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63 results about "Resonant sensor" patented technology

Hydraulic engineering dam safety monitoring and early warning method and system

The invention relates to the technical field of hydraulic engineering safety monitoring, and particularly discloses a hydraulic engineering dam safety monitoring and early warning method and system, which realize comprehensive perception and accurate early warning of the health state of a dam structure through a composite sensing technology and an intelligent analysis algorithm. A micro-mechanical resonance sensor and a distributed optical fiber sensor are cooperatively deployed, and an interface and structure integrated three-dimensional monitoring network is constructed; a three-dimensional interface stripping characteristic spectrum is constructed based on a time-frequency conjoint analysis technology, and the bonding degradation state between the sensor and the dam body is accurately identified; a strain field anomaly distribution matrix is established through spatial correlation modeling, precise positioning of internal damage is realized, a dual-channel feature fusion network and a deep neural network evaluator based on an attention mechanism are designed, and multi-dimensional correlation analysis is performed on an interface state and structural damage features; and finally, realizing progressive response from data verification and multi-source verification to emergency linkage through a three-level linkage early warning decision tree.
Owner:JIANGXI ACAD OF WATER RESOURCES (JIANGXI PROVINCE DAM SAFETY MANAGEMENT CENT JIANGXI PROVINCE WATER RESOURCES MANAGEMENT CENT)

Single-capacitor inductive sense systems

A system may include an array of sensor elements, the array of sensor elements each comprising a first type of passive reactive element, a second type of passive reactive element electrically coupled to the array of sensor elements, a driver configured to drive the array of sensor elements and the second type of passive reactive element, and control circuitry configured to control enabling and disabling of individual sensor elements of the array of sensor elements to ensure no more than one of the array of sensor elements is enabled at a time such that when one of the array of sensor elements is enabled, the one of the array of sensor elements and the second type of passive reactive element together operate as a resonant sensor.
Owner:CIRRUS LOGIC INC

Real-time liquid flow rate monitoring sensor and method based on MEMS plane resonance technology

The invention belongs to the technical field of MEMS resonance sensors, and particularly relates to a real-time liquid flow rate monitoring sensor and method based on an MEMS plane resonance technology. Wherein the fan-shaped sensing plate is an arc plate, a central supporting beam is arranged at the rear end of the middle part of a small arc-shaped edge of the fan-shaped sensing plate, an electrothermal resonance excitation thin beam and a piezoresistive frequency reading thin beam are arranged on the left side and the right side of the fan-shaped sensing plate, and an electrothermal excitation resistor is embedded in the electrothermal resonance excitation thin beam; a piezoresistor is embedded in the piezoresistive frequency reading thin beam; according to the invention, the MEMS resonance technology is applied to the micro flow channel, and the high-precision measurement of the flow velocity of the fluid is realized through the frequency deviation characteristic of the torsional mode resonance generated by electromagnetic excitation under the action of the fluid.
Owner:SICHUAN UNIV

Tuned Microwave Resonant System for Subcutaneous Imaging

PendingUS20260130604A1Diagnostic recording/measuringMicrowave sensorsRadiologyMicrowave resonance
A method for non-invasively identifying a location of a mass or tumor including: providing a patient with a possible mass or tumor; providing a detector including one or more resonant sensors, each sensor including at least one loop resonator, at least one cavity resonator, or at least one waveguide resonator; detecting resonant frequencies at different locations on the patient's skin near locations of the mass or possible tumor; and locating the mass or tumor by noting a location of an atypical resonant frequency.
Owner:SOUTHERN METHODIST UNIVERSITY

Substance measurement device and substance measurement method

The embodiment of the invention provides a substance measuring device and a substance measuring method, the substance measuring device comprises a pressure difference forming pipe, and the apertures of at least two positions in the pressure difference forming pipe are different; the pressure sensor is arranged at the upstream of the pressure difference forming pipe and is used for detecting pressure data in the pressure difference forming pipe; the temperature sensor is arranged on the pressure difference forming pipe and is used for detecting temperature data of a multiphase object to be detected; the microwave resonance sensor is connected with the pressure difference forming pipe, the microwave resonance sensor comprises a channel, and the channel is communicated with the pressure difference forming pipe and used for collecting resonance data caused by the multiphase matter to be measured; and the pressure difference sensor is arranged on the pressure difference forming pipe and is used for detecting the pressure difference of at least two positions of the pressure difference forming pipe.
Owner:TIANDA NAXON SENSING TECHNOLOGY (TIANJIN) CO LTD

