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Sonic surface wave microfluid driver for chip lab and manufacturing method thereof

A lab-on-a-chip and surface acoustic wave technology, which is applied to laboratory containers, laboratory utensils, and thermal effects to detect fluid flow, etc., can solve the problems of insufficient bonding and no SAW micro-driver, etc., and achieve long life and reliable operation Effect

Inactive Publication Date: 2008-11-12
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to insufficient combination with MEMS technology and driver technology, there is no really convenient, practical and effective SAW microdriver

Method used

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  • Sonic surface wave microfluid driver for chip lab and manufacturing method thereof
  • Sonic surface wave microfluid driver for chip lab and manufacturing method thereof
  • Sonic surface wave microfluid driver for chip lab and manufacturing method thereof

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Embodiment Construction

[0022] The embodiments of the present invention are described in detail below in conjunction with the accompanying drawings: this embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following the described embodiment.

[0023] Such as figure 1 As shown, the surface acoustic wave microfluidic driver used in the lab-on-a-chip in this embodiment includes: a substrate 1 , an interdigital transducer 2 and a microfluidic channel 3 . Wherein, the substrate 1 is a lithium niobate single crystal of 128°Y-X, on which is an interdigital transducer 2 formed by interdigitated electrodes intersecting each other, and the microfluidic channel 3 combined with the substrate 1 is made of PDMS (polydimethyl Silicone) material micro-machined.

[0024] Such as figure 2 As shown, the interdigital trans...

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Abstract

The invention relates to a surface acoustic wave micro-fluidic drive for a chip lab pertaining to the technical field of micro-electro-mechanical system and a manufacture method thereof. The drive of the invention comprises a base, an interdigital transducer and a micro-fluidic channel, wherein the base is a 128 degrees Y-X lithium niobate single crystal, an IDT formed by the intercrossed interdigital transducer is on the base, and the micro-fluidic channel is integrated with the base. The invention uses floating electrode type unidirectional transducer structure design to realize unidirectional driving of the micro fluid, the procedure of the method is: (1) processing of the floating electrode type unidirectional transducer; (2) micro-processing of the micro-fluidic channel; (3) integration of the base and the micro-fluidic channel. The whole processing procedure of the invention can be completely made by means of semiconductor material based micro-manufacture method, having characteristics of no moving micro-parts itself and no damage to the fluid dielectric etc., the processing has advantages of reliable operation, stabilization and long service life.

Description

technical field [0001] The invention relates to a driver in the technical field of micro-electromechanical systems and a manufacturing method thereof, in particular to a surface acoustic wave microfluidic driver for a lab-on-a-chip and a manufacturing method thereof. Background technique [0002] In recent years, biochip technology has attracted more and more attention. and other fields have broad application prospects. Its representative technical product is a miniature full analysis system based on Lab-on-chip, which is characterized by using microelectronics, micromechanics, chemistry, physics and computer technology to detect samples in life science research , The analysis process is continuous, integrated and miniaturized. This especially requires that each component that makes up the system should be as simple and small as possible and suitable for a large number of integrations. For example, many microstructures such as filters, reaction chambers, micropumps, and m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B1/00B81B7/02G01N35/00C12N1/00B01L3/00B01J19/00
Inventor 李以贵张俊峰
Owner SHANGHAI JIAO TONG UNIV
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