The invention discloses a micro-strip
circulator based on an MEMS technology. The micro-strip
circulator comprises a magnetic conductive bottom plate, a back circuit carrier, a first
microcrystalline glass plate, a front circuit carrier, a second
microcrystalline glass plate, an insulating spacer and a
magnet, the invention further discloses a manufacturing process of the
microstrip circulator. Comprising the following steps: performing primary
punching on a
glass ceramic substrate, performing primary
coating, performing secondary
coating, manufacturing a pattern of a front circuit carrier, manufacturing the front circuit carrier, removing
photoresist and a UV film, manufacturing a pattern of a back circuit carrier, manufacturing the back circuit carrier, performing secondary
punching, assembling and connecting and the like, thereby obtaining the
microstrip circulator. The
dielectric constant of the microcrystal glass plate can be set and regulated according to the type and gyromagnetic characteristics of the gyromagnetic ferrite, so that the
microwave guiding effect of the
microstrip line is matched with the gyromagnetic effect of the gyromagnetic ferrite, the
signal transmission stability of the microstrip circulator is improved, the miniaturized
mass production of the microstrip circulator is promoted, the crack rate and the damage rate are low, the cost is reduced, and the application prospect is wide. The production benefit is high.