Sensing method and device for micro inner cavity and two-dimensional coordinate based on one-dimensional micro-focus collimation
A technology of two-dimensional coordinates and sensing methods, applied in measurement devices, optical devices, instruments, etc., can solve the problems of difficulty in distinguishing the polarity of measurement elements, difficulty in adjusting the imaging optical path, loss of practicability, etc., and achieves easy high-speed online. Measurement, the effect of simple system structure
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[0035] A micro-cavity size and two-dimensional coordinate sensing method based on one-dimensional micro-focus collimation, through the following steps to realize the sensing of the two-dimensional displacement of the fiber optic probe measuring rod:
[0036] ① Using a part of the fiber optic probe measuring rod 11 as a microcylindrical double-convex lens with a super large curvature;
[0037] Optical fiber probe measuring rod 11 is a measuring rod using a section of optical fiber as a probe. One-dimensional collimation is performed on the light emitted by the point light source 10; its mechanical characteristics lie in the high rigidity of the optical fiber and its strong resistance to deformation. Since the object to be detected is a tiny inner cavity, the radius of the fiber optic probe measuring rod 11 is usually very small, usually between 10 μm and 100 μm, and its curvature as a cylindrical lens is between 10 μm and 10 μm. 5 m -1 ~10 4 m -1 Between , the focal length ...
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