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Calibration device for capacitance displacement sensor

A technology of displacement sensor and capacitive sensor, which is applied in the direction of adopting electrical devices, measuring devices, instruments, etc., can solve the problems of low calibration accuracy, achieve high installation and adjustment accuracy, high calibration result accuracy, and small Abbe error and cosine error Effect

Active Publication Date: 2014-10-01
BEIJING GUOWANG OPTICAL TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a calibration device for capacitive displacement sensors in order to solve the technical problem of low calibration accuracy of the capacitive displacement sensor calibration device in the prior art

Method used

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  • Calibration device for capacitance displacement sensor
  • Calibration device for capacitance displacement sensor
  • Calibration device for capacitance displacement sensor

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Embodiment Construction

[0049] In order to further understand the present invention, the following combination Figure 1-13 The preferred embodiments of the present invention are described, but it should be understood that these descriptions are only for further illustrating the features and advantages of the present invention rather than limiting the claims of the present invention.

[0050] like Figure 1-12 As shown, the capacitive displacement sensor calibration device includes a capacitive displacement mechanism and an interferometer mechanism; wherein, the capacitive displacement mechanism includes a calibration table base 1, a calibration table support frame 2, a sensor support frame 3, a driver 4, a calibration table static platform 5, Hinge 6 , calibration table moving platform 7 , measuring unit, sensor holder 13 , capacitive sensor 14 , tested panel 15 and driver push rod 16 ; the interferometer mechanism includes an interferometer unit and an interferometer base 20 .

[0051] In this emb...

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Abstract

The invention discloses a calibration device of a capacitance displacement sensor, and belongs to the technical field of sensor calibration. The technical problem that a calibration device for a capacitance displacement sensor in the prior art is low in calibration precision is solved. The calibration device comprises a capacitance displacement mechanism and an interferometer mechanism. The capacitance displacement mechanism comprises a calibration table base, a calibration table supporting frame, a sensor supporting frame, a driver, a calibration table static platform, a hinge, a calibration table dynamic platform, a measurement angle reflecting mirror, a light guide element supporting frame, a light guide element fixing base, a reference angle reflecting mirror, a beam splitter mirror, a sensor fixing base, a capacitance sensor, a measured panel and a driver push rod. The interferometer mechanism comprises a single-axis laser interferometer, an interferometer adjusting base, an interferometer supporting frame and an interferometer base. According to the device, the parallelism depth precision of a sensing face and a measured face of the existing calibration device for the capacitance displacement sensor is improved when the sensor is mounted, measurement errors caused by adjustment are reduced, and the calibration precision of the sensor is improved.

Description

technical field [0001] The invention relates to a calibration device for a capacitance displacement sensor, which belongs to the technical field of calibration of a capacitance displacement sensor. Background technique [0002] The lithography projection objective lens is the key equipment in the ultra-large / very large-scale integrated circuit manufacturing process. In recent years, with the continuous reduction of the line width of the integrated circuit, the resolution of the lithography projection objective lens has gradually improved. However, due to errors in the manufacturing, testing, and system assembly of optical components in the objective lens, it is necessary to adjust the position of the optical components through a micro-displacement adjustment mechanism to compensate for the wave aberration of the assembled projection objective lens system. Capacitive displacement sensor is a kind of precision displacement detection equipment commonly used in micro displacemen...

Claims

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Application Information

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IPC IPC(8): G01B7/02
Inventor 张德福郭抗李显凌隋永新
Owner BEIJING GUOWANG OPTICAL TECH CO LTD
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