The invention discloses a microwave vacuum drier, which comprises a feeding vacuum chamber, a microwave vacuum chamber and a cooling discharging vacuum chamber, which are sequentially connected through vacuum valves. A stepping conveyor is arranged in each vacuum chamber, the vacuum valves are arranged at the front end of the feeding vacuum chamber and the rear end of the cooling discharging vacuum chamber respectively, and a microwave heating device is arranged on the side wall of the microwave vacuum chamber. The microwave vacuum drier is easier to be synchronously matched with a production line by feeding in a stepping way, microwave vacuum drying and a continuous drying way of cooling and discharging. Compared with a single-chamber microwave vacuum dryer, the microwave vacuum drier has the advantages that time for inflating the vacuum chambers after drying is complete, taking and placing feed plates and re-vacuuming after the feed plates are mounted is saved, so that working efficiency is improved; and the microwave vacuum drier is applicable to dewatering and drying for agricultural products, health care products, food, medicinal materials, fruits, vegetables, chemical raw materials and the like with high added-value and heat sensitivity, and used for low-temperature concentration of chemical products, removal of water of crystallization, dewatering and drying of traditional Chinese medicine extracts and enzyme preparations, and the like.