Folding silicon-lithium niobate hybrid integrated electro-optic modulator and preparation method thereof
A technology integrating electro-optic and lithium niobate, applied in the direction of light guide, optics, instrument, etc., can solve the problem of reducing the size of the modulator, and achieve the effect of miniaturization, low cost and simple process
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Embodiment 1
[0042] A folded silicon-lithium niobate hybrid integrated electro-optical modulator provided by the present invention includes a silicon-based optical waveguide on an insulator, an optical splitter, a silicon waveguide and a lithium niobate waveguide coupler, a bonding dielectric layer, and lithium niobate Waveguides, crossed waveguides, optical combiners, and modulating electrodes. The silicon-based optical waveguides and optical splitters constitute the optical input end and realize the splitting of light into two paths; the two paths of light respectively pass light from the silicon-based optical waveguide to the silicon-based optical waveguide through the waveguide coupler. Coupled to the lithium niobate optical waveguide; the light in the lithium niobate optical waveguide is coupled from the lithium niobate waveguide to the silicon-based optical waveguide through the waveguide coupler before the optical path turns; taking advantage of the low bending loss of the silicon-base...
Embodiment 2
[0045] Figure 4 Shown is another embodiment of the present invention. In this embodiment, the modulator includes: a silicon-based input waveguide 10, a silicon-based optical splitter 20, a silicon waveguide and a lithium niobate waveguide coupling structure 50, and a first A waveguide arm 30, a second waveguide arm 31, a silicon-based optical combiner 21, a silicon-based output waveguide 11, a first ground electrode 40, a second ground electrode 42 and a signal electrode 41; the first waveguide arm 30 is First lithium niobate waveguide 301, second lithium niobate waveguide 303, fifth lithium niobate waveguide 305, silicon-lithium niobate waveguide coupling structure 50, first silicon-based curved waveguide 302, third silicon-based curved waveguide 304, The second waveguide arm 31 consists of a third lithium niobate waveguide 311, a fourth lithium niobate waveguide 313, a sixth lithium niobate waveguide 315, a silicon-lithium niobate waveguide coupling structure 50, and a second...
Embodiment 3
[0047] Image 6 Shown is a preparation method of a foldable silicon-lithium niobate hybrid integrated electro-optic modulator, the steps are:
[0048] S1. Use photolithography and etching technology to produce the required silicon-based waveguide structure on the insulator silicon film substrate;
[0049] S2. Spin-coating a bonding medium on the substrate obtained in the step S1;
[0050] S3. Pasting the lithium niobate film on the substrate described in S2 by bonding technology to obtain a silicon-lithium niobate composite substrate;
[0051] S4. Use appropriate processes such as etching, wet etching, mechanochemical polishing, etc. to remove the substrate of the lithium niobate film as needed;
[0052] S5. Use photolithography and etching techniques to make lithium niobate waveguides as needed;
[0053] S6. Depositing a silicon dioxide buffer layer;
[0054] S7. Etching silicon dioxide to open a window for the electrode;
[0055] S8. Prepare an electrode to obtain a silicon-lithium niob...
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