Lithium-niobate-based hybrid integration fiber-optic gyroscope optical chip

A technology of hybrid integration and fiber optic gyroscope, which is applied in the direction of Sagnac effect gyroscope, gyroscope/steering sensing equipment, measuring device, etc., to achieve the effect of simple and easy preparation process, convenient packaging and miniaturization

Inactive Publication Date: 2015-09-23
ZHEJIANG UNIV
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[0031] The present invention will be further described below in conjunction with the accompanying drawings.

[0032] refer to Figure 1-4 , the lithium niobate-based hybrid integrated fiber optic gyroscope optical chip of the present invention includes a lithium niobate waveguide chip 1, a light source 2 and a signal detector 12; wherein the lithium niobate waveguide chip 1 is stepped, and has first Step plane 14, vertical step 15, second step plane 17, inclined step 13 and third step plane 20, the first step plane 14 is L-shaped, and the light source 2 and signal detector 12 are arranged on the first step plane On the second step plane 17 there are first Y branch waveguide 4, three 90 ° arc waveguides 5, 9, 10, tapered waveguide 3 and straight waveguide 11, the base waveguide of the first Y branch waveguide 4 connects the first One end of a 90° arc waveguide 5, the other end of the first 90° arc waveguide 5 is connected with one end of the second 90° arc waveguide 9, a branc...

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Abstract

The invention discloses a lithium-niobate-based hybrid integration fiber-optic gyroscope optical chip which comprises a lithium niobate waveguide chip, a light source and a signal detector. The lithium niobate waveguide chip comprises a first Y branch waveguide, a second Y branch waveguide, three 90-degree arc waveguides, a conical waveguide and a straight waveguide which are communicated with one another. The wide end of the conical waveguide serves as a light input port of the optical chip. The light source is right opposite to the light input port. One end of the straight waveguide serves as a signal output port of the optical chip. The light sensitive face of the signal detector is right opposite to the signal output port. A preparation process of the optical chip mainly adopts a photo-etching method and is obtained through the combination of the dry-method etching technology and the titanium-diffusion and annealing proton exchange technology; the integrated chip replaces an optical device separately assembled in a traditional fiber-optic gyroscope, the light source, the detector, a coupler and a modulator are integrated on a lithium niobate substrate, the integrity of a fiber-optic gyroscope optical system is improved, and therefore the reliability and environment adaptability of the fiber-optic gyroscope are improved.

Description

technical field [0001] The invention relates to an integrated optical chip of electro-optical materials, in particular to a lithium niobate-based hybrid integrated optical chip for a miniaturized fiber optic gyroscope. Background technique [0002] With the development of inertial technology, the volume and weight of the inertial system in the application field are getting higher and higher, and the design of integrated and miniaturized fiber optic gyroscope becomes inevitable. The traditional fiber optic gyroscope optical system is composed of various discrete optical devices, which are connected by fiber coupling and fusion splicing. This form of fiber optic gyroscope has cumbersome process steps, complex structure and difficult installation, and the stability and reliability of coupling points and fusion points are poor. , can not meet the growing needs of the inertial system small integration technology. [0003] In order to improve the performance index of the fiber op...

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Application Information

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IPC IPC(8): G01C19/72
CPCG01C19/72G01C19/721
Inventor 李贝佘玄段启航李珂刘承舒晓武
Owner ZHEJIANG UNIV
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