The utility model discloses a
microwave plasma reaction system, including: frame,
microwave resonance cavity, assembles on the frame,
microwave source device, assembles to the
microwave resonance cavity outer wall, is used for to
microwave resonance cavity inside microwave feed -in,
quartz tube, from top to bottom through
microwave resonance cavity setting, it has the reaction section in microwave
resonance cavity, gas inlet component, with one end of
quartz tube intercommunication, is used for the gas into,
assembly spare, be located in the
quartz tube, along the axial direction of quartz tube and extend to the reaction section, needle body, be located in the reaction section, perpendicular the axial arrangement of quartz tube, set up a plurality of, a plurality of needle body
assembly spare is arranged along the axial direction of quartz tube and arranges, blanking component, with another end of quartz tube intercommunication, is used for discharging
processing material, the microwave
plasma reaction system that the utility model proposes, through microwave energy to gas
ionization, can high -efficient production
plasma, to material
processing effect is good.