hardness HV1800) to make the signal-to-noise ratio >54dB under 150dB vibration noise.

[0051] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. The components of the embodiments of the present invention described and shown in the drawings here can usually be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0052] Experimental data and simulation analysis High temperature performance test Working continuously for 6 hours in a 1200℃ gas flow, the sensitivity is 9.8 μV / ℃ and the error is ≤±1.5% (compared to standard S-type thermocouple).

[0053] After 1000 thermal cycles (room temperature ↔ 1200°C), there is no peeling of the film and the insulation resistance remains ≥ 80 kΩ9.

[0054] Dynamic response test Under step temperature (500℃→1000℃), the response time τ=15 μs, which is better than traditional thermocouples (τ≥1 ms).

[0055] Thermodynamic simulation ANSYS Fluent is used to simulate the temperature field distribution on the blade surface, and the disturbance of the flow field caused by the thin film sensor can be ignored (speed loss <0.2%).

[0056] COMSOL multi-physics coupling simulation shows that at 1500°C, the maximum thermal stress of the film is 320 MPa, which is lower than the yield strength of NiCoCrAlY (450 MPa).

[0057] Electrical performance simulation Thermocouple output model was established based on Matlab to predict the linearity of thermoelectric potential and temperature (R²=0.998), and the error distribution was verified by Monte Carlo analysis (±1.2% confidence interval).

[0058] Pneumatic integrity assurance The ultra-thin conformal structure (micrometer-level thickness) makes the error between the sensor profile and the blade curvature less than 0.5μm, which reduces the local airflow Mach number disturbance by 98% compared to the 0.3-0.5mm protrusion of the traditional thermocouple (simulation data: CFD analysis shows that the shock wave offset is <0.1mm) No mechanical lead interference, thin film leads are directly integrated through a gradient transition layer, eliminating the risk of lead breakage under high-speed rotation (>15000rpm), and the centrifugal acceleration tolerance is increased to 18000g (compared to the 9800g limit of traditional leads) 2. Thermal-mechanical coupling stability The gradient transition layer design (such as TiN / AlN multilayer structure) achieves substrate-film thermal expansion coefficient matching, and the residual stress is <150MPa under 2000K thermal shock conditions (the residual stress of traditional welding structure is >800MPa), and the bonding strength is increased to 45MPa.

[0059] The high temperature dielectric properties of the insulating layer (such as Al2O3) are such that the volume resistivity remains at 10 at 2200K. 6 Ω·cm, blocking leakage current <1μA (the resistivity of traditional ceramic insulation layer decays to 10 at 1800K 3 Ω·cm).

[0060] 3. Optimization of Thermoelectric Sensitivity The bipolar sensitive film overlap structure produces a high Seebeck coefficient (18.5μV / K@2000K), and the sensitivity is 230% higher than that of traditional K-type thermocouples.

[0061] The cold-end self-compensation mechanism achieves cold-end temperature drift compensation through the heat capacity regulation of the thin film material in the pin area (thickness ratio 1:3), and the thermoelectric potential error is <0.5% in the 300-800K gradient field.

[0062] 4. Breakthrough in dynamic response performance The micron-scale heat capacitance structure (heat capacitance <0.1nJ / K) shortens the thermal response time to 15μs, and can capture transient temperature fluctuations with a frequency of up to 10kHz (the traditional thermocouple response time is 1-10ms).

[0063] The distributed sensing area (minimum unit 50μm×50μm) achieves a spatial resolution of 0.1mm², which is 2 orders of magnitude higher than ultrasonic temperature measurement and can detect sudden temperature changes in micro-areas at the transition point of the boundary layer.

[0064] 5. Enhanced environmental tolerance Multi-layer anti-corrosion packaging (such as top layer Y 2 O 3 -ZrO 2Composite film) reduces the high temperature oxidation rate to 0.03mg / (cm².h) (traditional coating is 0.25mg / (cm².h)), and extends the service life to 1000h in oxygen-rich gas The anti-thermal radiation interference design suppresses background thermal radiation noise through the spectral selective absorption of the positive and negative film (absorption rate α=0.92@3-5μm band), and the temperature measurement error is <±3K (infrared temperature measurement error ±7K).

[0065] Experimental and simulation data have verified the high temperature stability (1200℃ error ≤1.5%) and dynamic response advantages (15 μs) of the present invention. By integrating wireless transmission and intelligent algorithms, the application in the sixth-generation aircraft engines is promoted.

[0066] In summary, the blade-based in-situ measurement thin film temperature sensor of the present invention realizes in-situ, non-disturbance, and high-precision measurement of the surface temperature of aircraft engine blades through multi-layer thin film conformal design and material optimization.

[0067] The above contents are only for explaining the technical idea of ​​the present invention and cannot be used to limit the protection scope of the present invention. Any changes made on the basis of the technical solution in accordance with the technical idea proposed by the present invention shall fall within the protection scope of the claims of the present invention.

Claims

1. A blade-based in-situ measurement thin film temperature sensor, characterized in that: The multilayer film structure comprises a multilayer film structure, which is arranged on the surface of a blade (1), the multilayer film structure and the curved surface of the blade (1) are manufactured in a conformal manner, the thickness of the multilayer film structure is at the micron level, and in-situ measurement of the blade surface temperature is achieved.

2. The blade-based in-situ measurement thin film temperature sensor according to claim 1, characterized in that: The multilayer film structure includes, from bottom to top, a transition layer (2), an insulating layer (3), a positive electrode sensitive film (5) and a negative electrode sensitive film (6). The positive electrode sensitive film (5) and the negative electrode sensitive film (6) are overlapped at the upper end to form a temperature sensing area (7). The positive electrode sensitive film (5) and the negative electrode sensitive film (6) form a cold end lead area (4) of a thermocouple at the lower end pin to lead out a temperature measuring thermoelectric potential.

3. The blade-based in-situ measurement thin film temperature sensor according to claim 2, characterized in that: The thickness of the transition layer (2) is 0.1-10 μm.

4. The blade-based in-situ measurement thin film temperature sensor according to claim 3, characterized in that: The transition layer (2) is made of NiCoCrAlY, with a specific composition of 45% Ni, 20% Co, 20% Cr, 14% Al and 1% Y.

5. The blade-based in-situ measurement thin film temperature sensor according to claim 2, characterized in that: The thickness of the insulating layer (3) is 5 to 30 μm.

6. The blade-based in-situ measurement thin film temperature sensor according to claim 5, characterized in that: The insulating layer (3) is Al2O3.

7. The blade-based in-situ measurement thin film temperature sensor according to claim 2, characterized in that: The length of the positive electrode sensitive film (5) and the negative electrode sensitive film (6) is greater than or equal to 60 mm, the width is 0.5 to 5 mm, and the thickness is 0.5 to 5 μm.

8. The blade-based in-situ measurement thin film temperature sensor according to claim 7, characterized in that: The positive electrode sensitive film (5) is ITO, and the negative electrode sensitive film (6) is In2O3.

9. The blade-based in-situ measurement thin film temperature sensor according to claim 2, characterized in that: The area of ​​the temperature sensing region (7) is greater than or equal to 16×5 mm.

10. The blade-based in-situ measurement thin film temperature sensor according to claim 1, characterized in that: The material of the blade (1) is a high temperature resistant nickel-based alloy.

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