Dual-mode resonant sensor and closed-loop control method thereof

The invention provides a dual-mode resonant sensor, and relates to the technical field of sensors, and the dual-mode resonant sensor comprises a single resonator, two sides of a resonant beam of the single resonator are provided with a first differential detection electrode pair, a second differential detection electrode pair and a driving electrode pair; the first differential detection electrode pair is symmetrically arranged on two sides of the middle part of the resonant beam and is used for detecting a first-order modal vibration signal of the single resonator; the second differential detection electrode pair is symmetrically arranged at two ends of one side of the resonant beam and is used for detecting a second-order modal vibration signal of the single resonator; the driving electrode pair is arranged at two ends of the other side of the resonant beam and is used for applying an alternating current driving signal to the resonant beam; the closed-loop control circuit is connected with the first differential detection electrode pair through a pair of first input ends and connected with the second differential detection electrode pair through a pair of second input ends, the output end of the closed-loop control circuit is connected with the driving electrode pair, and the closed-loop control circuit is used for feeding back and adjusting the alternating current driving signal according to the first-order modal vibration signal and / or the second-order modal vibration signal. The invention further provides a closed-loop control method.
Owner:AEROSPACE INFORMATION RES INST CAS

A method and system for monitoring and early warning of a water conservancy dam safety

The application relates to the technical field of water conservancy project safety monitoring, and particularly discloses a water conservancy project dam safety monitoring and early warning method and system, which realizes comprehensive perception and accurate early warning of the health state of a dam structure through composite sensing technology and intelligent analysis algorithms; a three-dimensional monitoring network integrated with interfaces and structures is constructed through the cooperative deployment of micromechanical resonant sensors and distributed optical fiber sensors; a three-dimensional interface peeling characteristic spectrum is constructed based on time-frequency joint analysis technology, and the bonding deterioration state between the sensors and the dam body is accurately identified; a strain field abnormal distribution matrix is established through spatial correlation modeling, accurate positioning of internal damage is realized, a double-channel feature fusion network based on an attention mechanism and a deep neural network evaluator are designed, multi-dimensional correlation analysis of the interface state and structural damage features is carried out, and finally, a three-stage linkage early warning decision tree is used to realize a progressive response from data verification, multi-source verification to emergency linkage.
Owner:JIANGXI ACAD OF WATER RESOURCES (JIANGXI PROVINCE DAM SAFETY MANAGEMENT CENT JIANGXI PROVINCE WATER RESOURCES MANAGEMENT CENT)

Resonator-enhanced gas sensors, systems, and methods

A gas sensing system includes a packaged photonic sensor including a resonant sensor and a control system. The control system includes a light module, a receiver module, and a core module. The light module includes a light source to generate light and transmit it to the photonic sensor. The receiver module receives light signals from the photonic sensor and converts them to digital signals. The core module includes a computing device and is programed to: control the light module to cause the light module to generate and transmit light to the packaged photonic sensor, receive the digital signals from the receiver module, and detect one or both of a concentration of a gas that interacted with the resonant sensor and an identification of the gas whose molecules interacted with the resonant sensor based at least in part on the received digital signals from the receiver module.
Owner:WASHINGTON UNIV IN SAINT LOUIS

Wound monitoring bandage and method based on flexible passive inductance-capacitance resonance sensing

The invention belongs to the technical field of medical sensing, and relates to a wound monitoring bandage and method based on flexible passive inductance-capacitance resonance sensing. Comprising a contact wound dressing; the sensor assembly comprises a first transparent dressing packaging layer, a second transparent dressing packaging layer and an LC resonance sensor, the first transparent dressing packaging layer and the second transparent dressing packaging layer are arranged in a stacked mode, the LC resonance sensor is packaged between the first transparent dressing packaging layer and the second transparent dressing packaging layer, and the LC resonance sensor is of a planar spiral structure; the second transparent dressing packaging layer is arranged at the top of the contact wound dressing; and the transparent dressing fixing layer covers and fixes the sensor assembly and the contact wound dressing. The problems that in the prior art, wound healing state evaluation depends on subjective experience, continuous real-time monitoring cannot be achieved, the healing environment is prone to being damaged and infection is caused by frequent dressing replacement are solved, and the dual functions of objective, continuous and non-invasive monitoring on the wound healing process and active healing promotion are achieved.
Owner:NORTHWESTERN POLYTECHNICAL UNIV

