Sensing method and device for micro inner cavity size and three-dimensional coordinate based on two-dimensional micro-focus collimation
A technology of three-dimensional coordinates and sensing devices, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of difficult to distinguish the polarity of measurement elements, difficult adjustment of imaging optical path, increase in data volume, etc., and achieve easy on-line measurement, system The effect of simple structure and efficient extraction
A technology of three-dimensional coordinates and sensing devices, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of difficult to distinguish the polarity of measurement elements, difficult adjustment of imaging optical path, increase in data volume, etc., and achieve easy on-line measurement, system The effect of simple structure and efficient extraction
CN101520313BInactive Publication Date: 2011-02-02HARBIN INST OF TECH
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[0035] A micro-cavity size and three-dimensional coordinate sensing method based on two-dimensional micro-focus collimation, through the following steps to realize the sensing of the three-dimensional displacement of the optical fiber probe measuring rod:
[0036] â‘ Combining a part of the fiber optic probe rod with the microspherical biconvex lens;
[0037] Since the three-dimensional displacement monitoring of the optical fiber probe measuring rod 14 is to be realized by establishing a two-dimensional micro-focus collimated imaging optical path of a point light source, it is necessary to use a microspherical double-convex lens 12 with a small focal length in combination with the optical fiber probe measuring rod 11, so that They have the same motion state, and the spherical radius of the microspherical double-convex lens 12 is usually between 20 μm and 100 μm, so its curvature is 5×10 4 m -1 ~10 4 m -1 between. Optical fiber probe measuring rod 14 is a measuring rod usin...
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The invention relates to a sensing method and a device for micro inner cavity size and three-dimensional coordinate based on two-dimensional micro-focus collimation, belonging to the technical filed oThe invention relates to a sensing method and a device for micro inner cavity size and three-dimensional coordinate based on two-dimensional micro-focus collimation, belonging to the technical filed oe, easy miniaturization, large measured depth-diameter ratio, simple system structure, good real-time performance, easy practical application, and has obvious advantages for carrying out the quick ande, easy miniaturization, large measured depth-diameter ratio, simple system structure, good real-time performance, easy practical application, and has obvious advantages for carrying out the quick andultra-precise measurement and calibration for the inner cavity micro-size and the three-dimensional coordinate. Especially, the top of the resolution capability can reach the deep sub-nanometer magni ultra-precise measurement and calibration for the inner cavity micro-size and the three-dimensional coordinate. Especially, the top of the resolution capability can reach the deep sub-nanometer magnitude, and an absolute zero position exists in the three-dimensional measurement direction.tude, and an absolute zero position exists in the three-dimensional measurement direction.f precise instrument manufacture and measurement, in particular to a sensing method and a device for micro and complex inner cavity size and three-dimensional coordinate in the filed of sub-macroscopyf precise instrument manufacture and measurement, in particular to a sensing method and a device for micro and complex inner cavity size and three-dimensional coordinate in the filed of sub-macroscopy, which is especially suitable for the three-dimensional detection of blind holes with large depth-diameter ratio. The device combines a micro spherical biconvex lens and an optical fiber probe measur, which is especially suitable for the three-dimensional detection of blind holes with large depth-diameter ratio. The device combines a micro spherical biconvex lens and an optical fiber probe measuring rod, and establishes a point light two-dimensional micro-focus collimation imaging light path by using the micro spherical biconvex lens, thereby realizing the high magnification and the sensing fing rod, and establishes a point light two-dimensional micro-focus collimation imaging light path by using the micro spherical biconvex lens, thereby realizing the high magnification and the sensing for the three-dimensional displacement of the optical fiber probe measuring rod by utilizing the light path. The invention has the characteristics of small measured force of a single optical fiber probor the three-dimensional displacement of the optical fiber probe measuring rod by utilizing the light path. The invention has the characteristics of small measured force of a single optical fiber prob
Description
technical field [0001] The invention belongs to the technical field of precision instrument manufacturing and measurement, in particular to a sensing method and device for the structural dimensions and three-dimensional coordinates of tiny and complex inner cavities in the "sub-macroscopic" field, and is especially suitable for small blind holes with large depth-to-diameter ratios 3D structure size detection. Background technique [0002] One of the trends in the development of industrial products is the miniaturization and precision of the inner scale. With the development of the aerospace industry, the electronic industry, and medical equipment, the demand for precision and tiny inner cavity components has increased sharply, such as fuel injection pipes, inertial instruments, and optical fibers. Holes in ferrules, wire drawing dies, printed circuit boards and medical devices (such as Eustachian tubes), etc. Due to the limitation of the space scale and the influence of the...
Claims
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Patent Timeline
02 Feb 2011
Publication
CN101520313B
- IPC
- G01B11/02; G01B11/03
- CPC
- G01B11/007
- Inventors
- è°ä¹…彬; 王飞