Electrooptical modulator

Abstract

The invention discloses an electrooptical modulator which comprises mode spot converters, Y-branch beam splitting optical waveguide, Y-branch beam combining optical waveguide, hybrid integration phasemodulation arms and travelling wave electrodes, wherein the mode spot converters are used for reducing mode field mismatching of single-mode optical fibers and the modulator and realizing high-efficiency coupling of optical fields of the single-mode optical fibers and the modulator; the Y-branch beam splitting optical waveguide is used for splitting a laser beam to form beam splitting laser; thehybrid integration phase modulation arms are used for transmitting laser, converting optical mode fields and realizing high-efficiency modulation of an electrical signal to an optical signal; the travelling wave electrodes facilitate realization of speed matching of optical wave and microwave, and further improve the band width of the modulator; and the Y-branch beam combining optical waveguide isused for combining the modulated beam splitting laser into a laser beam. The modulator integrates the mode spot converters, so that the coupling loss of the optical fields from the optical fibers tothe modulator is greatly reduced; and the insertion loss of the modulator is reduced. The modulator can obviously improve the electrooptical modulation efficiency, so that the half-wave voltage of themodulator can be reduced.

Description

technical field [0001] The invention belongs to the technical field of semiconductor integration, and more specifically relates to a hybrid integrated high-performance electro-optical modulator. Background technique [0002] In recent years, radar and electronic countermeasures, wireless communication and other information systems are developing rapidly in the direction of broadband, integration and miniaturization. These information systems have strict requirements on the analog optical link. The modulator is the core device in the analog optical link. It needs to have high bandwidth, low half-wave voltage, low insertion loss, small size and high linearity. [0003] Many institutions at home and abroad have conducted in-depth explorations on the development of high-performance modulators, and have achieved fruitful progress and results. According to the classification of material system, electro-optic modulators are mainly divided into lithium niobate (LiNbO 3 ) modulator...

AI Technical Summary

Problems solved by technology

Among them, LiNbO 3 The modulator is the most mature electro-optic modulator with large bandwidth and good reliability, but it is large in size and difficult to integrate with lasers and detectors; the InP modulator is easy to integrate, but has high loss and low maturity; the Si modulator is small in size, Low loss, but poor linearity, less commercially available; Polymer electro-optic modulator has large bandwidth, but high loss, poor reliability

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