Scanning probe microscopy using sensor molecules for improving light transmission to samples

A scanning probe microscope and microscope operating method utilizes at least one material having a dielectric constant (ε) and a resonant sensor material between a metal probe tip and a sample surface. When electromagnetic radiation from a light source is transmitted to the junction between the metal probe tip and the sample, absorption of the electromagnetic radiation by the resonant sensor material, which depends on the dielectric constant of the at least one material of the sample, is detected.
Owner:MOLECULAR VISTA INC

A feedback type sensing method and device based on a weak coupling resonant type sensor

This application provides a method and apparatus based on a weakly coupled resonant sensor. In executing the method, a disturbance signal is first obtained by converting the measured physical quantity. This disturbance signal is then input into a target sensor, causing the target sensor to generate at least one resonant signal based on the disturbance signal. The target sensor is a multi-degree-of-freedom weakly coupled resonant sensor, which generates at least one resonant signal through modal localization. Finally, a feedback signal is generated and output based on the obtained resonant signal. In this way, the generated feedback signal balances the stiffness disturbance signal acting on the target sensor, and the feedback signal is output as the sensing result. This decouples the sensitivity of the multi-degree-of-freedom weakly coupled resonator in the sensor from the overall measurement range of the sensor. Thus, without affecting the ultra-high sensitivity of the multi-degree-of-freedom weakly coupled resonator, the detection range of the sensor is greatly expanded.
Owner:AEROSPACE INFORMATION RES INST CAS

Oil-filled medium isolation packaging type silicon resonance pressure sensor and preparation method thereof

The invention discloses an oil-filled medium isolation packaging type silicon resonance pressure sensor and a preparation method thereof, belongs to the technical field of MEMS pressure sensors, and solves the problem that an existing pressure sensor is liable to have intermittent faults. The device specifically comprises a tube body, a concave cavity is formed in the top of the tube body, and a silicon resonance chip is arranged in the concave cavity; a cap is mounted at the top of the tube body, an isolation diaphragm is arranged between the cap and the tube body, and silicone oil is filled between the isolation diaphragm and the tube body. According to the invention, a measurement medium enters the cap through the filler neck to extrude the isolation diaphragm, the isolation diaphragm generates micro deformation when sensing the pressure of the medium, the pressure is transmitted to the silicon resonance chip through silicone oil in the pipe body, and the silicon resonance chip converts the external pressure into a perceivable analog signal; in the process, an external measuring medium does not directly act on the silicon resonance chip, so that the problem of intermittent fault or complete failure of the silicon resonance sensor in a corrosive gas or liquid environment is avoided.
Owner:CHENGDU CAIC ELECTRONICS CO LTD

Radio frequency resonance sensing type fingerstall, system and method for quantitative biochemical detection

The invention relates to a radio frequency resonance sensing type fingerstall for quantitative biochemical detection, comprising: a fingerstall assembly comprising a first fingerstall, a second fingerstall, and a connecting part for connecting the first fingerstall and the second fingerstall, the first fingerstall and the second fingerstall being respectively used for sleeving a thumb and an index finger; the quantitative ring cutting device is arranged on the surface of the finger prominence position of the first fingerstall; the radio frequency resonance sensor is arranged on the surface of the finger prominence position of the second fingerstall; the radio-frequency signal acquisition circuit module is arranged at the finger root of the second fingerstall, is electrically connected with the radio-frequency resonance sensor and is configured to be used for transmitting a sweep-frequency radio-frequency excitation signal to the radio-frequency resonance sensor and receiving a reflected signal of the sweep-frequency radio-frequency excitation signal; when the thumb sleeved with the first fingerstall and the index finger sleeved with the second fingerstall stretch into the two sides of the sheet-shaped part of the plant to be detected and are kneaded, a sample with the fixed size is cut from the sheet-shaped part of the plant to be detected through the quantitative ring cutting device, and the cut sample directly makes contact with the surface of the radio frequency resonance sensor; therefore, the resonant frequency of the radio frequency sensor is shifted and / or the reflection coefficient is changed, so that the reflection signal of the radio frequency resonant sensor received by the radio frequency signal acquisition circuit module is changed. Thus, the flexible wearable fingerstall provided by the invention integrates an unmarked, non-modified and direct contact type radio frequency resonance sensor and a quantitative ring cutting device for quantitative sampling, can perform quantitative sampling and real-time detection on solid samples such as plant leaves and the like, and realizes an integrated operation process of'detection once pinching '; and the standardization, portability and field applicability of detection are remarkably improved.
Owner:TIANJIN UNIV

