Method for high-precision measurement of sphericity of micro-spherical probe of nanometer three-coordinate measuring machine

A three-coordinate measuring machine, high-precision technology, applied in point coordinate measurement, electromagnetic measurement device, electric/magnetic contour/curvature measurement, etc., can solve unreliable and unreasonable problems, and achieve small measurement force and high coverage , to ensure the effect of high-precision measurement

Inactive Publication Date: 2017-09-29
HEFEI UNIV OF TECH
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Problems solved by technology

This method is a two-dimensional measurement method, and the ball is a three-dimensional object. It is unreasonable and unreliable to calculate the sphericity by measuring the roundness of the three surfaces. Therefore, it is necessary to study a new high-precision microsphere Measuring technology is very necessary

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  • Method for high-precision measurement of sphericity of micro-spherical probe of nanometer three-coordinate measuring machine
  • Method for high-precision measurement of sphericity of micro-spherical probe of nanometer three-coordinate measuring machine
  • Method for high-precision measurement of sphericity of micro-spherical probe of nanometer three-coordinate measuring machine

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Embodiment Construction

[0027] The following will be combined with Figure 4 , taking a nano-coordinate measuring machine (Nano-CMM) microsphere probe 5 with a diameter of about 300 μm used on a nano-coordinate measuring machine as an example, to further introduce the present invention.

[0028] A method capable of realizing high-precision measurement of the sphericity of a nanometer three-coordinate measuring machine microball probe, comprising the following steps: first, a tungsten probe S with a large aspect ratio and a sharp tip is fixed on a quartz tuning fork resonant sensor A to construct a Tuning fork scanning probe probe with nanoscale resolution and large aspect ratio. Schematic diagram of the structure of the tuning fork scanning probe probe figure 1 .

[0029] Place the two tuning fork scanning probe probes in a differential manner, and construct a differential scanning measurement system with the aid of precision micro-motion stages 1 and 2 for measuring their motion displacement; befo...

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Abstract

The invention discloses a method for high-precision measurement of the sphericity of the micro-spherical probe of a nanometer three-coordinate measuring machine. A tungsten probe with large length-to-diameter ratio and a quartz tuning fork are combined. Scanning probe heads with nanometer-level resolution are constructed based on a precision micro stage. During measurement, the two scanning probe heads are driven by the micro stage to scan the large-section contour of a microsphere in the x-axis direction in a differential manner. Radial error generated in the scanning process can be automatically eliminated in a differential manner, and thus, accurate parameters of the large-section contour of the microsphere can be obtained. After the microsphere is rotated a certain angle, the measurement is repeated to acquire multiple sets of parameters of the large-section contour. A three-dimensional spatial contour of the microsphere is constructed through fitting according to feature points obtained. The geometric parameters of the microsphere are calculated based on the three-dimensional spatial contour. Thus, high-precision measurement of the sphericity of the microsphere is realized. The method has the characteristics of small measuring force, wide measuring range, and high measuring precision.

Description

technical field [0001] The invention relates to the field of measurement of the sphericity of microspheres on a micron scale and the measurement of geometric parameters of other shapes and microstructures, and can be applied to nanometer three-coordinate measuring machines and other precision measuring instruments. method for high-precision measurement. Background technique [0002] Microspheres with a diameter of tens of microns to several millimeters have been widely used in precision bearings, micro-machines, MEMS devices, medical testing equipment, and scientific research. With the rapid development of micro-nano manufacturing technology, the Dimensional accuracy requirements are also getting higher and higher. For example, for nanometer three-dimensional coordinate measuring machines used for micro-nano precision detection, the diameter of the microsphere probe is within tens to hundreds of microns, and the sphericity generally requires tens of nanometers or even higher...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/008G01B7/012G01B7/016G01B7/28
CPCG01B7/016G01B7/008G01B7/012G01B7/28
Inventor 黄强先方传智芈梦梅腱吴奎
Owner HEFEI UNIV OF TECH
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