According to the acousto-optic modulator for realizing
microwave photon conversion and the preparation method thereof provided by the invention, the
runway type micro-ring is constructed on the piezoelectric film layer, the
acoustic resonance frequency is accurately matched with the
free spectral range of the
runway type micro-ring structure, the cyclic generation of an optical modulation
sideband is realized, the interaction between light
waves and sound
waves is greatly enhanced, and the optical
modulation efficiency is improved. The acousto-optic
coupling efficiency is remarkably improved, the
power consumption of the device is greatly reduced,
microwave photon conversion is achieved, the device is compact in overall structure and small in size, high-density on-
chip integration is easy to achieve, further, periodic polarization is carried out on the interdigital electrodes, a cavity is formed under the piezoelectric film layer, and the
photoelectric conversion efficiency of the device is improved. And the piezoelectric film layer is suspended, so that the working bandwidth of the device is further improved, and the requirement of high-speed
information processing is met.