Instrumented substrate and method for in SITU wafer measurements

PCT designated stageWO2026177986A1Resonant sensorMechanical engineering
The instrumented substrate includes a multilayer substrate, a plurality of quartz resonant sensors, and a processor each disposed within the multilayer substrate. The plurality of quartz resonant sensors are configured to oscillate at a frequency that is dependent on parameters of the multilayer substrate in proximity to each sensor and generate a plurality of measurement signals based on the frequency of oscillation of each sensor. The processor is configured to receive the plurality of measurement signals from the plurality of quartz resonant sensors and determine at least one local parameter of the multilayer substrate based on each of the plurality of measurement signals.
Owner:KLA CORP

Inclined oil-water two-phase flow microwave sensor combination flow measurement method

The invention relates to an inclined oil-water two-phase flow microwave sensor combination flow measurement method. The method comprises the following steps: manufacturing a spiral annular microwave resonance sensor for measuring the water holding rate; manufacturing a double-ring microwave sensing unit; fixing the prepared spiral annular microwave resonance sensor and the double-ring microwave sensing unit on a measuring pipeline; obtaining a calculation formula of the inclined oil-water two-phase flow mixed dielectric constant by using a spiral annular microwave resonance sensor; establishing a mixed dielectric constant model changing along with the water holdup under different flow patterns, wherein the mixed dielectric constant model is used for predicting the water holdup under the corresponding flow pattern according to the obtained mixed dielectric constant; predicting the water holdup by using a mixed dielectric constant model changing along with the water holdup under the current flow pattern; carrying out inclined oil-water two-phase flow related flow velocity measurement; and obtaining a function about the mixing flow velocity, the oil phase apparent flow velocity and the oil holdup.
Owner:TIANJIN UNIV

Water holding rate measuring method based on spiral annular microwave resonance sensor

The invention provides a spiral annular microwave resonance sensor and provides a water holding rate measuring method based on the spiral annular microwave resonance sensor, and the method comprises the following steps: respectively connecting a coaxial feeder line of the spiral annular microwave resonance sensor with an excitation port and a receiving port of a vector network analyzer; an observation window is formed in the inclined measuring pipe section, a high-speed camera used for obtaining the flow pattern of the flowing-through oil-water two-phase flow is arranged at the observation window, and a spiral annular microwave resonance sensor is installed at the downstream of the observation window; establishing a mixed dielectric constant model changing along with the water holdup under different flow patterns, wherein the mixed dielectric constant model is used for predicting the water holdup under the corresponding flow pattern according to the obtained mixed dielectric constant; solving a mixed dielectric constant based on the relationship between the resonant frequency and the mixed dielectric constant; and predicting the water holdup according to the mixed dielectric constant model which is identified by the high-speed camera and corresponds to the current flow pattern and changes along with the water holdup. The device and the method can realize the measurement of the water holdup of the oil-water two-phase flow under the complex flow pattern.
Owner:TIANJIN UNIV

Coal bed gas shaft pulverized coal migration and settlement test system

The utility model belongs to the technical field of coal-bed gas development, and discloses a coal-bed gas shaft pulverized coal migration and settlement test system which comprises a simulation shaft which comprises an inner-layer pipe column and an outer-layer pipe column, an annular space part is arranged between the inner-layer pipe column and the outer-layer pipe column, and the annular space part is communicated with the inner-layer pipe column. The simulation shaft can rotate and incline around the center of the simulation shaft within a preset angle; the liquid injection system is connected with the first end of the annulus part and used for inputting pulverized coal slurry into the annulus part; the gas injection system is connected with the second end of the annulus part and used for inputting simulation gas into the annulus part, and the simulation gas and the pulverized coal slurry can flow to the inner-layer pipe column from the annulus part and return to the liquid injection system; the tuning fork resonance sensor is arranged in the simulation shaft in a penetrating mode, and a fork body is located in the inner-layer pipe column and used for detecting the vibration frequency when the pulverized coal slurry and the simulation gas flow in the inner-layer pipe column. The device can simulate the migration and settlement of pulverized coal in wellbores of different well types.
Owner:CHINA UNITED COALBED METHANE +1

