Resonant nano three-dimensional contact measuring head based on optical fiber Bragg grating

Abstract

The invention discloses a resonant nano three-dimensional contact measuring head based on an optical fiber Bragg grating. The contact measuring head is characterized in that the structure of the measuring head is designed as follows: an integrated probe with a bulb is fixed in the central point of a suspension support in a T shape, support rods, in the same plane, on the suspension support are in radial distribution. A flexible cantilever and the center of the suspension support are fixed together, far ends of flexible arms, in the same plane, on the flexible cantilever are fixed on an outer connection ring, and a measuring probe is formed. Lower ends of FBG sensors arranged in a packaging layer are fixed at the far ends of the support rods of the suspension support. The upper ends of the FBG sensors are fixed at the edge of a piezoelectric ceramic vibration plate. The piezoelectric ceramic vibration plate is fixedly connected with a displacement output shaft of piezoelectric ceramic through screw threads. The piezoelectric ceramic is fixedly connected onto a bottom surface of a measuring head pedestal through screw threads. The contact measuring head is advantaged by high sensitivity, small measuring force, small microscopic surface active force influence, good long-term stability, good repeatability and low anisotropy.

Description

technical field [0001] The invention relates to a nano three-coordinate measuring head, more specifically a measuring head mechanism of a three-coordinate measuring machine used for nanoscale three-dimensional dimension measurement. Background technique [0002] In the past two decades, microelectronics technology has developed rapidly, and various microdevices have emerged, such as micromechanical parts, microelectromechanical systems MEMS, biomedical devices, and optical devices. The three-dimensional measurement of the geometric feature size of these micro-devices relies on the coordinate measuring machine CMM, but the positioning of each axis and the comprehensive accuracy of the traditional commercial three-coordinate measuring machine can only reach the micron level, which cannot meet the accuracy requirements of nanometer measurement; at the same time, the The diameter of the measuring head probe is relatively large, which cannot be used for small-sized three-dimensio...

AI Technical Summary

Problems solved by technology

The British Commonwealth Institute of Physics NPL has developed a probe based on piezoelectric ceramic dynamic sensing, which has studied the influence of the microscopic surface force of the probe. However, due to the use of MEMS technology to process the probe structure, its processing and assembly are quite complicated.

Images