The invention discloses a three-dimensional surface
topography measurement method and
system based on optical
microscopy, which relate to the field of
micro nano object measurement. The method comprises steps: a measured surface is placed in an observation range of an
optical microscope, an appropriate objective lens and a
lighting system are selected, an objective lens driving
system is used to drive the objective lens and the measured surface to perform longitudinal
relative motion, and during a serial layer scanning process, an
image acquisition module is used to acquire a sequence image, and the depth position information when each image is acquired is recorded at the same time; a focusing
evaluation algorithm is used to calculate the definition value of each pixel point in the sequence image; and according to the change condition of the focusing degree of the pixel point in the
image sequence, a depth
calculation algorithm is used to calculate the depth information of each pixel point, and thus, three-dimensional coordinates of the pixel point are thus acquired. The method and the
system are applicable to the
micro nano object measurement field, the surface
waviness and the roughness can be measured, the three-dimensional surface
topography data are rebuilt, the material surface texture information can be acquired, and the method and the system can be used for measuring a complex surface.