Mode-adjustable MEMS (Micro Electro Mechanical System) driving detection device

The invention relates to a mode-adjustable MEMS (Micro Electro Mechanical System) driving detection device which comprises a central anchor point, a central cross beam, an annular outer frame, a first spring beam and a second spring beam which are integrally formed through an MEMS etching process and are integrally of an annular symmetrical structure shaped like a Chinese character'ri '; one end of the first spring beam is rigidly connected with the end part of the central cross beam, and the other end is rigidly connected with the inner side wall of the annular outer frame; the annular outer frame is divided into an upper half-frame structure and a lower half-frame structure which are mirrored, anchor points are formed by the end faces of the half-frame structures, and a second spring beam is rigidly connected between the anchor points; and switching of the device between a high-precision mode and a high-output mode is realized by regulating and controlling the width ratio of the two modes. Therefore, in a high-precision mode, the nonlinear effect can be counteracted, uniform energy distribution is realized, and the method is adaptive to large-dynamic-range precision measurement scenes such as gyroscopes and other resonant sensors including resonant pressure sensors, meters, temperature sensors and the like.
Owner:SUZHOU XINSHIJI MICROELECTRONICS CO LTD

Deploying resonant sensors into a smart tire ecosystem

A disclosed vehicle tire includes at least one resonator embedded within tire material. The resonator may be formed from three-dimensional monolithic carbonaceous growth and may detect electromagnetic pings from an interrogator device. The resonator may generate electromagnetic return signals indicating material state and environmental conditions at positions proximate to the resonator. The resonator may resonate at a first frequency when the material is in a first state or under first environmental conditions, and at a second frequency when in a second state or under second environmental conditions. The resonant frequency of the carbonaceous growth is based on physical characteristics of the material. This frequency-shifting capability enables real-time monitoring of tire conditions including deformation, wear, pressure changes, and environmental factors through passive electromagnetic sensing without requiring moving parts or complex electronics.
Owner:LYTEN INC

An acoustic resonant sensor and method of manufacture and use thereof

The application relates to the technical field of analysis and detection, and discloses an echo wall mode sensor and a preparation method and application thereof. The echo wall mode sensor comprises a substrate and a fluorescent layer arranged on the substrate, and an inert layer is further arranged on the fluorescent layer; the fluorescent layer comprises an inner fluorescent layer and an outer fluorescent layer; the concentration of fluorescent dye in the inner fluorescent layer is 0.05-0.4 mg / mL; and the concentration of fluorescent dye in the outer fluorescent layer is 0.3-1.2 mg / mL. Through the technical scheme, the problems of low signal-to-noise ratio and poor displacement stability of an echo wall mode sensor based on fluorescent microspheres in the related art are solved.
Owner:DELUTONG SHIJIAZHUANG BIOTECH CO LTD

Method for simultaneously measuring viscosity and density of trace liquid

The invention discloses a method for simultaneously measuring viscosity and density of trace liquid. Liquid circulates in the thin-wall cylinder resonator, the electromagnetic transducer is attached to the thin-wall cylinder resonator, the thin-wall cylinder resonator is excited through a coil to generate ultrasonic guided waves, an attenuation signal is received, a dimensionless time domain attenuation coefficient and resonance frequency of the attenuation signal are extracted, and the resonance frequency of the thin-wall cylinder resonator is calculated. And in combination with the established model of the relationship between the liquid viscosity and density parameters and the time domain attenuation and the resonant frequency, synchronous and simultaneous decoupling of the liquid viscosity and density parameters is realized. The method overcomes the limitation that the viscosity and the density are difficult to measure synchronously, the operation is complicated, the environmental requirement is high, and the guided wave resonance sensor is difficult to distinguish the two parameters, and is rapid, convenient and suitable for online monitoring measurement.
Owner:HUZHOU INST OF ZHEJIANG UNIV

Magnetic field interference detection method, magnetic field interference detection equipment and storage medium

The embodiment of the invention discloses a magnetic field interference detection method, magnetic field interference detection equipment and a storage medium, the method is applied to equipment to be detected, the equipment to be detected is internally provided with a double-inductance resonance sensor circuit, and the double-inductance resonance sensor circuit is used for outputting a resonance frequency signal. The method comprises the following steps: periodically detecting a resonant frequency signal output by a double-inductor resonant sensor circuit to obtain detection frequencies corresponding to at least two continuous periods respectively; if the detection frequency is out of the preset frequency range, obtaining a target offset of the detection frequency relative to the reference frequency; determining an offset type based on the target offset; wherein the offset type is used for representing a frequency change rule of the detection frequency caused by external magnetic field interference; and performing magnetic field interference detection according to the target offset and the offset type corresponding to the detection frequency to obtain a magnetic field interference detection result. Therefore, low-cost and high-precision magnetic field interference detection can be realized without stacking a plurality of Hall sensors.
Owner:SHENZHEN KAIFA TECH (CHENGDU) CO LTD

Integrated semiconductor gas sensor, preparation method thereof and hydrogen detection method

The invention provides an integrated semiconductor gas sensor, a preparation method thereof and a hydrogen detection method. The sensor comprises a supporting substrate and an LC oscillation structure arranged on the surface of the supporting substrate, the LC oscillation structure comprises an inductance function device and a capacitance function device; the inductance function device comprises two inductance electrodes and an inductance sensitive layer and is used for obtaining equivalent inductance value offset under the condition that the magnetic conductivity of the inductance hydrogen sensitive material is changed; the capacitance functional device comprises two capacitance electrodes, a capacitance dielectric layer and a capacitance sensitive layer, and is used for obtaining equivalent capacitance value offset under the condition that the dielectric constant of the capacitance hydrogen sensitive material is changed; the inductance function device and the capacitance function device are connected in parallel, so that the inductance function device and the capacitance function device are connected in parallel and integrated to form an LC resonant sensor structure, and high-selectivity detection of target gas is realized through coupling amplification of equivalent inductance value offset and equivalent capacitance value offset.
Owner:XIANGTAN UNIV

Echo wall mode sensor and preparation method and application thereof

The invention relates to the technical field of analysis and detection, and provides an echo wall mode sensor and a preparation method and application thereof. The echo wall mode sensor comprises a substrate and a fluorescent layer arranged on the substrate, an inert layer is further arranged on the fluorescent layer, the fluorescent layer comprises an inner fluorescent layer and an outer fluorescent layer, and in the inner fluorescent layer, the concentration of fluorescent dye is 0.05-0.4 mg / mL; and in the outer fluorescent layer, the concentration of the fluorescent dye is 0.3-1.2 mg / mL. According to the technical scheme, the problems of low signal-to-noise ratio and poor displacement stability of an echo wall mode sensor based on fluorescent microspheres in related technologies are solved.
Owner:DELUTONG SHIJIAZHUANG BIOTECH CO LTD

Phase-locked loop output waveform conditioning circuit for closed-loop self-excitation of resonant sensor

The invention discloses a phase-locked loop output waveform conditioning circuit for closed-loop self-excitation of a resonant sensor, and belongs to the technical field of resonant sensors. The phase-locked loop is characterized in that the phase-locked loop output waveform conditioning circuit is composed of a Sallen-Key Butterworth high-pass filter (1), a Sallen-Key Chebyshev low-pass filter (2) and an amplitude adjusting circuit (3). TTL square wave signals output by the phase-locked loop are firstly input into the Sallen-Key Butterworth high-pass filter (1) to filter direct current bias voltage, then input into the Sallen-Key Chebyshev low-pass filter (2) to filter higher harmonics, and finally input into the amplitude adjusting circuit (3) to be amplified or attenuated to required voltage. According to the invention, through cascade connection of the Sallen-Key Butterworth high-pass filter (1) and the Sallen-Key Chebyshev low-pass filter (2), DC bias voltage and higher harmonics in an output signal of the phase-locked loop CD4046 are filtered out, and a fundamental wave signal with minimum amplitude change in a passband is obtained.
Owner:CHINA JILIANG UNIV

Resonant Frequency Shift as Etch Stop of Gate Oxide of MOSFET Transistor

An etch process performed during semiconductor processing is monitored using a resonant structure on a surface of a wafer, formed on the surface of a wafer as a resonant cavity. A resonance sensor is positioned over the wafer within a plasma etch chamber so as to establish a resonance with the resonant structure. A resonant frequency of the resonant structure is sensed through the resonant structure and shifts in the resonant frequency are thereby detected during an etch process as a measurement of the etch process. The etch process is controlled in accordance with the shift in the resonant frequency.
Owner:KING FAISAL UNIV

Blood glucose testing system based on multi-resonance wide-frequency sensor

The invention provides a noninvasive blood glucose testing system based on a multi-resonance wide-frequency sensor. The blood glucose testing system comprises a base, a multi-resonance sensor, an in-vivo detection device, an in-vitro detection device and a signal collector. The multi-resonance sensor is installed on the base, the multi-resonance sensor is configured to generate a plurality of radio frequency fields with different resonance frequencies, the in-vivo detection device is detachably connected with the base and located on the multi-resonance sensor, and the in-vivo detection device is configured to fix a finger of a to-be-detected object so that the radio frequency fields can detect the finger; the in-vitro detection device is detachably connected with the base and located on the multi-resonance sensor, and the in-vitro detection device is configured to contain glucose fluid so that a radio frequency field can detect the glucose fluid; the signal collector is electrically connected with the multi-resonance sensor, and the signal collector is configured to collect scattered signals. The system adjusts and adapts to the resonant frequency of the radio frequency field of the current to-be-detected object, the detection accuracy is improved, and the system has universality and personality adaptability.
Owner:SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI

Signal enhancement of resonant sensor for cell measurements

A variety of applications can include cell-responsive structures to provide enhanced sensitivity of a resonant sensor in cell detection. A cell-responsive layer can be structured over a resonant sensor. The arrangement of the resonant sensor and the cell-responsive layer can be implemented as a resonant sensor to measure changes in cells. With the cell-responsive layer responsive to cells proximate to the cell-responsive layer, changes in resonant frequency of the arrangement of the resonant sensor and the cell-responsive layer over time at which the cells are proximate to the cell-responsive layer can be monitored. Interrogating the resonant sensor can be conducted wirelessly along with wirelessly transmitting data collected from the interrogation. Additional apparatus, systems, and methods are disclosed.
Owner:IOWA STATE UNIV RES FOUND INC

Resonant sensor reading adaptive optimization method and system based on reinforcement learning

The invention relates to a resonance type sensor reading adaptive optimization method and system based on reinforcement learning, and the method comprises the steps: integrating a current sampling frequency spectrum local maximum value set, a historically sampling frequency spectrum local maximum value point set and a linear compensation trend, constructing a state space vector, and taking the state space vector as the input of a reinforcement learning strategy network; a fusion action is output based on the strategy network, the fusion action comprises a historical local selected maximum value point selection action and a corresponding compensation action, and the fusion action is used for achieving spectrum peak value judgment and frequency correction at the same time; according to the method, a modeling method based on reinforcement learning is introduced, historical information and dynamic characteristics of the sensor can be fully utilized, real-time optimization of reading is achieved, and the problem that a traditional method based on fixed filtering or single-point correction is not sensitive to interference is solved; the adopted fusion action mechanism gives consideration to peak selection and frequency compensation at the same time, and the anti-noise and anti-vibration capabilities of the resonant sensor in a complex environment are remarkably improved.
Owner:SHENZHEN KENAN TECH DEV CO LTD

A method for measuring water holding rate based on spiral annular microwave resonance sensor

The application provides a spiral annular microwave resonance sensor and a water holdup rate measuring method based on the spiral annular microwave resonance sensor, and the method is as follows: coaxial feed lines of the spiral annular microwave resonance sensor are connected with an excitation port and a receiving port of a vector network analyzer respectively, an observation window is arranged on an inclined measuring pipe section, a high-speed camera for obtaining a flow pattern of the flowing oil-water two-phase flow is arranged at the observation window, and the spiral annular microwave resonance sensor is arranged downstream of the high-speed camera; a mixed dielectric constant model changing with the water holdup rate under different flow patterns is established, which is used for predicting the water holdup rate under the corresponding flow pattern according to the obtained mixed dielectric constant; the mixed dielectric constant is obtained based on the relationship between the resonance frequency and the mixed dielectric constant; and the water holdup rate is predicted according to the mixed dielectric constant model corresponding to the current flow pattern recognized by the high-speed camera and changing with the water holdup rate. The application can realize the water holdup rate measurement of the oil-water two-phase flow under a complex flow pattern.
Owner:TIANJIN UNIV